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Plasma hydrogen passivation for crystalline silicon thin-films

: Lindekugel, S.; Lautenschlager, H.; Ruof, T.; Reber, S.

Fulltext urn:nbn:de:0011-n-2097111 (268 KByte PDF)
MD5 Fingerprint: 980b66e08faf011aca4b6b4777013c9b
Created on: 6.9.2012

Lincot, D. ; European Commission, Joint Research Centre -JRC-:
The compiled state-of-the-art of PV solar technology and deployment. 23rd European Photovoltaic Solar Energy Conference, EU PVSEC 2008. Proceedings. CD-ROM : Held in Valencia, Spain, 1 - 5 September 2008; Proceedings of the international conference
München: WIP-Renewable Energies, 2008
ISBN: 3-936338-24-8
ISBN: 978-3-936338-24-9
European Photovoltaic Solar Energy Conference and Exhibition (EU PVSEC) <23, 2008, Valencia>
Conference Paper, Electronic Publication
Fraunhofer ISE ()

This paper presents the beneficial effects of Remote Plasma Hydrogen passivation (RPHP) on Recrystallized Wafer-Equivalent (RexWE) solar cells. We varied the dominating parameters of the RPHP process and analysed their effect on the RexWE solar cell parameters. A low and a high temperature regime were investigated for the RPHP. Both showed remarkable results in terms of Voc, FF, Jsc and boosts. The striking benefit of a newly optimised hydrogenation process increased the Voc from 454 to 54 mV and the efficiency from 4.0 to 6.0% by means of a 45 min process at 450°C.