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Simulation of phosphorus diffusion and iron gettering with sentaurus process

: Schön, J.; Warta, W.

Fulltext urn:nbn:de:0011-n-2098782 (157 KByte PDF)
MD5 Fingerprint: 3067ef19cb70393cf1ca36f2a7451669
Created on: 6.9.2012

Lincot, D. ; European Commission, Joint Research Centre -JRC-:
The compiled state-of-the-art of PV solar technology and deployment. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC 2008. Proceedings. CD-ROM : Held in Valencia, Spain, 1 - 5 September 2008; Proceedings of the international conference
München: WIP-Renewable Energies, 2008
ISBN: 3-936338-24-8
ISBN: 978-3-936338-24-9
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <23, 2008, Valencia>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

In this work simulations of 1-dimensional diffusion profiles for the emitter formation from a POCl3 gas with Sentaurus Process (Synopsis®) are investigated. We implemented phosphorus in-diffusion via growing phosphorus silicate glass (PSG) in the software and adjusted the parameters for this PV relevant process. In addition a model for phosphorus diffusion gettering (PDG) of iron was implemented. For the precipitation of metals two different models were used, one with a mean radius for all precipitates following Hamâ s law and another one using the Fokker-Planck-Equation (FPE). To fit parameters and to verify the simulations, the results are compared with phosphorus depth profiles, which were measured after in-diffusion from POCl3 gas at temperatures between 785 and 900°C. We also show some examples for gettering of iron during phosphorus diffusion.