Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1999Application and cost analysis of scatterometry for integrated metrology
Benesch, N.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Konferenzbeitrag
1990Control of a reactive ion etching process for InP and related materials by in-situ ellipsometry in the near infrared
Muller, R.
Konferenzbeitrag