Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2021Smart Platform for Rapid Prototyping: Solutions in the Dilemma of Flexibility and Standardization
Anger, Sabrina; Klingert, Felix; Häublein, Volker; Pfeffer, Markus; Schellenberger, Martin
Konferenzbeitrag
2015Nachbearbeitung von teilgetrennten Bauelementen in der Halbleitertechnik
Lewke, Dirk; Schellenberger, Martin
Studie
2012Ablation Free Dicing of 4H-SiC Wafers with Feed Rates up to 200 mm/s by Using Thermal Laser Separation
Lewke, Dirk; Koitzsch, Matthias; Schellenberger, Martin; Pfitzner, Lothar; Ryssel, Heiner; Zühlke, Hans-Ulrich
Konferenzbeitrag
2012IMPROVE - a joint European effort to boost efficiency in semiconductor manufacturing
Schellenberger, Martin; Koitzsch, Matthias; Roeder, Georg; Pfeffer, Markus; Schöpka, Ulrich; Mattes, Andreas; Pfitzner, Lothar
Vortrag
2011Thermal Laser Separation (TLS) for separating multi-crystalline silicon wafers: A comparison with state-of-the-art methods
Koitzsch, Matthias; Schellenberger, Martin
Poster
2011A virtual equipment as a test bench for evaluating virtual metrology algorithms
Mattes, Andreas; Koitzsch, Matthias; Lewke, Dirk; Müller-Zell, Michael; Schellenberger, Martin
Konferenzbeitrag
2011Virtual equipment. A test bench for virtual metrology algorithms
Mattes, Andreas; Lewke, Dirk; Schellenberger, Martin
Vortrag