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| 2019 | Influence of growth conditions and film thickness on the anodization behavior of sputtered aluminum films and the fabrication of nanorod arrays
Barth, Stephan; Derenko, Susan; Bartzsch, Hagen; Zywitzki, Olaf; Modes, Thomas; Patrovsky, Fabian; Fiehler, Vera; Uhlig, Tino; Frach, P.; Eng, L.M. | Zeitschriftenaufsatz |
| 2018 | Time resolved detection of particle contamination during thin film deposition
Rüsseler, A.K.; Balasa, I.; Kricheldorf, H.-U.; Vergöhl, M.; Jensen, L.; Ristau, D. | Konferenzbeitrag |
| 2017 | Spontaneous formation of highly periodic nano-ripples in inclined deposition of Mo/Si multilayers
Voronov, Dmitriy; Gawlitza, Peter; Braun, Stefan; Padmore, Howard | Zeitschriftenaufsatz |
| 2016 | Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Gittner, Mathias; Labitzke, Rainer | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Thin-film deposition processes
Pflug, A.; Siemers, M.; Melzig, T.; Keunecke, M.; Schäfer, L.; Bräuer, G. | Aufsatz in Buch |
| 2015 | Growth condition of amorphous ZTO films from rotatable targets
Sittinger, V.; Pflug, A.; Schulz, C.; Siemers, M.; Melzig, T.; Meyer, B.; Kronenberger, A.; Oberste Berghaus, J.; Bosscher, W. de | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Influence of process parameters on properties of piezoelectric AlN and AlScN thin films for sensor and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald | Konferenzbeitrag |
| 2014 | Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1-XN films deposited by pulsed magnetron sputtering
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Zywitzki, Olaf; Herzog, Thomas; Walter, Susan; Heuer, Henning | Konferenzbeitrag |
| 2014 | Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
Niese, Sven; Krüger, Peter; Kubec, Adam; Laas, Roman; Gawlitza, Peter; Melzer, Kathleen; Braun, Stefan; Zschech, Ehrenfried | Zeitschriftenaufsatz |
| 2014 | Optical properties of unprotected and protected sputtered silver films: Surface morphology versus UV/VIS reflectance
Jobst, Paul Johannes; Stenzel, Olaf; Modsching, N.; Yulin, Sergiy; Wilbrandt, Steffen; Schürmann, Mark; Gäbler, Dieter; Kaiser, Norbert; Tünnerman, Andreas | Zeitschriftenaufsatz |
| 2013 | Heteroepitaxial Ge-on-Si by DC magnetron sputtering
Steglich, Martin; Patzig, Christian; Berthold, Lutz; Schrempel, Frank; Füchsel, Kevin; Höche, Thomas; Kley, Ernst-Bernhard; Tünnermann, Andreas | Zeitschriftenaufsatz |
| 2013 | Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Herzog, Thomas; Walter, Susan; Heuer, Henning | Konferenzbeitrag |
| 2012 | Ion beam sputter deposition of epitaxial Ag films on native oxide covered Si (100) substrates
Khare, C.; Gerlach, J.W.; Patzig, C.; Rauschenbach, B. | Zeitschriftenaufsatz |
| 2011 | High rate reactive sputter deposition of TiO2 films for photocatalyst and dye-sensitized solar cells
Sato, Y.; Hashimoto, T.; Miyamura, A.; Ohno, S.; Oka, N.; Suzuki, K.; Glöß, D.; Frach, P.; Shigesato, Y. | Zeitschriftenaufsatz |
| 2011 | Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W. | Zeitschriftenaufsatz |
| 2010 | Modified TiAlN coatings prepared by d.c. pulsed magnetron sputtering
Keunecke, M.; Stein, C.; Bewilogua, K.; Koelker, W.; Kassel, D.; Berg, H. van den | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2009 | Electrical insulation properties of sputter-deposited SiO2, Si3N4 and Al2O3 films at room temperature and 400 degrees C
Bartzsch, H.; Glöß, D.; Frach, P.; Gittner, M.; Schultheiß, E.; Brode, W.; Hartung, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2009 | Highly dense amorphous Nb2O5 films with closed nanosized pores
Vinnichenko, M.; Rogozin, A.; Grambole, D.; Munnik, F.; Kolitsch, A.; Möller, W.; Stenzel, O.; Wilbrandt, S.; Chuvilin, A.; Kaiser, U. | Zeitschriftenaufsatz |
| 2009 | Preparation and comparison of a-C:H coatings using reactive sputter techniques
Keunecke, M.; Weigel, K.; Bewilogua, K.; Cremer, R.; Fuss, H.-G. | Zeitschriftenaufsatz |
| 2008 | Sputter process with time-variant reactive gas mixture for the deposition of optical multilayer and gradient layer systems
Bartzsch, H.; Weber, J.; Lau, K.; Glöß, D.; Frach, P. | Konferenzbeitrag |
| 2006 | High-reflectivity Cr/Sc multilayer condenser for compact soft x-ray microscopy
Stollberg, H.; Yulin, S.; Takman, P.A.C.; Hertz, H.M. | Zeitschriftenaufsatz |
| 2006 | Process stabilization and increase of the deposition rate in reactive sputtering of metal oxides and oxynitrides
Severin, D.; Kappertz, O.; Kubart, T.; Nyberg, T.; Berg, S.; Pflug, A.; Siemers, M.; Wuttig, M. | Zeitschriftenaufsatz |
| 2006 | ZnO:Al films deposited by in-line reactive AC magnetron sputtering for a-Si:H thin film solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Hüpkes, J.; Schöpe, G.; Stiebig, H. | Zeitschriftenaufsatz |
| 2005 | Deposition of broadband antireflection coatings on plastic substrates by evaporation and reactive pulse magnetron sputtering
Weber, J.; Schulz, U.; Kaiser, N.; Bartzsch, H.; Frach, P. | Konferenzbeitrag |
| 2005 | Preparation and characterization of multilayers for EUV applications
Foltyn, T.; Braun, S.; Friedrich, W.; Leson, A.; Menzel, M. | Konferenzbeitrag |
| 2004 | Growth and characterization of thick cBN coatings on silicon and tool substrates
Bewilogua, K.; Keunecke, M.; Weigel, K.; Wiemann, E. | Zeitschriftenaufsatz |
| 2003 | Process simulation for advanced large area optical coatings
Pflug, A.; Szyszka, B.; Sittinger, V.; Niemann, J. | Konferenzbeitrag |
| 2002 | Simulation of the influence of via sidewall tapering on step coverage of sputter-deposited barrier layers
Bär, E.; Lorenz, J.; Ryssel, H. | Zeitschriftenaufsatz |
| 2001 | Dynamic simulation of process control of the reactive sputter process using two seperate targets and experimental results
Malkomes, N.; Bierhals, A.; Szyszka, B.; Vergöhl, M. | Konferenzbeitrag |
| 2001 | Mechanical and tribological properties of cBN films on silicon and tungsten carbide substrates
Keunecke, M.; Yamamoto, K.; Bewilogua, K. | Zeitschriftenaufsatz |
| 2001 | Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R. | Konferenzbeitrag |
| 2000 | Deposition of well adhering CBN films up to 2 µm thickness by B-C-N gradient layer systems
Yamamoto, K.; Keunecke, M.; Bewilogua, K. | Zeitschriftenaufsatz |
| 2000 | Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings
Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2000 | Erratum to: Effect of target material on deposition and properties of metal-containing DLC (Me-DLC) coatings
Bewilogua, K.; Cooper, C.V.; Specht, C.; Schröder, J.; Wittorf, R.; Grischke, M. | Zeitschriftenaufsatz |
| 2000 | Vapor phase deposition of cubic boron nitride films
Bewilogua, K.; Richter, F. | Aufsatz in Buch |
| 1999 | Improvement of the adhesion of sputter-deposited cubic boron nitride films
Walter, H.; Bewilogua, K.; Schütze, A.; Maassen, T. | Zeitschriftenaufsatz |
| 1998 | Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
Kirchhoff, V.; Kopte, T.; Winkler, T.; Schulze, M.; Wiedemuth, P. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 1997 | 3D simulation for sub-micron metallization
Bär, E.; Lorenz, J.; Ryssel, H. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 1997 | 3D simulation of sputter deposition of titanium layers in contact holes with high aspect ratios
Bär, E.; Lorenz, J.; Ryssel, H. | Konferenzbeitrag |
| 1997 | Deposition of BaTiO3 thin films by a hybrid DC-field enhanced PLD-process
Husmann, A.; Mertin, M.; Klotzbücher, T.; Kreutz, E.W. | Zeitschriftenaufsatz |
| 1997 | The PROMPT project and its application to the three-dimensional simulation of low-pressure chemical vapor deposition processes
Bär, E.; Lorenz, J. | Zeitschriftenaufsatz |
| 1997 | Three-dimensional simulation of conventional and collimated sputter deposition of Ti layers into high aspect ratio contact holes
Bär, E.; Lorenz, J.; Ryssel, H. | Konferenzbeitrag |
| 1996 | Numerical modelling of charged particle motion in electric and magnetic fields to assist magnetron design
Liebig, J.-S.; Frach, P.; Bartzsch, H.; Schulze, D.; Schwanbeck, H. | Konferenzbeitrag |
| 1996 | Preparation and characterization of cubic boron nitride and carbon nitride films
Bewilogua, K. | Konferenzbeitrag |
| 1996 | Preparation and characterization of cubic boron nitride and carbon nitride films
Bewilogua, K. | Konferenzbeitrag |
| 1996 | Segmented Fresnel zone lens elements with several primary foci
Galloway, P.C.M.; Ferstl, M.; Kuhlow, B.; Pawlowski, E.; Przyrembel, G. | Zeitschriftenaufsatz |
| 1995 | Diffractive optical elements: Fabrication and measurement of wavelength division multiplexer
Pawlowski, E. | Konferenzbeitrag |
| 1994 | Antireflection-coated diffractive optical elements fabricated by thin-film deposition
Pawlowski, E.; Kuhlow, B. | Zeitschriftenaufsatz |
| 1994 | Diffractive microlenses with antireflection coatings fabricated by thin film deposition
Pawlowski, E.; Engel, H.; Ferstl, M.; Furst, W.; Kuhlow, B. | Zeitschriftenaufsatz |
| 1994 | Integrated planar Fresnel zone lenses for beam forming and coupling
Pawlowski, E. | Konferenzbeitrag |
| 1993 | Control of reactive DC magnetron sputtering of SnO2 by means of optical emission
Kirchhoff, V.; Heisig, U. | Konferenzbeitrag |
| 1993 | Thin film deposition: An alternative technique for the fabrication of binary optics with high efficiency
Pawlowski, E. | Konferenzbeitrag |
| 1993 | Two dimensional array of AR-coated diffractive microlenses fabricated by thin film deposition
Pawlowski, E.; Engel, H.; Ferstl, M.; Furst, W.; Kuhlow, B. | Konferenzbeitrag |
| 1989 | Effects in sputtered Y1Ba2Cu3O7-8 films
Springholz, G.; Aichholzer, K.; Abt, R.; Leising, G.; Leitner, O.; Kranebitter, P.; Pölt, P. | Zeitschriftenaufsatz |
| 1985 | An InGaAsP/InP double-heterojunction bipolar transistor for monolithic integration with a 1.5- mu m laser diode
Su, L.M.; Grote, N.; Kaumanns, R.; Katzschner, W.; Bach, H.G. | Zeitschriftenaufsatz |