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| 2019 | Correlation of defect luminescence and recombination in multicrystalline silicon
Wyller, Guro Marie; Schindler, Florian; Kwapil, Wolfram; Schön, Jonas; Olsen, Espen; Haug, Halvard; Riepe, Stephan; Schubert, Martin C. | Zeitschriftenaufsatz |
| 2019 | Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir | Zeitschriftenaufsatz |
| 2018 | Analysis of 28 nm SRAM cell stability under mechanical load applied by nanoindentation
Clausner, André; Schlipf, Simon; Kurz, G.; Otto, M.; Paul, J.; Giering, Kay-Uwe; Warmuth, Jens; Lange, André; Jancke, Roland; Aal, A.; Rosenkranz, Rüdiger; Gall, Martin; Zschech, Ehrenfried | Konferenzbeitrag |
| 2018 | Bifacial p-type silicon shingle solar cells - the "pSPEER" concept
Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Krieg, A.; Preu, R. | Zeitschriftenaufsatz |
| 2018 | Design and characterization of a silicon photomultiplier in 0.35 μm CMOS
D'Ascenzo, Nicola; Brockherde, Werner; Dreiner, Stefan; Schwinger, Alexander; Schmidt, Andrei; Xie, Q. | Zeitschriftenaufsatz |
| 2018 | A detailed full-cell model of a 2018 commercial PERC solar cell in Quokka3
Fell, Andreas; Altermatt, Pietro P. | Zeitschriftenaufsatz |
| 2018 | Development of high performance multicrystalline silicon with controlled seeding
Hess, Adam; Krenckel, Patricia; Trötschler, Theresa; Fehrenbach, Tobias; Riepe, Stephan | Konferenzbeitrag |
| 2018 | Direct growth of III–V/silicon triple-junction solar cells with 19.7% efficiency
Feifel, Markus; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Belz, Jürgen; Beyer, Andreas; Volz, Kerstin; Hannappel, Thomas; Bett, Andreas W.; Lackner, David; Dimroth, Frank | Zeitschriftenaufsatz |
| 2018 | Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen | Zeitschriftenaufsatz |
| 2018 | Efficiency Gain Analysis of Silicon Passivated Emitter and Rear Solar Cells Solely Based on Measurements
Wasmer, S.; Horst, A. van der; Saint-Cast, P.; Greulich, J.M. | Konferenzbeitrag |
| 2018 | Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R. | Konferenzbeitrag |
| 2018 | High-Efficiency Diamond Wire-Sawn mc-Si-Based PERC Solar Cells Textured by Atmospheric Pressure Dry Etching
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Peters, S.; Hofmann, M. | Konferenzbeitrag |
| 2018 | Impact of Uncertainties of Fundamental Models on Simulated Silicon Solar Cell Efficiencies
Wasmer, S.; Fell, A.; Greulich, J.M. | Konferenzbeitrag |
| 2018 | Inline Characterization of Diamond Wire Sawn Multicrystalline Silicon Wafers
Haunschild, J.; Bergmann, N.; Hammer, T.; Krieg, K.; Kaden, T.; Anspach, O.; Schremmer, H.; Rein, S. | Konferenzbeitrag |
| 2018 | Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L. | Poster |
| 2018 | An open source based repository for defects in silicon
Juhl, Mattias K.; Heinz, Friedemann D.; Coletti, Gianluca; Macdonald, Daniel; Rougieux, Fiacre E.; Schindler, Florian; Niewelt, Tim; Schubert, Martin C. | Konferenzbeitrag |
| 2018 | Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells
Ivanov, Alexey; Sorgenfrei, R.; Gust, Elke; Barth, Philipp; Nieuwenhuysen, Kris van; Kühnhold-Pospischil, Saskia; Riepe, Stephan; Janz, Stefan | Konferenzbeitrag |
| 2018 | Photoluminescence Imaging at Uniform Excess Carrier Density Using Adaptive Nonuniform Excitation
Zhu, Y.; Heinz, F.D.; Juhl, M.; Schubert, M.C.; Trupke, T.; Hameiri, Z. | Zeitschriftenaufsatz |
| 2018 | The principle of adaptive excitation for photoluminescence imaging of silicon: Theory
Heinz, Friedemann D.; Zhu, Yan; Hameri, Ziv; Juhl, Mattias; Trupke, Thorsten; Schubert, Martin C. | Zeitschriftenaufsatz |
| 2018 | Shear melting of silicon and diamond and the disappearance of the polyamorphic transition under shear
Moras, G.; Klemenz, A.; Reichenbach, T.; Gola, A.; Uetsuka, H.; Moseler, M.; Pastewka, L. | Zeitschriftenaufsatz |
| 2018 | Slurry Sawing of Multicrystalline Silicon with Low-Viscosity Carrier Liquid
Kaden, T.; Look, C.; Ischenko, V.; Gröschel, M.; Anspach, O. | Konferenzbeitrag |
| 2017 | Angle-dependent reflectance of isotextured silicon
Alapont Sabater, A.; Greulich, J.; Tucher, N.; Bläsi, B.; Glunz, S.W. | Konferenzbeitrag |
| 2017 | Approaching 22% efficiency with multicrystalline n-type silicon solar cells
Benick, J.; Müller, R.; Schindler, F.; Richter, A.; Hauser, H.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schubert, M.C.; Hermle, M.; Glunz, S.W. | Konferenzbeitrag |
| 2017 | Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph | Zeitschriftenaufsatz |
| 2017 | Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry
Würzner, S.; Herms, M.; Kaden, T.; Möller, H.J.; Wagner, M. | Zeitschriftenaufsatz |
| 2017 | Impact of material and process variations on the distribution of multicrystalline silicon PERC cell efficiencies
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Demant, M.; Fertig, F.; Rein, S. | Zeitschriftenaufsatz |
| 2017 | Increasing the efficiency of multicrystalline silicon PERC solar cells from currently 19% to 20%
Greulich, J.; Lohmüller, E.; Saint-Cast, P.; Werner, S.; Wasmer, S.; Horst, A.J. van der; Preu, R. | Konferenzbeitrag |
| 2017 | The influence of material properties on the wire sawing process of multicrystalline silicon
Kaden, T.; Ershova, E.; Lottspeich, L.; Fuchs, M. | Konferenzbeitrag |
| 2017 | Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J. | Konferenzbeitrag |
| 2017 | Kinetics of carrier-induced degradation at elevated temperature in multicrystalline silicon solar cells
Kwapil, W.; Niewelt, T.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2017 | Laser transfer and firing of NiV seed layer for the metallization of silicon heterojunction solar cells by Cu-plating
Rododfili, A.; Wolke, W.; Kroely, L.; Bivour, M.; Cimiotti, G.; Bartsch, J.; Glatthaar, M.; Nekarda, J. | Zeitschriftenaufsatz |
| 2017 | Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Niewelt, T.; Selinger, M.; Grant, N.; Kwapil, W.M.; Murphy, J.D.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2017 | Long-term stability of aluminum oxide based surface passivation schemes under illumination at elevated temperatures
Niewelt, T.; Kwapil, W.M.; Selinger, M.; Richter, A.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2017 | Material limits of multicrystalline silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2017 | Materials response to glancing incidence femtosecond laser ablation
Echlin, M.P.; Titus, M.S.; Straw, M.; Gumbsch, P.; Pollock, T.M. | Zeitschriftenaufsatz |
| 2017 | Monolithic two-terminal III-V//Si triple-junction solar cells with 30.2% efficiency under 1-Sun AM1.5g
Cariou, R.; Benick, J.; Beutel, P.; Razek, N.; Flötgen, C.; Hermle, M.; Lackner, D.; Glunz, S.W.; Bett, A.W.; Wimplinger, M.; Dimroth, F. | Zeitschriftenaufsatz |
| 2017 | A novel approach to determine the diamond occupancy of diamond wires for optimized cutting processes for crystalline silicon
Lottspeich, L.; Theophil, L.; Fuchs, M.; Kaden, T. | Konferenzbeitrag |
| 2017 | On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J. | Zeitschriftenaufsatz |
| 2017 | Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter | Dissertation |
| 2017 | Separation of the surface and bulk recombination in silicon by means of transient photoluminescence
Heinz, F.D.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2017 | Si-C void structures for anodes in Li-S full cells - from coin cell to pouch cell level
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan | Vortrag |
| 2017 | Silicon carbon void structures as anode material for advanced lithium-ion and lithium-sulfur batteries
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan | Vortrag |
| 2017 | Silicon materials. Electrical and optical properties
Fell, A. | Aufsatz in Buch |
| 2017 | Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard | Zeitschriftenaufsatz |
| 2017 | Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature
Niewelt, T.; Kwapil, W.; Selinger, M.; Richter, A.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2017 | Transmission electron microscopy based interface analysis of the origin of the variation in surface recombination of silicon for different surface preparation methods and passivation materials
Ali, H.; Moldovan, A.; Mack, S.; Schoenfeld, W.V.; Davis, K.O. | Zeitschriftenaufsatz |
| 2016 | Analysis of grain structure evolution based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S. | Zeitschriftenaufsatz |
| 2016 | Analysis of grain structure evolution via image processing based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S. | Konferenzbeitrag |
| 2016 | Benefits and Disadvantages of p- and n-type Doping for Multicrystalline Silicon
Schubert, M. | Vortrag |
| 2016 | Contact fault characterisation of complex silicon solar cells: A guideline based on current voltage characteristics and luminescence imaging
Padilla, M.; Reichel, C.; Hagedorn, N.; Fell, A.; Keding, R.; Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2016 | Degradation of silicon wafers at high temperatures for epitaxial deposition
Rachow, T.; Reber, S.; Janz, S.; Knapp, M.; Milenkovic, N. | Zeitschriftenaufsatz |
| 2016 | The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar | Konferenzbeitrag |
| 2016 | Empirical cluster modeling revisited
Pichler, Peter | Konferenzbeitrag |
| 2016 | Fast in-situ photoluminescence analysis for a recombination parameterization of the fast BO defect component in silicon
Niewelt, T.; Mägdefessel, S.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2016 | Gallium phosphide window layer for silicon solar cells
Feifel, M.; Rachow, T.; Benick, J.; Ohlmann, J.; Janz, S.; Hermle, M.; Dimroth, F.; Lackner, D. | Zeitschriftenaufsatz |
| 2016 | Impact of the Firing Temperature Profile on Light Induced Degradation of Multicrystalline Silicon
Eberle, R.; Kwapil, W.; Schindler, F.; Schubert, M.C.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2016 | Material limits of silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C. | Konferenzbeitrag |
| 2016 | Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard | Konferenzbeitrag |
| 2016 | N-type multicrystalline silion for high efficiency solar cells
Riepe, S.; Krenckel, P.; Schindler, F.; Schubert, M.; Benick, J. | Zeitschriftenaufsatz |
| 2016 | On the benefits of counting single photoluminescence photons for the investigation of low injection lifetime and traps in silicon
Heinz, F.D.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Optical Modeling of Honeycomb Textures for Multicrystalline Silicon Solar Cells
Peters, I.; Hauser, H.; Tucher, N.; Bläsi, B. | Zeitschriftenaufsatz |
| 2016 | Physically sound parameterization of incomplete ionization in aluminum-doped silicon
Steinkemper, H.; Altermatt, P.P.; Hermle, M. | Zeitschriftenaufsatz |
| 2016 | A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen | Konferenzbeitrag |
| 2016 | Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar | Konferenzbeitrag |
| 2016 | Simplified device simulation of silicon solar cells using a lumped parameter optical model
Fell, A.; McIntosh, K.R.; Fong, K.C. | Zeitschriftenaufsatz |
| 2016 | Simplified fabrication of n-type Cz-Si HIP-MWT+ solar cells with 20% efficiency using laser structuring
Lohmüller, E.; Werner, S.; Maus, S.; Brand, A.; Jäger, U.; Nekarda, J.; Clement, F. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Solar cells with 20% efficiency and lifetime evaluation of epitaxial wafers
Drießen, M.; Amiri, D.; Milenkovic, N.; Steinhauser, B.; Lindekugel, S.; Benick, J.; Reber, S.; Janz, S. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Spatially resolved analysis of light induced degradation of multicrystalline PERC solar cells
Selinger, M.; Kwapil, W.; Schindler, F.; Krauß, K.; Fertig, F.; Michl, B.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Understanding process-related efficiency variations of mc-Si PERC cells
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Rein, S. | Zeitschriftenaufsatz |
| 2016 | Untangling the mysteries of plated metal finger adhesion
Wang, X.; Hsiao, P.-C.; Zhang, W.; Johnston, B.; Stokes, A.; Wei, Q.; Fell, A.; Surve, S.; Shengzhao, Y.; Verlinden, P.; Lennon, A. | Zeitschriftenaufsatz |
| 2015 | Adapted parameterization of incomplete ionization in aluminum-doped silicon and impact on numerical device simulation
Steinkemper, H.; Rauer, M.; Altermatt, P.; Heinz, F.D.; Schmiga, C.; Hermle, M. | Zeitschriftenaufsatz |
| 2015 | Carrier-diffusion corrected J0-analysis of charge carrier lifetime measurements for increased consistency
Kimmerle, A.; Greulich, J.; Wolf, A. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | A combined transient and steady state approach for robust lifetime spectroscopy with micrometer resolution
Heinz, F.D.; Mundt, L.E.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Development of integrated interconnected crystalline silicon thin film solar cells
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S. | Zeitschriftenaufsatz |
| 2015 | Diffusion and segregation model for the annealing of silicon solar cells implanted with phosphorus
Wolf, F. Alexander; Martinez-Limia, Alberto; Grote, Daniela; Stichtenoth, Daniel; Pichler, Peter | Zeitschriftenaufsatz |
| 2015 | A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
Niewelt, T.; Schön, J.; Broisch, J.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Investigating the impact of parameter and process variations on multicrystalline PERC cell efficiency
Wasmer, S.; Greulich, J.; Höffler, H.; Haunschild, J.; Demant, M.; Rein, S. | Konferenzbeitrag |
| 2015 | Iron related solar cell instability: Imaging analysis and impact on cell performance
Schubert, M.C.; Padilla, M.; Michl, B.; Mundt, L.; Giesecke, J.; Hohl-Ebinger, J.; Benick, J.; Warta, W.; Tajima, M.; Ogura, A. | Zeitschriftenaufsatz |
| 2015 | The irresistible charm of a simple current flow pattern - approaching 25% with a solar cell featuring a full-area back contact
Glunz, S.W.; Feldmann, F.; Richter, A.; Bivour, M.; Reichel, C.; Steinkemper, H.; Benick, J.; Hermle, M. | Konferenzbeitrag |
| 2015 | Local Series Resistance Imaging of Silicon Solar Cells with Complex Current Paths
Padilla, M.; Michl, B.; Hagedorn, N.; Reichel, C.; Kluska, S.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Manufacturing 100-µm-thick silicon solar cells with efficiencies greater than 20% in a pilot production line
Terheiden, B.; Ballmann, T.; Horbelt, R.; Schiele, Y.; Seren, S.; Ebser, J.; Hahn, G.; Mertens, V.; Koentopp, M.B.; Scherff, M.; Müller, J.W.; Holman, Z.C.; Descoeudres, A.; Wolf, S. de; Nicolas, S.M. de; Geissbuehler, J.; Ballif, C.; Weber, B.; Saint-Cast, P.; Rauer, M.; Schmiga, C.; Glunz, S.W.; Morrison, D.J.; Devenport, S.; Antonelli, D.; Busto, C.; Grasso, F.; Ferrazza, F.; Tonelli, E.; Oswald, W. | Zeitschriftenaufsatz |
| 2015 | Microscopic charge carrier lifetime in silicon from a transient approach
Heinz, F.D.; Kasemann, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Modeling of gas flow and deposition profile in HWCVD processes
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.; Siemers, M.; Melzig, T.; Schäfer, L. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J. | Vortrag |
| 2015 | Nanostructuring of c-Si surface by F2-based atmospheric pressure dry texturing process
Kafle, B.; Seiffe, J.; Clochard, L.; Duffy, E.; Rentsch, J.; Hofmann, M. | Zeitschriftenaufsatz |
| 2015 | Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz |
| 2015 | A new method for the determination of the dopant-related base resistivity despite the presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S. | Zeitschriftenaufsatz |
| 2015 | Oberflächenmodifizierung mit Licht
Schmüser, Christian | Bericht |
| 2015 | On the implication of spatial carrier density non-uniformity on lifetime determination in silicon
Heinz, F.D.; Giesecke, J.; Mundt, L.E.; Kasemann, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Porous silicon reorganization: Influence on the structure, surface roughness and strain
Milenkovic, N.; Drießen, M.; Weiss, C.; Janz, S. | Zeitschriftenaufsatz |
| 2015 | Potential gain in multicrystalline silicon solar cell efficiency by n-Type doping
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2015 | Record efficient upconverter solar cell devices with optimized bifacial silicon solar cells and monocrystalline BaY2F8:30% Er3+ upconverter
Fischer, S.; Favilla, E.; Tonelli, M.; Goldschmidt, J.C. | Zeitschriftenaufsatz |
| 2015 | Relation between light trapping and surface topography of plasma textured crystalline silicon wafers
Souren, F.M.M.; Rentsch, J.; Sanden, M.C.M. van de | Zeitschriftenaufsatz |
| 2015 | Resistivity, doping concentrations, and carrier mobilities in compensated N- and P-type Czochralski silicon: Comparison of measurements and simulations and consistent description of material parameters
Broisch, J.; Schindler, F.; Schubert, M.C.; Fertig, F.; Soiland, A.-K.; Rein, S. | Zeitschriftenaufsatz |
| 2015 | Role of defects in the dopant diffusion in Si
Pichler, Peter | Aufsatz in Buch |
| 2015 | Self-organized, effective medium Black Silicon for infrared antireflection
Steglich, Martin; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas | Zeitschriftenaufsatz |
| 2015 | Silicon crystallization technologies
Dold, P. | Aufsatz in Buch |
| 2015 | THz emission from argon implanted silicon surfaces
Blumröder, Ulrike; Steglich, Martin; Schrempel, Frank; Hoyer, Patrick; Nolte, Stefan | Zeitschriftenaufsatz |
| 2014 | A-SIO:H thin films with increased light induced degradation stability for thin film silicon solar cells
Holinski, S.; Borchert, D.; Hohage, S.; Meiners, B.-M.; Schäfer, P.; Westrich, T. | Konferenzbeitrag |
| 2014 | Accurate potential drop sheet resistance measurements of laser-doped areas in semiconductors
Heinrich, M.; Kluska, S.; Binder, S.; Hameiri, Z.; Hoex, B.; Aberle, A.G. | Zeitschriftenaufsatz |
| 2014 | Challenges for photovoltaic silicon materials
Coletti, G.; Gordon, I.; Schubert, M.C.; Warta, W.; Ovrelid, E.J.; Jouini, A.; Tucci, M.; Cesare, G. de | Zeitschriftenaufsatz |
| 2014 | Characterisation of Ultra-Thin µc-Si Films for Silicon Heterojunction Solar Cells
Wernerus, H.; Bivour, M.; Kroely, L.; Hermle, M.; Wolke, W. | Konferenzbeitrag |
| 2014 | Characterizing local contact resistances of interdigitated back contact silicon solar cells
Padilla, M.; Michl, B.; Reichel, C.; Hagedorn, N.; Kluska, S.; Haag, S.; Keding, R.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C. | Konferenzbeitrag |
| 2014 | Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias | Poster |
| 2014 | Deep energy levels of platinum-hydrogen complexes in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard | Konferenzbeitrag |
| 2014 | Determination of the dopant-related base resistivity in presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S. | Konferenzbeitrag |
| 2014 | Doped layer optimization for silicon heterojunctions by injection-level-dependent open-circuit voltage measurements
Bivour, M.; Reusch, M.; Schröer, S.; Feldmann, F.; Temmler, J.; Steinkemper, H.; Hermle, M. | Zeitschriftenaufsatz |
| 2014 | Efficiency-limiting recombination in multicrystalline silicon solar cells
Schubert, M.C.; Schön, J.; Abdollahinia, A.; Michl, B.; Kwapil, W.; Schindler, F.; Heinz, F.; Padilla, M.; Giesecke, J.; Breitwieser, M.; Riepe, S.; Warta, W. | Konferenzbeitrag |
| 2014 | Explanation of potential-induced degradation of the shunting type by Na decoration of stacking faults in Si solar cells
Naumann, V.; Lausch, D.; Hähnel, A.; Bauer, J.; Breitenstein, O.; Graff, A.; Werner, M.; Swatek, S.; Großer, S.; Bagdahn, J.; Hagendorf, C. | Zeitschriftenaufsatz |
| 2014 | Front side antireflection concepts for silicon solar cells with diffractive rear side structures
Bett, A.; Eisenlohr, J.; Höhn, O.; Bläsi, B.; Benick, J.; Repo, P.; Savin, H.; Goldschmidt, J.C.; Hermle, M. | Konferenzbeitrag |
| 2014 | Heavily doped Si:P emitters of crystalline Si solar cells: Recombination due to phosphorus precipitation
Min, B.; Wagner, H.; Dastgheib-Shirazi, A.; Kimmerle, A.; Kurz, H.; Altermatt, P.P. | Zeitschriftenaufsatz |
| 2014 | Increased Reliability for J0-Analysis by QSSPC
Kimmerle, A.; Rothhardt, P.; Wolf, A.; Sinton, R.A. | Konferenzbeitrag |
| 2014 | Influence of rear-side passivation on solar cell performance of bosco solar cells
Krauß, K.; Fertig, F.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S. | Konferenzbeitrag |
| 2014 | Interdigitated back contact silicon solar cells with tunnel oxide passivated contacts formed by ion implantation
Reichel, C.; Feldmann, F.; Müller, R.; Moldovan, A.; Hermle, M.; Glunz, S.W. | Konferenzbeitrag |
| 2014 | Kroll-carbons based on silica and alumina templates as high-rate electrode materials in electrochemical double-layer capacitors
Oschatz, Martin; Boukhalfa, S.; Nickel, Winfried; Lee, J.T.; Klosz, Stefan; Borchardt, L.; Eychmüller, Alexander; Yushin, G.; Kaskel, Stefan | Zeitschriftenaufsatz |
| 2014 | Micro characterization of laser structured solar cells with plated Ni-Ag contacts
Kluska, S.; Fleischmann, C.; Büchler, A.; Hördt, W.; Geisler, C.; Hopman, S.; Glatthaar, M. | Zeitschriftenaufsatz |
| 2014 | Microscopic origin of the aluminium assisted spiking effects in n-type silicon solar cells
Heinz, F.D.; Breitwieser, M.; Gundel, P.; König, M.; Hörteis, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2014 | Modeling platinum diffusion in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard | Zeitschriftenaufsatz |
| 2014 | Modeling the annealing of dislocation loops in implanted c-Si solar cells
Wolf, F. Alexander; Martinez-Limia, Alberto; Stichtenoth, Daniel; Pichler, Peter | Zeitschriftenaufsatz |
| 2014 | On an improved boron segregation calibration from a particularly sensitive power MOS process
Koffel, S.; Burenkov, A.; Sekowski, M.; Pichler, P.; Giubertoni, D.; Bersani, M.; Knaipp, M.; Wachmann, E.; Schrems, M.; Yamamoto, Y.; Bolze, D. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2014 | The potential of multicrystalline n-type silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C. | Konferenzbeitrag |
| 2014 | Process control and defect analysis for crystalline silicon thin films for photovoltaic applications by the means of electrical and spectroscopic microcharacterization tools
Breitwieser, M.; Heinz, F.; Rachow, T.; Kasemann, M.; Janz, S.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2014 | Relaxation of vacancy depth profiles in silicon wafers: A low apparent diffusivity of vacancy species
Voronkov, Vladimir V.; Falster, Robert; Pichler, Peter | Zeitschriftenaufsatz |
| 2014 | Reorganization of Porous Silicon. Effect on Epitaxial Layer Quality and Detachment
Milenkovic, N.; Drießen, M.; Gust, E.; Janz, S.; Reber, S. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2014 | Short-circuit current density mapping for solar cells
Padilla, M.; Michl, B.; Thaidigsmann, B.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2014 | Silicon heterojunction rear emitter solar cells: Less restrictions on the optoelectrical properties of front side TCOs
Bivour, M.; Schröer, S.; Hermle, M.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2014 | Simulation of AsH3 plasma immersion ion implantation into silicon
Burenkov, Alex; Lorenz, Jürgen; Spiegel, Yohann; Torregrosa, Frank | Konferenzbeitrag |
| 2014 | Solar cell efficiency losses due to impurities from the crucible in multicrystalline silicon
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M. | Zeitschriftenaufsatz |
| 2014 | Specific aspects of roughness and interface diffusion in non-periodic Mo/Si multilayers
Braun, Stefan; Gawlitza, Peter; Menzel, Maik; Friedrich, Wolfgang; Schmidt, Jürgen; Leson, Andreas | Konferenzbeitrag |
| 2014 | Towards a unified low-field model for carrier mobilities in crystalline silicon
Schindler, F.; Forster, M.; Broisch, J.; Schön, J.; Giesecke, J.; Rein, S.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2013 | Anomalous impurity segregation and local bonding fluctuation in l-Si
Fisicaro, G.; Huet, K.; Negru, R.; Hackenberg, M.; Pichler, P.; Taleb, N.; La Magna, A. | Zeitschriftenaufsatz |
| 2013 | Characterization and modeling of screen-printed metal insulator semiconductor tunnel junctions for integrated bypass functionality in crystalline silicon solar cells
Thaidigsmann, Benjamin; Lohmüller, Elmar; Fertig, Fabian; Clement, Florian; Wolf, Andreas | Zeitschriftenaufsatz |
| 2013 | Co-diffusion from solid sources for bifacial n-type solar cells
Rothhardt, P.; Keding, R.; Wolf, A.; Biro, D. | Zeitschriftenaufsatz |
| 2013 | A comprehensive model for the diffusion of boron in silicon in presence of fluorine
Wolf, F. Alexander; Martinez-Limia, Alberto; Pichler, Peter | Zeitschriftenaufsatz |
| 2013 | Determination of crystal grain orientations by optical microscopy at textured surfaces
Lausch, D.; Gläser, M.; Hagendorf, C. | Zeitschriftenaufsatz |
| 2013 | Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; La Magna, A. | Konferenzbeitrag |
| 2013 | Effective passivation of black silicon surfaces by atomic layer deposition
Repo, P.; Haarahiltunen, A.; Sainiemi, L.; Yli-Koski, M.; Talvitie, H.; Schubert, M.C.; Savin, H. | Zeitschriftenaufsatz |
| 2013 | Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz |
| 2013 | Extended model for platinum diffusion in silicon
Badr, E.; Pichler, P.; Schmidt, G. | Konferenzbeitrag |
| 2013 | Impact of impurities from crucible and coating on mc-silicon quality - the example of iron and cobalt
Schubert, M.C.; Schön, J.; Schindler, F.; Kwapil, W.; Abdollahinia, A.; Michl, B.; Riepe, S.; Schmid, C.; Schumann, M.; Meyer, S.; Warta, W. | Zeitschriftenaufsatz |
| 2013 | Influence of argon flow rate on melt convection and incorporation of SiC in multicrystalline silicon
Schmid, C.; Schumann, M.; Haas, F.; Riepe, S. | Konferenzbeitrag |
| 2013 | IntegRex - process development of a module interconnection concept for thin crystalline silicon films
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S. | Konferenzbeitrag |
| 2013 | Interstitial chromium in silicon on the micron scale
Heinz, F.D.; Schindler, F.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2013 | Kerfless wafering for silicon wafers by using a reusable metal layer
Schoenfelder, S.; Breitenstein, O.; Rissland, S.; Donno, R. de; Bagdahn, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2013 | Laser assisted honeycomb-texturing on multicrystalline silicon for industrial applications
Volk, A.-K.; Gutscher, S.; Brand, A.; Wolke, W.; Zimmer, M.; Reinecke, H. | Konferenzbeitrag |
| 2013 | Light-induced degradation in copper-contaminated gallium-doped silicon
Lindroos, J.; Yli-Koski, M.; Haarahiltunen, A.; Schubert, M.C.; Savin, H. | Zeitschriftenaufsatz |
| 2013 | Macroporous silicon and its application in sensing
Wehrspohn, R.B.; Schweizer, S.L.; Gesemann, B.; Pergande, D.; Geppert, T.M.; Moretton, S.; Lambrecht, A. | Zeitschriftenaufsatz |
| 2013 | Material limitations due to crucible impurities in multicrystalline silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M.C. | Konferenzbeitrag |
| 2013 | Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec | Konferenzbeitrag |
| 2013 | Numerical analysis of electrical TCO / a-Si:H(p) contact properties for silicon heterojunction solar cells
Bivour, M.; Schröer, S.; Hermle, M. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2013 | On the strain induced by arsenic into silicon
Koffel, Stéphane; Pichler, Peter; Lorenz, Jürgen; Bisognin, Gabriele; Napolitani, Enrico; Salvador, Davide de | Konferenzbeitrag |
| 2013 | P-Type MWT solar cells: Current status and future expectations
Thaidigsmann, B.; Hendrichs, M.; Nold, S.; Lohmüller, E.; Wolf, A.; Clement, F.; Biro, D.; Preu, R. | Konferenzbeitrag |
| 2013 | Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Repo, P.; Benick, J.; Gastrow, G. von; Vähänissi, V.; Heinz, F.D.; Schön, J.; Schubert, M.C.; Savin, H. | Zeitschriftenaufsatz |
| 2013 | PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz |
| 2013 | Screened empirical bond-order potentials for Si-C
Pastewka, L.; Klemenz, A.; Gumbsch, P.; Moseler, M. | Zeitschriftenaufsatz |
| 2013 | Wafer thickness optimization for silicon solar cells of heterogeneous material quality
Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C. | Zeitschriftenaufsatz |
| 2012 | Angular distributions of sputtered silicon at grazing gallium ion beam incidence
Burenkov, Alex; Sekowski, Matthias; Belko, Viktor; Ryssel, Heiner | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar | Zeitschriftenaufsatz |
| 2012 | Formation of gold nanoparticles in polymeric nanowires by low-temperature thermolysis of gold mesitylene
Erk, C.; Eric Yau, M.Y.; Lange, H.; Thomsen, C.; Miclea, P.; Wehrspohn, R.B.; Schlecht, S.; Steinhart, M. | Zeitschriftenaufsatz |
| 2012 | Implantation-induced structural defects in highly activated USJs: Boron precipitation and trapping in pre-amorphised silicon
Cristiano, F.; Essa, Z.; Qiu, Y.; Spiegel, Y.; Torregrosa, F.; Duchaine, J.; Boulenc, P.; Tavernier, C.; Cojocaru, O.; Blavette, D.; Mangelinck, D.; Fazzini, P.F.; Quillec, M.; Bazizi, M.; Hackenberg, M.; Boninelli, S. | Konferenzbeitrag |
| 2012 | Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar | Konferenzbeitrag |
| 2012 | Loss analysis and efficiency potential of p-type MWT-PERC solar cells
Thaidigsmann, Benjamin; Greulich, Johannes; Lohmüller, Elmar; Schmeißer, Simon; Clement, Florian; Wolf, Andreas; Biro, Daniel; Preu, Ralf | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Material characterization to model linear viscoelastic behavior of thin organic polymer films in microelectronics
Unterhofer, K.; Preu, H.; Walter, J.; Lorenz, G.; Mack, W.; Petzold, M. | Konferenzbeitrag |
| 2012 | Micro structural root cause analysis of potential induced degradation in c-Si solar cells
Naumann, V.; Hagendorf, C.; Grosser, S.; Werner, M.; Bagdahn, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Modeling boron profiles in silicon after pulsed excimer laser annealing
Hackenberg, M.; Huet, K.; Negru, R.; Venturini, J.; Fisicaro, G.; La Magna, A.; Pichler, P. | Konferenzbeitrag |
| 2012 | The path to industrial production of highly efficient metal wrap through silicon solar cells
Thaidigsmann, Benjamin; Linse, Michael; Wolf, Andreas; Clement, Florian; Biro, Daniel; Preu, Ralf | Zeitschriftenaufsatz |
| 2012 | Precipitation of antimony implanted into silicon
Koffel, S.; Pichler, P.; Reading, M.A.; Berg, J. van den; Kheyrandish, H.; Hamm, S.; Lerch, W.; Pakfar, A.; Tavernier, C. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2012 | Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar | Poster |
| 2012 | Simulation of BF3 plasma immersion ion implantation into silicon
Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, F. | Konferenzbeitrag |
| 2012 | Strength of thin silicon wafers with via holes
Schoenfelder, S.; Kaule, F.; Oswald, M.; Bagdahn, J.; Petzold, M. | Konferenzbeitrag |
| 2012 | Terahertz thin film and refractive index sensing with a metamaterial near-field sensor
Schmitt, Klemens; Wollrab, Viktoria; Neu, Jens; Beigang, René; Rahm, Marco | Konferenzbeitrag |
| 2011 | Challenges in TCAD simulations of tunneling field effect transistors
Kampen, Christian; Burenkov, Alex; Lorenz, Jürgen | Konferenzbeitrag |
| 2011 | Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2
Brand, U.; Beckert, E.; Beutler, A.; Dai, G.; Stelzer, C.; Hertwig, A.; Klapetek, P.; Koglin, J.; Thelen, R.; Tutsch, R. | Zeitschriftenaufsatz |
| 2011 | Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar | Konferenzbeitrag |
| 2011 | Periodic silicon nanostructures for spectroscopic microsensors
Wehrspohn, R.; Gesemann, B.; Pergande, D.; Geppert, T.; Schweizer, S.; Moretton, S.; Lambrecht, A. | Konferenzbeitrag |
| 2011 | Plasmonic reflection grating back contacts for microcrystalline silicon solar cells
Paetzold, U.W.; Moulin, E.; Michaelis, D.; Böttler, W.; Wächter, C.; Hagemann, V.; Meier, M.; Carius, R.; Rau, U. | Zeitschriftenaufsatz |
| 2011 | Quantitative comparison of simulated and experimental silver crystal formation at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2011 | Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W. | Zeitschriftenaufsatz |
| 2011 | Trace element analysis in solar silicon
Meyer, S.; Richter, S.; Balski, M.; Hagendorf, C. | Zeitschriftenaufsatz |
| 2010 | CCD-camera-based electro-optical detection of nanosecond THz pulses from an optical parametric oscillator
Meng, F.Z.; Thomson, M.D.; Molter, D.; Löffler, T.; Jonuscheit, J.; Beigang, R.; Bartschke, J.; Bauer, T.; Nittmann, M.; Roskos, H.G. | Konferenzbeitrag |
| 2010 | DLC/Si multilayer mirrors for EUV radiation
Gawlitza, P.; Braun, S.; Leson, A.; Soer, W.; Jak, M.; Banine, V. | Konferenzbeitrag |
| 2010 | Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems. Design, fabrication, characterization and optimization
Hildenbrand, J.; Peter, C.; Lamprecht, F.; Kürzinger, A.; Naumann, F.; Ebert, M.; Wehrspohn, R.; Korvink, J.G.; Wöllenstein, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2010 | Imaging of metal impurities in silicon by luminescence spectroscopy and synchrotron techniques
Schubert, M.C.; Schön, J.; Gundel, P.; Habenicht, H.; Kwapil, W.; Warta, W. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2010 | Micro-segregations in liquid phase sintered silicon carbide ceramics
Herrmann, M.; Neher, R.; Brandt, K.; Hoehn, S. | Zeitschriftenaufsatz |
| 2010 | Review of stress effects on dopant solubility in silicon and silicon-germanium layers
Bennett, N.S.; Ahn, C.; Cowern, N.E.B.; Pichler, P. | Konferenzbeitrag |
| 2009 | Modular bimorph mirrors for adaptive optics
Rodrigues, G.; Bastaits, R.; Roose, S.; Stockman, Y.; Gebhardt, S.; Schönecker, A.; Villon, P.; Preumont, A. | Zeitschriftenaufsatz |
| 2009 | Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
Pastewka, L.; Salzer, R.; Graff, A.; Altmann, F.; Moseler, M. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2008 | Detailed arsenic concentration profiles at Si/SiO2 interfaces
Pei, L.; Duscher, G.; Steen, C.; Pichler, P.; Ryssel, H.; Napolitani, E.; Salvador, D. de; Piro, A.M.; Terrasi, A.; Severac, F.; Cristiano, F.; Ravichandran, K.; Gupta, N.; Windl, W. | Zeitschriftenaufsatz |
| 2008 | Distribution and segregation of arsenic at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Paul, S.; Lerch, W.; Pei, L.; Duscher, G.; Severac, F.; Cristiano, F.; Windl, W. | Zeitschriftenaufsatz |
| 2008 | Influence of nanoparticles surface composition on the properties of epoxide based adhesives
Hartwig, A.; Trautmann, J.; Sebald, M. | Konferenzbeitrag |
| 2008 | Mechanical strength of mono- and multicrystalline wafers
Schönfelder, S.; Bohne, A.; Bagdahn, J. | Konferenzbeitrag |
| 2008 | Modeling and simulation of advanced annealing processes
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W. | Aufsatz in Buch |
| 2008 | Modeling of the diffusion and activation of arsenic in silicon including clustering and precipitation
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W. | Konferenzbeitrag |
| 2008 | On a computationally efficient approach to boron-interstitial clustering
Schermer, J.; Martinez-Limia, A.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2008 | Powered by nanowires
Wehrspohn, R.B. | Zeitschriftenaufsatz |
| 2008 | Process models for advanced annealing schemes and their use in device simulation
Pichler, P.; Martinez-Limia, A.; Kampen, C.; Burenkov, A.; Schermer, J.; Paul, S.; Lerch, W.; Gelpey, J.; McCoy, S.; Kheyrandish, H.; Pakfar, A.; Tavernier, C.; Bolze, D. | Konferenzbeitrag |
| 2008 | Thermal emission properties of 2D and 3D silicon photonic crystals
Gesemann, B.; Schweizer, S.L.; Wehrspohn, R.B. | Konferenzbeitrag |
| 2007 | Advanced activation and deactivation of arsenic-implanted ultra-shallow junctions using flash and spike + flash annealing
Lerch, W.; Paul, S.; Niess, J.; McCoy, S.; Gelpey, J.; Bolze, D.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Martinez, A.; Pichler, P. | Konferenzbeitrag |
| 2007 | Characterization of the impurity profile at the SiO2/Si interface using a combination of total reflection x-ray fluorescence spectrometry and successive etching of silicon
Steen, C.; Nutsch, A.; Pichler, P.; Ryssel, H. | Zeitschriftenaufsatz |
| 2007 | Characterization of the pile-up of As at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Windl, W. | Konferenzbeitrag |
| 2007 | Characterization of the Segregation of Arsenic at the Interface SiO2/Si
Steen, C.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Werner, M.; Berg, J.A. van den; Windl, W. | Konferenzbeitrag |
| 2007 | Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P
Beljakowa, S.; Pensl, G.; Rommel, M. | Poster |
| 2007 | Diffusion and deactivation of As in Si: Combining atomistic and continuum simulation approaches
Martinez-Limia, A.; Steen, C.; Pichler, P.; Gupta, N.; Windl, W.; Paul, S.; Lerch, W. | Konferenzbeitrag |
| 2007 | Experimental and theoretical results of dopant activation by a combination of spike and flash annealing
Lerch, W.; Paul, S.; Niess, J.; Chan, J.; McCoy, S.; Gelpey, J.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Bolze, D.; Pichler, P.; Martinez, A.; Mineji, A.; Shishiguchi, S. | Konferenzbeitrag |
| 2007 | High voltage 3D-capacitor
Berberich, S.E.; Bauer, A.J.; Ryssel, H. | Konferenzbeitrag |
| 2007 | Modelling (100) hydrogen-induced platelets in silicon with a multi-scale molecular dynamics approach
Moras, G.; Ciacchi, L.C.; Csanyi, G.; Vita, A. de | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2007 | Modifizierung einheimischer Hölzer durch Imprägnierung mit überkritischem Kohlendioxid als Lösungsmittel
Danzig, J.; Jelen, E.; Deerberg, G.; Kareth, S.; Weidner, E.; Mai, C.; Ghosh, S.C.; Militz, H. | Konferenzbeitrag |
| 2007 | On a computationally efficient approach to Boron-interstitial clustering
Schermer, J.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S. | Konferenzbeitrag |
| 2006 | Abschlussbericht zum Vorhaben "Modifizierung von einheimischen Hölzern durch Imprägnierung mit überkritischem Kohlendioxid"
Deerberg, G.; Danzig, J.; Jelen, E. | Bericht |
| 2006 | Development of functional ceramic films for nano and microsystems technology
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Mayer-Uhma, T.; Uhlig, S. | Konferenzbeitrag |
| 2006 | Diffusion and activation of dopants in silicon and advanced silicon-based materials
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Uppal, S.; Karunaratne, M.S.A.; Bonar, J.M.; Willoughby, A.F.W.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S. | Zeitschriftenaufsatz |
| 2006 | Efficient generation of Cherenkov-type terahertz radiation from a lithium niobate crystal with a silicon prism output coupler
Theuer, M.; Torosyan, G.; Rau, C.; Beigang, R.; Maki, K.; Otani, C.; Kawase, K. | Zeitschriftenaufsatz |
| 2006 | Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E. | Zeitschriftenaufsatz |
| 2006 | Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles
Murray, P.; Köhler, B.; Lipfert, S.; Kaspar, J.; Schreiber, J. | Konferenzbeitrag |
| 2006 | Neuartige Methoden zur Imprägnierung von Werkstoffen und Bauteilen
Jelen, E.; Brandin, H.G.; Danzig, J.; Deerberg, G.; Kareth, S.; Kilzer, A.; Weidner, E.; Petermann, M. | Abstract |
| 2006 | Numerical identification of geometric parameters from dynamic measurement of grinded membranes on wafer level
Ebert, M.; Gerbach, R.; Bagdahn, J.; Michael, S.; Hering, S. | Konferenzbeitrag |
| 2006 | PZT thick films for microsystems applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A. | Konferenzbeitrag |
| 2006 | A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
Knechtel, R.; Knaup, M.; Bagdahn, J. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2005 | Ab initio identification of the nitrogen diffusion mechanism in silicon
Stoddard, N.; Pichler, P.; Duscher, G.; Windl, W. | Zeitschriftenaufsatz |
| 2005 | Mechanical reliability of directly bonded silicon MEMS components
Bagdahn, J.; Wiemer, M.; Petzold, M. | Konferenzbeitrag |
| 2005 | Preparation and characterization of multilayers for EUV applications
Foltyn, T.; Braun, S.; Friedrich, W.; Leson, A.; Menzel, M. | Konferenzbeitrag |
| 2004 | Automatische Optimierung von Festphasenbildungsprozessen bei der Abscheidung von Reinstsilizium
Kümmel, R.; Blömer, J.; Hediger, F.; Laqua, R.; Bäck, T.; Emmerich, M. | Konferenzbeitrag |
| 2004 | Debonding of wafer-bonded interfaces for handling and transfer applications
Bagdahn, J.; Petzold, M. | Aufsatz in Buch |
| 2004 | Effect of oxygen on the diffusion of nitrogen implanted in silicon
Mannino, G.; Privitera, V.; Scalese, S.; Libertino, S.; Napolitani, E.; Pichler, P.; Cowern, N.E.B. | Zeitschriftenaufsatz |
| 2004 | Electrical deactivation and diffusion of boron in preamorphized ultrashallow junctions: Interstitial transport and F co-implant control
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lerch, W.; Paul, S.; Pawlak, B.J.; Cristiano, F.; Hebras, X.; Bolze, D.; Ortiz, C.; Pichler, P. | Konferenzbeitrag |
| 2004 | Intrinsic point defects, impurities, and their diffusion in silicon
Pichler, P. | Buch |
| 2004 | Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing
Ortiza, C.J.; Cristiano, F.; Colombeau, B.; Claverie, A.; Cowern, N.E.B. | Konferenzbeitrag |
| 2004 | On the modeling of transient diffusion and activation of boron during post-implantation annealing
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S. | Konferenzbeitrag |
| 2004 | Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"
Mannino, G.; Feudel, T.; Pichler, P.; Servidori, M. | Konferenzbeitrag |
| 2003 | L'Anisotropia de propagazione della frattura in silicio: Simulazione teorica mediante une nuova technica di embedding
Vita, A. de; Albaret, T.; Gumbsch, P.; Meriani, S. | Konferenzbeitrag |
| 2003 | Transient-diffusion effects
Stiebel, D.; Pichler, P. | Zeitschriftenaufsatz |
| 2002 | 2K PL topography of silicon doped VGf-GaAs wafers
Baeumler, M.; Maier, M.; Herres, N.; Bünger, T.; Stenzenberger, J.; Jantz, W. | Zeitschriftenaufsatz |
| 2002 | Anomalous refraction and diffraction in discrete optical systems
Pertsch, T.; Zentgraf, T.; Peschel, U.; Bräuer, A.; Lederer, F. | Zeitschriftenaufsatz |
| 2002 | Imaging and measurement of local mechanical material properties by atomic force acoustic microscopy
Rabe, U.; Amelio, S.; Kopycinska, M.; Hirsekorn, S.; Kempf, M.; Göken, M.; Arnold, W. | Zeitschriftenaufsatz |
| 2002 | Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
Thielsch, R.; Gatto, A.; Kaiser, N. | Zeitschriftenaufsatz |
| 2001 | Locally selective bonding of silicon and glass with laser
Wild, M.J.; Gillner, A.; Poprawe, R. | Zeitschriftenaufsatz |
| 2001 | Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R. | Konferenzbeitrag |
| 2001 | New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT
Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A. | Konferenzbeitrag |
| 2001 | Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2000 | Lifetime investigations of directly wafer-bonded samples under static and cyclic loading
Bagdahn, J.; Petzold, M.; Sommer, E. | Konferenzbeitrag |
| 2000 | Strength analysis of a micromechanical acceleration sensor by fracture mechanical approaches
Bagdahn, J.; Petzold, M.; Seidel, H. | Konferenzbeitrag |
| 1999 | Basic investigations on a system for measuring intraocular pressure
Schnakenberg, U.; Walter, P.; VomBögel, G.; Krüger, C.; Lüdtke Handjery, H.C.; Richter, H.A.; Specht, W.; Ruokonen, P.; Mokwa, W. | Konferenzbeitrag |
| 1999 | Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H. | Konferenzbeitrag |
| 1999 | Implantable microdevices
Mokwa, W.; Schnakenberg, U. | Konferenzbeitrag |
| 1999 | Monolithic integration of III-V microcavity LEDs on silicon drivers using conformal epitaxy
Gerard, B.; Marcadet, X.; Etienne, P.; Pribat, D.; Friedrich, D.; Eichholz, J.; Bernt, H.; Carlin, J.-F.; Ilegems, M. | Konferenzbeitrag |
| 1999 | Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H. | Konferenzbeitrag |
| 1999 | Simulation of the production of functional layers for vibration sensors for tool state monitoring and finite element analysis of mechanical characteristics
Thomas, J.; Kuhnhold, R.; Schnupp, R.; Temmel, G.; Ryssel, H. | Konferenzbeitrag |
| 1999 | Theoretische und experimentelle Untersuchungen für eine Bemessung und serienreife Entwicklung von Ein- und Auslassventilen aus Siliziumnitrid
Sonsino, C.M.; Brandt, U.; Stoerzel, K. | Konferenzbeitrag |
| 1998 | CMOS sensor systems
Hosticka, B.J. | Konferenzbeitrag |
| 1998 | Gas Flow Simulation in a Rapid Thermal Processing System
Poscher, S. | Aufsatz in Buch |
| 1998 | Selective infill metalorganic molecular beam epitaxy of InP:Si n+/n- layers for buried collector double heterostructure bipolar transistors
Schelhase, S.; Bottcher, J.; Gibis, R.; Harde, P.; Paraskevopoulos, A.; Kunzel, H. | Zeitschriftenaufsatz |
| 1998 | A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases
Linnemann, R.; Woias, P.; Senfft, C.-D.; Ditterich, J.A. | Konferenzbeitrag |
| 1998 | Variation of the wettability of DLC-coatings by network modification using silicon and oxygen
Grischke, M.; Hieke, A.; Morgenweck, F.; Dimigen, H. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 1997 | Characterization of vapor phase deposited organic molecules on silicon surfaces
Dieckhoff, S.; Höper, R.; Schlett, V.; Gesang, T.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V. | Zeitschriftenaufsatz |
| 1997 | Electron microscopic investigation of structural changes in single crystalline silicon induced by short pulse laser drilling
Kaspar, J.; Luft, A. | Konferenzbeitrag |
| 1997 | Low energy implantation and transient enhanced diffusion
Cowern, N.E.B.; Collart, E.J.H.; Politiek, J.; Bancken, P.H.L.; Berkum, J.G.M. van; Kyllesbech Larsen, K.; Stolk, P.A.; Huizing, H.G.A.; Pichler, P.; Burenkov, A.; Gravensteijn, D.J. | Konferenzbeitrag |
| 1997 | MBE growth of high-quality InP for GaInAs/InP heterostructures using incongruent evaporation of GaP
Kuenzel, H.; Boettcher, J.; Harde, P.; Maessen, R. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 1997 | Microchannels for applications in liquid dosing and flow-rate measurement
Richter, M.; Woias, P.; Weiss, D. | Konferenzbeitrag |
| 1997 | New developments of the ELYMAT technique
Eichinger, P.; Rommel, M. | Konferenzbeitrag |
| 1996 | Adhesion and film structure of cyanurates on solids
Possart, W.; Dieckhoff, S.; Gesang, T.; Schlett, V.; Hennemann, O.-D. | Konferenzbeitrag |
| 1996 | The analysis of surface-adsorbed organic molecules by alkali-assisted MIES combined with UPS(Hel)
Günster, J.; Ochs, D.; Dieckhoff, S.; Schlett, V. | Zeitschriftenaufsatz |
| 1996 | Characterization of triazine derivatives on silicon wafers studied by photoelectron spectroscopy (XPS, UPS) and metastable impact electron spectroscopy (MIES)
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V. | Zeitschriftenaufsatz |
| 1996 | Dry etching and micromachining of precision Silicon components
Kreutz, E.W.; Pfleging, W.; Jandeleit, J.; Urbasch, G. | Konferenzbeitrag |
| 1996 | MOMBE selective infill growth of InP:Si and InGaAs:Si and large area MOMBE regrowth
Schelhase, S.; Boettcher, J.; Gibis, R.; Kuenzel, H.; Paraskevopoulos, A. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 1995 | Active silicon CMOS addressing matrices for light-valve projection displays
Molzow, W.-D.; Brinker, W.; Wirges, W.; Gerhard-Multhaupt, R.; Melcher, R.; Budde, W.; Fiedler, H. | Zeitschriftenaufsatz |
| 1995 | Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin prepolymer films
Gesang, T.; Fanter, D.; Höper, R.; Possart, W.; Hennemann, O.-D. | Zeitschriftenaufsatz |
| 1995 | Determination of vacancy concentration in float zone and Czochralski silicon
Jacob, M.; Pichler, P.; Ryssel, H.; Gambaro, D.; Falster, R. | Konferenzbeitrag |
| 1995 | Elektronenspektroskopische Charakterisierung der Adhäsion von Triazinderivaten und Cyansäureestern auf Siliziumoberflächen
Dieckhoff, S. | Dissertation |
| 1995 | Nitrogen implanted etch-stop layers in silicon
Paneva, R.; Temmel, G.; Ryssel, H.; Burte, E.P. | Konferenzbeitrag |
| 1995 | Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B. | Konferenzbeitrag |
| 1995 | Platinum diffusion at low temperatures
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R. | Konferenzbeitrag |
| 1995 | Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
Gesang, T.; Höper, R.; Dieckhoff, S.; Hartwig, A.; Possart, W.; Hennemann, O.-D. | Zeitschriftenaufsatz |
| 1995 | A Raman spectroscopic study of the Si, Be, and C incorporation in InxGa1-xAs relaxed layers
Alvarez, A.-L.; Calle, F.; Sacedon, A.; Calleja, E.; Munoz, E.; Wagner, J.; Maier, M.; Mazuelas, A.; Ploog, K.H. | Zeitschriftenaufsatz |
| 1995 | Silicon incorporation in GaAs. From delta-doping to monolayer insertion
Wagner, J.; Newman, R.C.; Roberts, C. | Zeitschriftenaufsatz |
| 1995 | Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L. | Konferenzbeitrag |
| 1995 | Ultrasonic transducer with silicon membrane for liquid nebulization
Paneva, R.; Temmel, G. | Konferenzbeitrag |
| 1995 | Ultrasonic transducer with silicon. A well known material with new applications
Paneva, R.; Temmel, G.; Ryssel, H. | Konferenzbeitrag |
| 1995 | X-ray curve characterization of homo-epitaxial layers on silicon deposited after DC hydrogen cleaning
Dommann, A.; Herres, N.; Deller, H.R.; Nissen, H.U.; Krüger, D.; Pixley, R.E.; Ramm, J. | Zeitschriftenaufsatz |
| 1995 | XPS studies of thin polycyanurate films on silicon wafers
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D. | Zeitschriftenaufsatz |
| 1994 | Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D. | Konferenzbeitrag |
| 1994 | Analytical description of high energy implantation profiles of bordon and phosphorus into crystalline silicon
Gong, L.; Bogen, S.; Frey, L.; Jung, W.; Ryssel, H. | Zeitschriftenaufsatz |
| 1994 | CO and CO2 thin-film SnO2 gas sensors on Si-substrates
Hoefer, U.; Kühner, G.; Schweizer, W.; Sulz, G.; Steiner, K. | Zeitschriftenaufsatz |
| 1994 | Electrical and structural characteristics of thin buried oxides
Meda, L.; Bertoni, S.; Cerofolini, G.F.; Gassel, H. | Zeitschriftenaufsatz |
| 1994 | Investigation of the effect of altered defect structure produced by photon assisted the diffusion of As in silicon during thermal anneallagation
Biro, L.P.; Gyulai, J.; Bogen, S.; Frey, L.; Ryssel, H. | Zeitschriftenaufsatz |
| 1994 | Observation of local SIMOX layers by microprobe RBS
Kinomura, A.; Horino, Y.; Mokuno, Y.; Chayahara, A.; Kiuchi, M.; Fujii, K.; Takai, M.; Lohner, T.; Ryssel, H.; Schork, R. | Zeitschriftenaufsatz |
| 1994 | On modeling of ion implantation at high temperatures
Pichler, P.; Schork, R. | Zeitschriftenaufsatz |
| 1994 | Proceedings of the FORWIHR Symposium on High Performance Scientific Computing
Griebel, M.; Zenger, C. | Tagungsband |
| 1994 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Zeitschriftenaufsatz |
| 1994 | Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W. | Konferenzbeitrag |
| 1994 | Single crystal growth of Si-Ge alloy by ion implantation and sequential rapid thermal
Kal, S.; Kasko, I.; Ryssel, H. | Zeitschriftenaufsatz |
| 1994 | Single-shell carbon nanotubes imaged by atomic force microscopy.
Höper, R.; Workman, R.K.; Chen, D.; Sarid, D.; Yadav, T.; Withers, J.C.; Loutfy, R.O. | Zeitschriftenaufsatz |
| 1994 | SOI-Herstellung und Anwendung am Fraunhofer-Institut IMS Duisburg.
Gassel, H. | Konferenzbeitrag |
| 1993 | A controllable mechanism of forming extremely low-resistance nonalloyed ohmic contacts to group III-V compound semiconductors
Stareev, G.; Kunzel, H.; Dortmann, G. | Zeitschriftenaufsatz |
| 1993 | Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J. | Konferenzbeitrag |
| 1993 | Effect of ion-beam mixing temperature on cobalt silicide formation
Kasko, I.; Dehm, C.; Frey, L.; Ryssel, H. | Zeitschriftenaufsatz |
| 1993 | The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 1993 | Evaluation of residual stresses in a strongly textured saw blade for the production of silicon-wafers
Hauk, V.; Derycke, Pascal; Theiner, Werner Alfred | Konferenzbeitrag |
| 1993 | High energy implantation of high10 B and high11 B into -100- silicon in channel and in random
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H. | Zeitschriftenaufsatz |
| 1993 | Influence of impurities on ion beam induced TiSi2 formation
Dehm, C.; Raum, B.; Kasko, I.; Ryssel, H. | Zeitschriftenaufsatz |
| 1993 | An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A. | Konferenzbeitrag |
| 1993 | A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J. | Konferenzbeitrag |
| 1993 | A novel delineation technique for 2D-profiling of dopants in crystalline silicon
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H. | Zeitschriftenaufsatz |
| 1993 | Photon assisted implantation -PAI-
Biro, L.P.; Gyulai, J.; Ryssel, H.; Frey, L.; Kormany, T.; Tuan, N.M. | Zeitschriftenaufsatz |
| 1993 | Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A. | Konferenzbeitrag |
| 1993 | Residual stress during local SIMOX process - Raman measurement and simulation
Seidl, A.; Takai, M.; Sayama, H.; Haramura, K.; Ryssel, H.; Schork, R.; Kato, K. | Zeitschriftenaufsatz |
| 1993 | Silicon microsystems
Heuberger, A. | Konferenzbeitrag |
| 1993 | Test monolithischer Sensorsysteme
Dudaicevs, H.; Gottfried-Gottfried, R. | Zeitschriftenaufsatz |
| 1992 | Excited defect energy states from temperature dependent ESR.
Kisielowski, C.; Maier, K.; Schneider, J.; Oding, V. | Zeitschriftenaufsatz |
| 1992 | Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W. | Zeitschriftenaufsatz |
| 1992 | Gold and platinum diffusion. The key to the understanding of intrinsic point defect behaviour in silicon
Zimmermann, H.; Ryssel, H. | Zeitschriftenaufsatz |
| 1992 | An investigation of vacancy concentrations in bulk silicon
Zimmermann, H.; Ryssel, H. | Konferenzbeitrag |
| 1992 | Shallow p-n junctions produced by laser doping with boron silicate glass
Bollmann, D.; Buchner, R.; Haberger, K.; Neumayer, G. | Konferenzbeitrag |
| 1992 | Silicon technologies for sensor fabrication
Mokwa, W. | Aufsatz in Buch |
| 1991 | Controlled nucleation - a new approach to improve the crystallinity of RAFT-foils
Reis, I.; Hurrle, A.; Helmreich, D.; Beck, A.; Räuber, A. | Konferenzbeitrag |
| 1991 | In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K. | Konferenzbeitrag |
| 1991 | MBE growth and electrical behavior of single and double Si delta-doped InGaAs-layers
Passenberg, W.; Bach, H.G.; Bottcher, J. | Konferenzbeitrag |
| 1991 | MBE overgrowth of implanted regions in InP:Fe substrates
Kunzel, H.; Gibis, R.; Schlaak, W.; Su, L.M.; Grote, N. | Konferenzbeitrag, Zeitschriftenaufsatz |
| 1991 | Metallization of integrated circuits by laser evaporation of metal sandwich layers
Bollmann, D.; Haberger, K.; Pielmeier, R. | Konferenzbeitrag |
| 1991 | Molecular beam epitaxy grown Al(Ga)InAs: Schottky contacts and deep levels
Schramm, C.; Bach, H.G.; Kunzel, H.; Praseuth, J.P. | Zeitschriftenaufsatz |
| 1991 | Shallow p-n junctions produced by laser doping with Boron and Phosphorus Silicate glass
Bollmann, D.; Stock, G.; Neumayer, G.; Haberger, K. | Konferenzbeitrag |
| 1991 | Thickness inhomogeneity during silicon X-ray mask membrane fabrication: generation and prevention
Löchel, B.; Macioßek, A.; Huber, H.-L.; König, M. | Konferenzbeitrag |
| 1991 | Überblick und Haupttrends im Bereich Halbleitermaterialien und -technologien
Kersten, G. | Buch |
| 1990 | Laser evaporation of metal sandwich layers for improved IC metallization
Bollmann, D.; Haberger, K.; Pielmeier, R. | Zeitschriftenaufsatz |
| 1990 | Silicon micromachining for microsensors and microactuators
Benecke, W. | Konferenzbeitrag |
| 1990 | Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K. | Konferenzbeitrag |
| 1990 | Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K. | Konferenzbeitrag |
| 1989 | Phase diversity transmission experiments employing novel optical and electronic components
Langenhorst, R.; Wenke, G.; Fluge, M.; Pieper, W.; Weber, H.G. | Konferenzbeitrag |
| 1989 | State of the art of pattern placement accuracy of silicon X-ray master masks
Pongratz, S.; Mescheder, U.; Ehrlich, C.; Huber, H.-L.; Kohlmann, K.; Windbracke, W. | Konferenzbeitrag |
| 1989 | Wideband bipolar multiplier IC with high dynamic range for use in coherent optical receivers
Fluge, M.; Frederiksen, P.T.; Enning, B.; Walf, G.; Weber, H.G.; Rein, H.M. | Zeitschriftenaufsatz |
| 1988 | Wafer slicing by internal diameter sawing
Steffens, K.; König, W.; Struth, W. | Konferenzbeitrag |