Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Characterization and modeling of screen-printed metal insulator semiconductor tunnel junctions for integrated bypass functionality in crystalline silicon solar cells
Thaidigsmann, Benjamin; Lohmüller, Elmar; Fertig, Fabian; Clement, Florian; Wolf, Andreas
Zeitschriftenaufsatz
2013Highly efficient broadband blazed grating in resonance domain
Oliva, Maria; Michaelis, Dirk; Fuchs, Frank; Tünnermann, Andreas; Zeitner, Uwe Detlef
Zeitschriftenaufsatz
2010Characterization of thickness variations of thin dielectric layers at a nanoscale using Scanning Capacitance Microscopy
Yanev, V.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Temperature distribution for electrically conductive and non-conductive materials during Field Assisted Sintering (FAST)
Räthel, J.; Herrmann, M.; Beckert, W.
Zeitschriftenaufsatz
2008A new oxidation protection strategy for silicon carbide foams
Martin, H.-P.; Standke, G.; Adler, J.
Zeitschriftenaufsatz
2006Corrosion of Si3N4-ceramics in aqueous solutions Part I: Characterisation of starting materials and corrosion in 1 NH2SO4
Schilm, J.; Gruner, W.; Herrmann, M.; Michael, G.
Zeitschriftenaufsatz
2002Highly selective etching of deep silica components using electron cyclotron resonance plasma
Ferstl, M.
Zeitschriftenaufsatz
2001Gesicherte Interpretationen der FTIR-Reflexionsspektren SiC-CVD-Schichten durch Spektrensimulation
Grählert, W.; Hopfe, V.
Zeitschriftenaufsatz
2001Hybrid polymer/silica vertical coupler switch with < -32 dB polarisation-independent crosstalk
Keil, N.; Yao, H.H.; Zawadzki, C.; Lösch, K.; Satzke, K.; Wischmann, W.; Wirth, J. von; Schneider, J.; Bauer, J.; Bauer, M.
Zeitschriftenaufsatz
2001Integrated thermo-optic switches in silica/polymer waveguide technology
Yao, H.H.; Keil, N.; Zawadzki, C.; Lösch, K.; Satzke, K.; Wischmann, W.; Wirth, J. van; Bauer, J.; Bauer, M.; Schneider, J.
Konferenzbeitrag
2000A selective CMP process for stacked low-k CVD oxide films
Hartmannsgruber, E.; Zwicker, G.; Beekmann, K.
Konferenzbeitrag
2000Thermo-optic vertical coupler switches using hybrid polymer/silica integration technology
Keil, N.; Weinert, C.; Wirges, W.; Yao, H.H.; Yilmaz, S.; Zawadzki, C.; Schneider, J.; Bauer, J.; Bauer, M.; Lösch, K.; Satzke, K.; Wischmann, W.; Wirth, J. von
Zeitschriftenaufsatz
1999Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H.
Konferenzbeitrag
1999The influence of surface oxidation on the pH-sensing properties of silicon nitride
Mikolajick, T.; Kuhnhold, R.; Schnupp, R.; Ryssel, H.
Konferenzbeitrag
1999Optical modelling vs. FTIR reflectance microscopy. Characterization of laser treated ceramic fibres
Grählert, W.; Leupolt, B.; Hopfe, V.
Zeitschriftenaufsatz
1999Reliability of metal-oxide-semiconductor capacitors on pH-silicon carbide
Treu, M.; Schorner, R.; Friedrichs, P.; Rupp, R.; Wiedenhofer, A.
Konferenzbeitrag
1999Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.
Konferenzbeitrag
1998Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
Kirchhoff, V.; Kopte, T.; Winkler, T.; Schulze, M.; Wiedemuth, P.
Konferenzbeitrag, Zeitschriftenaufsatz
1998Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon
Bär, E.; Lorenz, J.; Ryssel, H.
Konferenzbeitrag
1998High rate deposition of thick oxide layers on plastic substrates
Morgner, H.; Neumann, M.; Krug, M.; Straach, S.
Konferenzbeitrag
1998The hollow cathode. A high-performance tool for plasma-activated deposition
Morgner, H.; Neumann, M.; Straach, S.; Krug, M.
Konferenzbeitrag
1998Slow pH response effects of silicon nitride ISFET sensors
Woias, P.; Meixner, L.; Fröstl, P.
Konferenzbeitrag
1997Improved current-voltage characteristics of downstream plasma enhanced chemical vapor deposition SiNx deposited at low temperature by using He as a dilution gas
Arps, M.; Marlowitz, A.
Zeitschriftenaufsatz
1996Electroluminescence in thin films
Mauch, R.H.
Konferenzbeitrag, Zeitschriftenaufsatz
1996Influence of SiNx passivation on the surface potential of GaInAs and AlInAs in HEMT layer structures
Arps, M.; Each, H.-G.; Passenberg, W.; Umbach, A.; Schlaak, W.
Konferenzbeitrag
1994Integrated planar Fresnel zone lenses for beam forming and coupling
Pawlowski, E.
Konferenzbeitrag
1989Evidence for disorder induced vibrational mode coupling in thin amorphous SiO2-films
Lange, P.
Zeitschriftenaufsatz
1987Dielectrics for passivation of planar InP/InGaAs diodes
Unterborsch, G.; Bach, H.G.; Schmitt, F.; Schmidt, R.; Schlaak, W.
Konferenzbeitrag, Zeitschriftenaufsatz