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Plasma cluster processing for advanced solar cell manufacturing

: Rentsch, J.; Seiffe, J.; Walter, F.; Hofmann, M.; Weiss, L.; Gautero, L.; Decker, D.; Schlemm, H.; Preu, R.

Fulltext urn:nbn:de:0011-n-2098246 (153 KByte PDF)
MD5 Fingerprint: 920490e418a64a81bd5181f7337f95cc
Created on: 6.9.2012

Lincot, D. ; European Commission, Joint Research Centre -JRC-:
The compiled state-of-the-art of PV solar technology and deployment. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC 2008. Proceedings. CD-ROM : Held in Valencia, Spain, 1 - 5 September 2008; Proceedings of the international conference
M√ľnchen: WIP-Renewable Energies, 2008
ISBN: 3-936338-24-8
ISBN: 978-3-936338-24-9
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <23, 2008, Valencia>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

The industrial fabrication of high-efficiency structures with passivated emitter and rear (PERC) solar cell structures affords the implementation of subsequent etching and deposition processes on industrial equipment with high wafer throughput. Such process sequences can be realized in the future within plasma cluster tools without breaking the vacuum. A newly developed industrial inline plasma system from Roth&Rau for etching and deposition (MAiA) is presented. Within this study, different fields of application of plasma cluster tools for standard as well as high efficiency processing are discussed. First realizations of plasma process clustering for PSG removal, cleaning and AR coating, for passivation stack deposition as well as for surface conditioning and passivation are demonstrated and the results are discussed.