Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
20193-D Modeling of Multicrystalline Silicon Materials and Solar Cells
Sio, Hang Cheong; Fell, Andreas; Phang, Sieu Pheng; Wang, Haitao; Zheng, Peiting; Chen, D.K.; Zhang, Xinyu; Zhang, Tao; Jin, Hao; Macdonald, Daniel
Zeitschriftenaufsatz
2019Correlation of defect luminescence and recombination in multicrystalline silicon
Wyller, Guro Marie; Schindler, Florian; Kwapil, Wolfram; Schön, Jonas; Olsen, Espen; Haug, Halvard; Riepe, Stephan; Schubert, Martin C.
Zeitschriftenaufsatz
2019Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir
Zeitschriftenaufsatz
2019Diffusion of phosphorus and boron from Atomic Layer Deposition oxides into silicon
Beljakova, Svetlana; Pichler, Peter; Kalkofen, Bodo; Hübner, René
Zeitschriftenaufsatz
2019On a Novel Source Technology for Deep Aluminum Diffusion for Silicon Power Electronics
Rattmann, Gudrun; Pichler, Peter; Erlbacher, Tobias
Zeitschriftenaufsatz
2019Photoacoustic cell on silicon for mid-infrared QCL-based spectroscopic analysis
Coutard, Jean-Guillaume; Glière, Alain; Fedeli, Jean-Marc; Lartigue, Oliver; Skubich, Jules; Aoust, Guillaume; Teulle, Alexandre; Strahl, Thomas; Nicoletti, Sergio; Carras, Mathieu; Duraffourg, Laurent
Konferenzbeitrag
2018Analysis of 28 nm SRAM cell stability under mechanical load applied by nanoindentation
Clausner, André; Schlipf, Simon; Kurz, G.; Otto, M.; Paul, J.; Giering, Kay-Uwe; Warmuth, Jens; Lange, André; Jancke, Roland; Aal, A.; Rosenkranz, Rüdiger; Gall, Martin; Zschech, Ehrenfried
Konferenzbeitrag
2018Bifacial p-type silicon shingle solar cells - the "pSPEER" concept
Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Krieg, A.; Preu, R.
Zeitschriftenaufsatz
2018Design and characterization of a silicon photomultiplier in 0.35 μm CMOS
D'Ascenzo, Nicola; Brockherde, Werner; Dreiner, Stefan; Schwinger, Alexander; Schmidt, Andrei; Xie, Q.
Zeitschriftenaufsatz
2018A detailed full-cell model of a 2018 commercial PERC solar cell in Quokka3
Fell, Andreas; Altermatt, Pietro P.
Zeitschriftenaufsatz
2018Development of high performance multicrystalline silicon with controlled seeding
Hess, Adam; Krenckel, Patricia; Trötschler, Theresa; Fehrenbach, Tobias; Riepe, Stephan
Konferenzbeitrag
2018Direct growth of III–V/silicon triple-junction solar cells with 19.7% efficiency
Feifel, Markus; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Belz, Jürgen; Beyer, Andreas; Volz, Kerstin; Hannappel, Thomas; Bett, Andreas W.; Lackner, David; Dimroth, Frank
Zeitschriftenaufsatz
2018Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen
Zeitschriftenaufsatz
2018Efficiency Gain Analysis of Silicon Passivated Emitter and Rear Solar Cells Solely Based on Measurements
Wasmer, S.; Horst, A. van der; Saint-Cast, P.; Greulich, J.M.
Konferenzbeitrag
2018Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Konferenzbeitrag
2018High-Efficiency Diamond Wire-Sawn mc-Si-Based PERC Solar Cells Textured by Atmospheric Pressure Dry Etching
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Peters, S.; Hofmann, M.
Konferenzbeitrag
2018Impact of Uncertainties of Fundamental Models on Simulated Silicon Solar Cell Efficiencies
Wasmer, S.; Fell, A.; Greulich, J.M.
Konferenzbeitrag
2018Inline Characterization of Diamond Wire Sawn Multicrystalline Silicon Wafers
Haunschild, J.; Bergmann, N.; Hammer, T.; Krieg, K.; Kaden, T.; Anspach, O.; Schremmer, H.; Rein, S.
Konferenzbeitrag
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018An open source based repository for defects in silicon
Juhl, Mattias K.; Heinz, Friedemann D.; Coletti, Gianluca; Macdonald, Daniel; Rougieux, Fiacre E.; Schindler, Florian; Niewelt, Tim; Schubert, Martin C.
Konferenzbeitrag
2018Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells
Ivanov, Alexey; Sorgenfrei, R.; Gust, Elke; Barth, Philipp; Nieuwenhuysen, Kris van; Kühnhold-Pospischil, Saskia; Riepe, Stephan; Janz, Stefan
Konferenzbeitrag
2018Photoluminescence Imaging at Uniform Excess Carrier Density Using Adaptive Nonuniform Excitation
Zhu, Y.; Heinz, F.D.; Juhl, M.; Schubert, M.C.; Trupke, T.; Hameiri, Z.
Zeitschriftenaufsatz
2018Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Hauf, Moritz; Schmidt, Gerhard; Niedernostheide, Franz-Josef; Johnsson, Anna; Pichler, Peter
Konferenzbeitrag
2018The principle of adaptive excitation for photoluminescence imaging of silicon: Theory
Heinz, Friedemann D.; Zhu, Yan; Hameri, Ziv; Juhl, Mattias; Trupke, Thorsten; Schubert, Martin C.
Zeitschriftenaufsatz
2018Shear melting of silicon and diamond and the disappearance of the polyamorphic transition under shear
Moras, G.; Klemenz, A.; Reichenbach, T.; Gola, A.; Uetsuka, H.; Moseler, M.; Pastewka, L.
Zeitschriftenaufsatz
2018Slurry Sawing of Multicrystalline Silicon with Low-Viscosity Carrier Liquid
Kaden, T.; Look, C.; Ischenko, V.; Gröschel, M.; Anspach, O.
Konferenzbeitrag
2017Angle-dependent reflectance of isotextured silicon
Alapont Sabater, A.; Greulich, J.; Tucher, N.; Bläsi, B.; Glunz, S.W.
Konferenzbeitrag
2017Approaching 22% efficiency with multicrystalline n-type silicon solar cells
Benick, J.; Müller, R.; Schindler, F.; Richter, A.; Hauser, H.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schubert, M.C.; Hermle, M.; Glunz, S.W.
Konferenzbeitrag
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Zeitschriftenaufsatz
2017Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry
Würzner, S.; Herms, M.; Kaden, T.; Möller, H.J.; Wagner, M.
Zeitschriftenaufsatz
2017Impact of material and process variations on the distribution of multicrystalline silicon PERC cell efficiencies
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Demant, M.; Fertig, F.; Rein, S.
Zeitschriftenaufsatz
2017Increasing the efficiency of multicrystalline silicon PERC solar cells from currently 19% to 20%
Greulich, J.; Lohmüller, E.; Saint-Cast, P.; Werner, S.; Wasmer, S.; Horst, A.J. van der; Preu, R.
Konferenzbeitrag
2017The influence of material properties on the wire sawing process of multicrystalline silicon
Kaden, T.; Ershova, E.; Lottspeich, L.; Fuchs, M.
Konferenzbeitrag
2017Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J.
Konferenzbeitrag
2017Kinetics of carrier-induced degradation at elevated temperature in multicrystalline silicon solar cells
Kwapil, W.; Niewelt, T.; Schubert, M.C.
Zeitschriftenaufsatz
2017Laser transfer and firing of NiV seed layer for the metallization of silicon heterojunction solar cells by Cu-plating
Rododfili, A.; Wolke, W.; Kroely, L.; Bivour, M.; Cimiotti, G.; Bartsch, J.; Glatthaar, M.; Nekarda, J.
Zeitschriftenaufsatz
2017Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Niewelt, T.; Selinger, M.; Grant, N.; Kwapil, W.M.; Murphy, J.D.; Schubert, M.C.
Zeitschriftenaufsatz
2017Long-term stability of aluminum oxide based surface passivation schemes under illumination at elevated temperatures
Niewelt, T.; Kwapil, W.M.; Selinger, M.; Richter, A.; Schubert, M.C.
Zeitschriftenaufsatz
2017Material limits of multicrystalline silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2017Materials response to glancing incidence femtosecond laser ablation
Echlin, M.P.; Titus, M.S.; Straw, M.; Gumbsch, P.; Pollock, T.M.
Zeitschriftenaufsatz
2017Monolithic two-terminal III-V//Si triple-junction solar cells with 30.2% efficiency under 1-Sun AM1.5g
Cariou, R.; Benick, J.; Beutel, P.; Razek, N.; Flötgen, C.; Hermle, M.; Lackner, D.; Glunz, S.W.; Bett, A.W.; Wimplinger, M.; Dimroth, F.
Zeitschriftenaufsatz
2017A novel approach to determine the diamond occupancy of diamond wires for optimized cutting processes for crystalline silicon
Lottspeich, L.; Theophil, L.; Fuchs, M.; Kaden, T.
Konferenzbeitrag
2017On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Zeitschriftenaufsatz
2017Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter
Dissertation
2017Separation of the surface and bulk recombination in silicon by means of transient photoluminescence
Heinz, F.D.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2017Si-C void structures for anodes in Li-S full cells - from coin cell to pouch cell level
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan
Vortrag
2017Silicon carbon void structures as anode material for advanced lithium-ion and lithium-sulfur batteries
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan
Vortrag
2017Silicon materials. Electrical and optical properties
Fell, A.
Aufsatz in Buch
2017Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard
Zeitschriftenaufsatz
2017Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature
Niewelt, T.; Kwapil, W.; Selinger, M.; Richter, A.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2017Transmission electron microscopy based interface analysis of the origin of the variation in surface recombination of silicon for different surface preparation methods and passivation materials
Ali, H.; Moldovan, A.; Mack, S.; Schoenfeld, W.V.; Davis, K.O.
Zeitschriftenaufsatz
2016Analysis of grain structure evolution based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S.
Zeitschriftenaufsatz
2016Analysis of grain structure evolution via image processing based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S.
Konferenzbeitrag
2016Benefits and Disadvantages of p- and n-type Doping for Multicrystalline Silicon
Schubert, M.
Vortrag
2016Contact fault characterisation of complex silicon solar cells: A guideline based on current voltage characteristics and luminescence imaging
Padilla, M.; Reichel, C.; Hagedorn, N.; Fell, A.; Keding, R.; Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2016Degradation of silicon wafers at high temperatures for epitaxial deposition
Rachow, T.; Reber, S.; Janz, S.; Knapp, M.; Milenkovic, N.
Zeitschriftenaufsatz
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Konferenzbeitrag
2016Empirical cluster modeling revisited
Pichler, Peter
Konferenzbeitrag
2016Fast in-situ photoluminescence analysis for a recombination parameterization of the fast BO defect component in silicon
Niewelt, T.; Mägdefessel, S.; Schubert, M.C.
Zeitschriftenaufsatz
2016Gallium phosphide window layer for silicon solar cells
Feifel, M.; Rachow, T.; Benick, J.; Ohlmann, J.; Janz, S.; Hermle, M.; Dimroth, F.; Lackner, D.
Zeitschriftenaufsatz
2016Impact of the Firing Temperature Profile on Light Induced Degradation of Multicrystalline Silicon
Eberle, R.; Kwapil, W.; Schindler, F.; Schubert, M.C.; Glunz, S.W.
Zeitschriftenaufsatz
2016Material limits of silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Konferenzbeitrag
2016Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Konferenzbeitrag
2016N-type multicrystalline silion for high efficiency solar cells
Riepe, S.; Krenckel, P.; Schindler, F.; Schubert, M.; Benick, J.
Zeitschriftenaufsatz
2016On the benefits of counting single photoluminescence photons for the investigation of low injection lifetime and traps in silicon
Heinz, F.D.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Optical Modeling of Honeycomb Textures for Multicrystalline Silicon Solar Cells
Peters, I.; Hauser, H.; Tucher, N.; Bläsi, B.
Zeitschriftenaufsatz
2016Physically sound parameterization of incomplete ionization in aluminum-doped silicon
Steinkemper, H.; Altermatt, P.P.; Hermle, M.
Zeitschriftenaufsatz
2016A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen
Konferenzbeitrag
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Konferenzbeitrag
2016Simplified device simulation of silicon solar cells using a lumped parameter optical model
Fell, A.; McIntosh, K.R.; Fong, K.C.
Zeitschriftenaufsatz
2016Simplified fabrication of n-type Cz-Si HIP-MWT+ solar cells with 20% efficiency using laser structuring
Lohmüller, E.; Werner, S.; Maus, S.; Brand, A.; Jäger, U.; Nekarda, J.; Clement, F.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Solar cells with 20% efficiency and lifetime evaluation of epitaxial wafers
Drießen, M.; Amiri, D.; Milenkovic, N.; Steinhauser, B.; Lindekugel, S.; Benick, J.; Reber, S.; Janz, S.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Spatially resolved analysis of light induced degradation of multicrystalline PERC solar cells
Selinger, M.; Kwapil, W.; Schindler, F.; Krauß, K.; Fertig, F.; Michl, B.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2016Understanding process-related efficiency variations of mc-Si PERC cells
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Rein, S.
Zeitschriftenaufsatz
2016Untangling the mysteries of plated metal finger adhesion
Wang, X.; Hsiao, P.-C.; Zhang, W.; Johnston, B.; Stokes, A.; Wei, Q.; Fell, A.; Surve, S.; Shengzhao, Y.; Verlinden, P.; Lennon, A.
Zeitschriftenaufsatz
2015Adapted parameterization of incomplete ionization in aluminum-doped silicon and impact on numerical device simulation
Steinkemper, H.; Rauer, M.; Altermatt, P.; Heinz, F.D.; Schmiga, C.; Hermle, M.
Zeitschriftenaufsatz
2015Carrier-diffusion corrected J0-analysis of charge carrier lifetime measurements for increased consistency
Kimmerle, A.; Greulich, J.; Wolf, A.
Zeitschriftenaufsatz, Konferenzbeitrag
2015A combined transient and steady state approach for robust lifetime spectroscopy with micrometer resolution
Heinz, F.D.; Mundt, L.E.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Development of integrated interconnected crystalline silicon thin film solar cells
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S.
Zeitschriftenaufsatz
2015Diffusion and segregation model for the annealing of silicon solar cells implanted with phosphorus
Wolf, F. Alexander; Martinez-Limia, Alberto; Grote, Daniela; Stichtenoth, Daniel; Pichler, Peter
Zeitschriftenaufsatz
2015A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Zeitschriftenaufsatz, Konferenzbeitrag
2015Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
Niewelt, T.; Schön, J.; Broisch, J.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Investigating the impact of parameter and process variations on multicrystalline PERC cell efficiency
Wasmer, S.; Greulich, J.; Höffler, H.; Haunschild, J.; Demant, M.; Rein, S.
Konferenzbeitrag
2015Iron related solar cell instability: Imaging analysis and impact on cell performance
Schubert, M.C.; Padilla, M.; Michl, B.; Mundt, L.; Giesecke, J.; Hohl-Ebinger, J.; Benick, J.; Warta, W.; Tajima, M.; Ogura, A.
Zeitschriftenaufsatz
2015The irresistible charm of a simple current flow pattern - approaching 25% with a solar cell featuring a full-area back contact
Glunz, S.W.; Feldmann, F.; Richter, A.; Bivour, M.; Reichel, C.; Steinkemper, H.; Benick, J.; Hermle, M.
Konferenzbeitrag
2015Local Series Resistance Imaging of Silicon Solar Cells with Complex Current Paths
Padilla, M.; Michl, B.; Hagedorn, N.; Reichel, C.; Kluska, S.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Manufacturing 100-µm-thick silicon solar cells with efficiencies greater than 20% in a pilot production line
Terheiden, B.; Ballmann, T.; Horbelt, R.; Schiele, Y.; Seren, S.; Ebser, J.; Hahn, G.; Mertens, V.; Koentopp, M.B.; Scherff, M.; Müller, J.W.; Holman, Z.C.; Descoeudres, A.; Wolf, S. de; Nicolas, S.M. de; Geissbuehler, J.; Ballif, C.; Weber, B.; Saint-Cast, P.; Rauer, M.; Schmiga, C.; Glunz, S.W.; Morrison, D.J.; Devenport, S.; Antonelli, D.; Busto, C.; Grasso, F.; Ferrazza, F.; Tonelli, E.; Oswald, W.
Zeitschriftenaufsatz
2015Microscopic charge carrier lifetime in silicon from a transient approach
Heinz, F.D.; Kasemann, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Modeling of gas flow and deposition profile in HWCVD processes
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.; Siemers, M.; Melzig, T.; Schäfer, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Vortrag
2015Nanostructuring of c-Si surface by F2-based atmospheric pressure dry texturing process
Kafle, B.; Seiffe, J.; Clochard, L.; Duffy, E.; Rentsch, J.; Hofmann, M.
Zeitschriftenaufsatz
2015Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Zeitschriftenaufsatz
2015A new method for the determination of the dopant-related base resistivity despite the presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S.
Zeitschriftenaufsatz
2015Oberflächenmodifizierung mit Licht
Schmüser, Christian
Bericht
2015On the implication of spatial carrier density non-uniformity on lifetime determination in silicon
Heinz, F.D.; Giesecke, J.; Mundt, L.E.; Kasemann, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Porous silicon reorganization: Influence on the structure, surface roughness and strain
Milenkovic, N.; Drießen, M.; Weiss, C.; Janz, S.
Zeitschriftenaufsatz
2015Potential gain in multicrystalline silicon solar cell efficiency by n-Type doping
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2015Record efficient upconverter solar cell devices with optimized bifacial silicon solar cells and monocrystalline BaY2F8:30% Er3+ upconverter
Fischer, S.; Favilla, E.; Tonelli, M.; Goldschmidt, J.C.
Zeitschriftenaufsatz
2015Relation between light trapping and surface topography of plasma textured crystalline silicon wafers
Souren, F.M.M.; Rentsch, J.; Sanden, M.C.M. van de
Zeitschriftenaufsatz
2015Resistivity, doping concentrations, and carrier mobilities in compensated N- and P-type Czochralski silicon: Comparison of measurements and simulations and consistent description of material parameters
Broisch, J.; Schindler, F.; Schubert, M.C.; Fertig, F.; Soiland, A.-K.; Rein, S.
Zeitschriftenaufsatz
2015Role of defects in the dopant diffusion in Si
Pichler, Peter
Aufsatz in Buch
2015Self-organized, effective medium Black Silicon for infrared antireflection
Steglich, Martin; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Zeitschriftenaufsatz
2015Silicon crystallization technologies
Dold, P.
Aufsatz in Buch
2015THz emission from argon implanted silicon surfaces
Blumröder, Ulrike; Steglich, Martin; Schrempel, Frank; Hoyer, Patrick; Nolte, Stefan
Zeitschriftenaufsatz
2014A-SIO:H thin films with increased light induced degradation stability for thin film silicon solar cells
Holinski, S.; Borchert, D.; Hohage, S.; Meiners, B.-M.; Schäfer, P.; Westrich, T.
Konferenzbeitrag
2014Accurate potential drop sheet resistance measurements of laser-doped areas in semiconductors
Heinrich, M.; Kluska, S.; Binder, S.; Hameiri, Z.; Hoex, B.; Aberle, A.G.
Zeitschriftenaufsatz
2014Challenges for photovoltaic silicon materials
Coletti, G.; Gordon, I.; Schubert, M.C.; Warta, W.; Ovrelid, E.J.; Jouini, A.; Tucci, M.; Cesare, G. de
Zeitschriftenaufsatz
2014Characterisation of Ultra-Thin µc-Si Films for Silicon Heterojunction Solar Cells
Wernerus, H.; Bivour, M.; Kroely, L.; Hermle, M.; Wolke, W.
Konferenzbeitrag
2014Characterizing local contact resistances of interdigitated back contact silicon solar cells
Padilla, M.; Michl, B.; Reichel, C.; Hagedorn, N.; Kluska, S.; Haag, S.; Keding, R.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C.
Konferenzbeitrag
2014Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
2014Deep energy levels of platinum-hydrogen complexes in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Konferenzbeitrag
2014Determination of the dopant-related base resistivity in presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S.
Konferenzbeitrag
2014Doped layer optimization for silicon heterojunctions by injection-level-dependent open-circuit voltage measurements
Bivour, M.; Reusch, M.; Schröer, S.; Feldmann, F.; Temmler, J.; Steinkemper, H.; Hermle, M.
Zeitschriftenaufsatz
2014Efficiency-limiting recombination in multicrystalline silicon solar cells
Schubert, M.C.; Schön, J.; Abdollahinia, A.; Michl, B.; Kwapil, W.; Schindler, F.; Heinz, F.; Padilla, M.; Giesecke, J.; Breitwieser, M.; Riepe, S.; Warta, W.
Konferenzbeitrag
2014Explanation of potential-induced degradation of the shunting type by Na decoration of stacking faults in Si solar cells
Naumann, V.; Lausch, D.; Hähnel, A.; Bauer, J.; Breitenstein, O.; Graff, A.; Werner, M.; Swatek, S.; Großer, S.; Bagdahn, J.; Hagendorf, C.
Zeitschriftenaufsatz
2014Front side antireflection concepts for silicon solar cells with diffractive rear side structures
Bett, A.; Eisenlohr, J.; Höhn, O.; Bläsi, B.; Benick, J.; Repo, P.; Savin, H.; Goldschmidt, J.C.; Hermle, M.
Konferenzbeitrag
2014Heavily doped Si:P emitters of crystalline Si solar cells: Recombination due to phosphorus precipitation
Min, B.; Wagner, H.; Dastgheib-Shirazi, A.; Kimmerle, A.; Kurz, H.; Altermatt, P.P.
Zeitschriftenaufsatz
2014Increased Reliability for J0-Analysis by QSSPC
Kimmerle, A.; Rothhardt, P.; Wolf, A.; Sinton, R.A.
Konferenzbeitrag
2014Influence of rear-side passivation on solar cell performance of bosco solar cells
Krauß, K.; Fertig, F.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.
Konferenzbeitrag
2014Interdigitated back contact silicon solar cells with tunnel oxide passivated contacts formed by ion implantation
Reichel, C.; Feldmann, F.; Müller, R.; Moldovan, A.; Hermle, M.; Glunz, S.W.
Konferenzbeitrag
2014Kroll-carbons based on silica and alumina templates as high-rate electrode materials in electrochemical double-layer capacitors
Oschatz, Martin; Boukhalfa, S.; Nickel, Winfried; Lee, J.T.; Klosz, Stefan; Borchardt, L.; Eychmüller, Alexander; Yushin, G.; Kaskel, Stefan
Zeitschriftenaufsatz
2014Micro characterization of laser structured solar cells with plated Ni-Ag contacts
Kluska, S.; Fleischmann, C.; Büchler, A.; Hördt, W.; Geisler, C.; Hopman, S.; Glatthaar, M.
Zeitschriftenaufsatz
2014Microscopic origin of the aluminium assisted spiking effects in n-type silicon solar cells
Heinz, F.D.; Breitwieser, M.; Gundel, P.; König, M.; Hörteis, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2014Modeling platinum diffusion in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Zeitschriftenaufsatz
2014Modeling the annealing of dislocation loops in implanted c-Si solar cells
Wolf, F. Alexander; Martinez-Limia, Alberto; Stichtenoth, Daniel; Pichler, Peter
Zeitschriftenaufsatz
2014On an improved boron segregation calibration from a particularly sensitive power MOS process
Koffel, S.; Burenkov, A.; Sekowski, M.; Pichler, P.; Giubertoni, D.; Bersani, M.; Knaipp, M.; Wachmann, E.; Schrems, M.; Yamamoto, Y.; Bolze, D.
Zeitschriftenaufsatz, Konferenzbeitrag
2014The potential of multicrystalline n-type silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Konferenzbeitrag
2014Process control and defect analysis for crystalline silicon thin films for photovoltaic applications by the means of electrical and spectroscopic microcharacterization tools
Breitwieser, M.; Heinz, F.; Rachow, T.; Kasemann, M.; Janz, S.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2014Relaxation of vacancy depth profiles in silicon wafers: A low apparent diffusivity of vacancy species
Voronkov, Vladimir V.; Falster, Robert; Pichler, Peter
Zeitschriftenaufsatz
2014Reorganization of Porous Silicon. Effect on Epitaxial Layer Quality and Detachment
Milenkovic, N.; Drießen, M.; Gust, E.; Janz, S.; Reber, S.
Konferenzbeitrag, Zeitschriftenaufsatz
2014Short-circuit current density mapping for solar cells
Padilla, M.; Michl, B.; Thaidigsmann, B.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2014Silicon heterojunction rear emitter solar cells: Less restrictions on the optoelectrical properties of front side TCOs
Bivour, M.; Schröer, S.; Hermle, M.; Glunz, S.W.
Zeitschriftenaufsatz
2014Simulation of AsH3 plasma immersion ion implantation into silicon
Burenkov, Alex; Lorenz, Jürgen; Spiegel, Yohann; Torregrosa, Frank
Konferenzbeitrag
2014Solar cell efficiency losses due to impurities from the crucible in multicrystalline silicon
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M.
Zeitschriftenaufsatz
2014Specific aspects of roughness and interface diffusion in non-periodic Mo/Si multilayers
Braun, Stefan; Gawlitza, Peter; Menzel, Maik; Friedrich, Wolfgang; Schmidt, Jürgen; Leson, Andreas
Konferenzbeitrag
2014Towards a unified low-field model for carrier mobilities in crystalline silicon
Schindler, F.; Forster, M.; Broisch, J.; Schön, J.; Giesecke, J.; Rein, S.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2013Anomalous impurity segregation and local bonding fluctuation in l-Si
Fisicaro, G.; Huet, K.; Negru, R.; Hackenberg, M.; Pichler, P.; Taleb, N.; La Magna, A.
Zeitschriftenaufsatz
2013Characterization and modeling of screen-printed metal insulator semiconductor tunnel junctions for integrated bypass functionality in crystalline silicon solar cells
Thaidigsmann, Benjamin; Lohmüller, Elmar; Fertig, Fabian; Clement, Florian; Wolf, Andreas
Zeitschriftenaufsatz
2013Co-diffusion from solid sources for bifacial n-type solar cells
Rothhardt, P.; Keding, R.; Wolf, A.; Biro, D.
Zeitschriftenaufsatz
2013A comprehensive model for the diffusion of boron in silicon in presence of fluorine
Wolf, F. Alexander; Martinez-Limia, Alberto; Pichler, Peter
Zeitschriftenaufsatz
2013Determination of crystal grain orientations by optical microscopy at textured surfaces
Lausch, D.; Gläser, M.; Hagendorf, C.
Zeitschriftenaufsatz
2013Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; La Magna, A.
Konferenzbeitrag
2013Effective passivation of black silicon surfaces by atomic layer deposition
Repo, P.; Haarahiltunen, A.; Sainiemi, L.; Yli-Koski, M.; Talvitie, H.; Schubert, M.C.; Savin, H.
Zeitschriftenaufsatz
2013Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R.
Zeitschriftenaufsatz
2013Extended model for platinum diffusion in silicon
Badr, E.; Pichler, P.; Schmidt, G.
Konferenzbeitrag
2013Impact of impurities from crucible and coating on mc-silicon quality - the example of iron and cobalt
Schubert, M.C.; Schön, J.; Schindler, F.; Kwapil, W.; Abdollahinia, A.; Michl, B.; Riepe, S.; Schmid, C.; Schumann, M.; Meyer, S.; Warta, W.
Zeitschriftenaufsatz
2013Influence of argon flow rate on melt convection and incorporation of SiC in multicrystalline silicon
Schmid, C.; Schumann, M.; Haas, F.; Riepe, S.
Konferenzbeitrag
2013IntegRex - process development of a module interconnection concept for thin crystalline silicon films
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S.
Konferenzbeitrag
2013Interstitial chromium in silicon on the micron scale
Heinz, F.D.; Schindler, F.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz, Konferenzbeitrag
2013Kerfless wafering for silicon wafers by using a reusable metal layer
Schoenfelder, S.; Breitenstein, O.; Rissland, S.; Donno, R. de; Bagdahn, J.
Zeitschriftenaufsatz, Konferenzbeitrag
2013Laser assisted honeycomb-texturing on multicrystalline silicon for industrial applications
Volk, A.-K.; Gutscher, S.; Brand, A.; Wolke, W.; Zimmer, M.; Reinecke, H.
Konferenzbeitrag
2013Light-induced degradation in copper-contaminated gallium-doped silicon
Lindroos, J.; Yli-Koski, M.; Haarahiltunen, A.; Schubert, M.C.; Savin, H.
Zeitschriftenaufsatz
2013Macroporous silicon and its application in sensing
Wehrspohn, R.B.; Schweizer, S.L.; Gesemann, B.; Pergande, D.; Geppert, T.M.; Moretton, S.; Lambrecht, A.
Zeitschriftenaufsatz
2013Material limitations due to crucible impurities in multicrystalline silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M.C.
Konferenzbeitrag
2013Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec, M.
Konferenzbeitrag
2013Numerical analysis of electrical TCO / a-Si:H(p) contact properties for silicon heterojunction solar cells
Bivour, M.; Schröer, S.; Hermle, M.
Zeitschriftenaufsatz, Konferenzbeitrag
2013On the strain induced by arsenic into silicon
Koffel, Stéphane; Pichler, Peter; Lorenz, Jürgen; Bisognin, Gabriele; Napolitani, Enrico; Salvador, Davide de
Konferenzbeitrag
2013P-Type MWT solar cells: Current status and future expectations
Thaidigsmann, B.; Hendrichs, M.; Nold, S.; Lohmüller, E.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.
Konferenzbeitrag
2013Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Repo, P.; Benick, J.; Gastrow, G. von; Vähänissi, V.; Heinz, F.D.; Schön, J.; Schubert, M.C.; Savin, H.
Zeitschriftenaufsatz
2013PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Zeitschriftenaufsatz
2013Screened empirical bond-order potentials for Si-C
Pastewka, L.; Klemenz, A.; Gumbsch, P.; Moseler, M.
Zeitschriftenaufsatz
2013Wafer thickness optimization for silicon solar cells of heterogeneous material quality
Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C.
Zeitschriftenaufsatz
2012Angular distributions of sputtered silicon at grazing gallium ion beam incidence
Burenkov, Alex; Sekowski, Matthias; Belko, Viktor; Ryssel, Heiner
Zeitschriftenaufsatz, Konferenzbeitrag
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Zeitschriftenaufsatz
2012Formation of gold nanoparticles in polymeric nanowires by low-temperature thermolysis of gold mesitylene
Erk, C.; Eric Yau, M.Y.; Lange, H.; Thomsen, C.; Miclea, P.; Wehrspohn, R.B.; Schlecht, S.; Steinhart, M.
Zeitschriftenaufsatz
2012Implantation-induced structural defects in highly activated USJs: Boron precipitation and trapping in pre-amorphised silicon
Cristiano, F.; Essa, Z.; Qiu, Y.; Spiegel, Y.; Torregrosa, F.; Duchaine, J.; Boulenc, P.; Tavernier, C.; Cojocaru, O.; Blavette, D.; Mangelinck, D.; Fazzini, P.F.; Quillec, M.; Bazizi, M.; Hackenberg, M.; Boninelli, S.
Konferenzbeitrag
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Konferenzbeitrag
2012Loss analysis and efficiency potential of p-type MWT-PERC solar cells
Thaidigsmann, Benjamin; Greulich, Johannes; Lohmüller, Elmar; Schmeißer, Simon; Clement, Florian; Wolf, Andreas; Biro, Daniel; Preu, Ralf
Zeitschriftenaufsatz, Konferenzbeitrag
2012Material characterization to model linear viscoelastic behavior of thin organic polymer films in microelectronics
Unterhofer, K.; Preu, H.; Walter, J.; Lorenz, G.; Mack, W.; Petzold, M.
Konferenzbeitrag
2012Micro structural root cause analysis of potential induced degradation in c-Si solar cells
Naumann, V.; Hagendorf, C.; Grosser, S.; Werner, M.; Bagdahn, J.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Modeling boron profiles in silicon after pulsed excimer laser annealing
Hackenberg, M.; Huet, K.; Negru, R.; Venturini, J.; Fisicaro, G.; La Magna, A.; Pichler, P.
Konferenzbeitrag
2012The path to industrial production of highly efficient metal wrap through silicon solar cells
Thaidigsmann, Benjamin; Linse, Michael; Wolf, Andreas; Clement, Florian; Biro, Daniel; Preu, Ralf
Zeitschriftenaufsatz
2012Precipitation of antimony implanted into silicon
Koffel, S.; Pichler, P.; Reading, M.A.; Berg, J. van den; Kheyrandish, H.; Hamm, S.; Lerch, W.; Pakfar, A.; Tavernier, C.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Simulation of BF3 plasma immersion ion implantation into silicon
Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, F.
Konferenzbeitrag
2012Strength of thin silicon wafers with via holes
Schoenfelder, S.; Kaule, F.; Oswald, M.; Bagdahn, J.; Petzold, M.
Konferenzbeitrag
2012Terahertz thin film and refractive index sensing with a metamaterial near-field sensor
Schmitt, Klemens; Wollrab, Viktoria; Neu, Jens; Beigang, René; Rahm, Marco
Konferenzbeitrag
2011Challenges in TCAD simulations of tunneling field effect transistors
Kampen, Christian; Burenkov, Alex; Lorenz, Jürgen
Konferenzbeitrag
2011Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2
Brand, U.; Beckert, E.; Beutler, A.; Dai, G.; Stelzer, C.; Hertwig, A.; Klapetek, P.; Koglin, J.; Thelen, R.; Tutsch, R.
Zeitschriftenaufsatz
2011Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Konferenzbeitrag
2011Periodic silicon nanostructures for spectroscopic microsensors
Wehrspohn, R.; Gesemann, B.; Pergande, D.; Geppert, T.; Schweizer, S.; Moretton, S.; Lambrecht, A.
Konferenzbeitrag
2011Plasmonic reflection grating back contacts for microcrystalline silicon solar cells
Paetzold, U.W.; Moulin, E.; Michaelis, D.; Böttler, W.; Wächter, C.; Hagemann, V.; Meier, M.; Carius, R.; Rau, U.
Zeitschriftenaufsatz
2011Quantitative comparison of simulated and experimental silver crystal formation at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R.
Konferenzbeitrag, Zeitschriftenaufsatz
2011Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W.
Zeitschriftenaufsatz
2011Trace element analysis in solar silicon
Meyer, S.; Richter, S.; Balski, M.; Hagendorf, C.
Zeitschriftenaufsatz
2010CCD-camera-based electro-optical detection of nanosecond THz pulses from an optical parametric oscillator
Meng, F.Z.; Thomson, M.D.; Molter, D.; Löffler, T.; Jonuscheit, J.; Beigang, R.; Bartschke, J.; Bauer, T.; Nittmann, M.; Roskos, H.G.
Konferenzbeitrag
2010DLC/Si multilayer mirrors for EUV radiation
Gawlitza, P.; Braun, S.; Leson, A.; Soer, W.; Jak, M.; Banine, V.
Konferenzbeitrag
2010Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems. Design, fabrication, characterization and optimization
Hildenbrand, J.; Peter, C.; Lamprecht, F.; Kürzinger, A.; Naumann, F.; Ebert, M.; Wehrspohn, R.; Korvink, J.G.; Wöllenstein, J.
Konferenzbeitrag, Zeitschriftenaufsatz
2010Imaging of metal impurities in silicon by luminescence spectroscopy and synchrotron techniques
Schubert, M.C.; Schön, J.; Gundel, P.; Habenicht, H.; Kwapil, W.; Warta, W.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Micro-segregations in liquid phase sintered silicon carbide ceramics
Herrmann, M.; Neher, R.; Brandt, K.; Hoehn, S.
Zeitschriftenaufsatz
2010Review of stress effects on dopant solubility in silicon and silicon-germanium layers
Bennett, N.S.; Ahn, C.; Cowern, N.E.B.; Pichler, P.
Konferenzbeitrag
2009Modular bimorph mirrors for adaptive optics
Rodrigues, G.; Bastaits, R.; Roose, S.; Stockman, Y.; Gebhardt, S.; Schönecker, A.; Villon, P.; Preumont, A.
Zeitschriftenaufsatz
2009Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
Pastewka, L.; Salzer, R.; Graff, A.; Altmann, F.; Moseler, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2008Detailed arsenic concentration profiles at Si/SiO2 interfaces
Pei, L.; Duscher, G.; Steen, C.; Pichler, P.; Ryssel, H.; Napolitani, E.; Salvador, D. de; Piro, A.M.; Terrasi, A.; Severac, F.; Cristiano, F.; Ravichandran, K.; Gupta, N.; Windl, W.
Zeitschriftenaufsatz
2008Distribution and segregation of arsenic at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Paul, S.; Lerch, W.; Pei, L.; Duscher, G.; Severac, F.; Cristiano, F.; Windl, W.
Zeitschriftenaufsatz
2008Influence of nanoparticles surface composition on the properties of epoxide based adhesives
Hartwig, A.; Trautmann, J.; Sebald, M.
Konferenzbeitrag
2008Mechanical strength of mono- and multicrystalline wafers
Schönfelder, S.; Bohne, A.; Bagdahn, J.
Konferenzbeitrag
2008Modeling and simulation of advanced annealing processes
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W.
Aufsatz in Buch
2008Modeling of the diffusion and activation of arsenic in silicon including clustering and precipitation
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W.
Konferenzbeitrag
2008On a computationally efficient approach to boron-interstitial clustering
Schermer, J.; Martinez-Limia, A.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S.
Zeitschriftenaufsatz, Konferenzbeitrag
2008Powered by nanowires
Wehrspohn, R.B.
Zeitschriftenaufsatz
2008Process models for advanced annealing schemes and their use in device simulation
Pichler, P.; Martinez-Limia, A.; Kampen, C.; Burenkov, A.; Schermer, J.; Paul, S.; Lerch, W.; Gelpey, J.; McCoy, S.; Kheyrandish, H.; Pakfar, A.; Tavernier, C.; Bolze, D.
Konferenzbeitrag
2008Thermal emission properties of 2D and 3D silicon photonic crystals
Gesemann, B.; Schweizer, S.L.; Wehrspohn, R.B.
Konferenzbeitrag
2007Advanced activation and deactivation of arsenic-implanted ultra-shallow junctions using flash and spike + flash annealing
Lerch, W.; Paul, S.; Niess, J.; McCoy, S.; Gelpey, J.; Bolze, D.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Martinez, A.; Pichler, P.
Konferenzbeitrag
2007Characterization of the impurity profile at the SiO2/Si interface using a combination of total reflection x-ray fluorescence spectrometry and successive etching of silicon
Steen, C.; Nutsch, A.; Pichler, P.; Ryssel, H.
Zeitschriftenaufsatz
2007Characterization of the pile-up of As at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Windl, W.
Konferenzbeitrag
2007Characterization of the Segregation of Arsenic at the Interface SiO2/Si
Steen, C.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Werner, M.; Berg, J.A. van den; Windl, W.
Konferenzbeitrag
2007Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P
Beljakowa, S.; Pensl, G.; Rommel, M.
Poster
2007Diffusion and deactivation of As in Si: Combining atomistic and continuum simulation approaches
Martinez-Limia, A.; Steen, C.; Pichler, P.; Gupta, N.; Windl, W.; Paul, S.; Lerch, W.
Konferenzbeitrag
2007Experimental and theoretical results of dopant activation by a combination of spike and flash annealing
Lerch, W.; Paul, S.; Niess, J.; Chan, J.; McCoy, S.; Gelpey, J.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Bolze, D.; Pichler, P.; Martinez, A.; Mineji, A.; Shishiguchi, S.
Konferenzbeitrag
2007High voltage 3D-capacitor
Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Konferenzbeitrag
2007Modelling (100) hydrogen-induced platelets in silicon with a multi-scale molecular dynamics approach
Moras, G.; Ciacchi, L.C.; Csanyi, G.; Vita, A. de
Konferenzbeitrag, Zeitschriftenaufsatz
2007Modifizierung einheimischer Hölzer durch Imprägnierung mit überkritischem Kohlendioxid als Lösungsmittel
Danzig, J.; Jelen, E.; Deerberg, G.; Kareth, S.; Weidner, E.; Mai, C.; Ghosh, S.C.; Militz, H.
Konferenzbeitrag
2007On a computationally efficient approach to Boron-interstitial clustering
Schermer, J.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S.
Konferenzbeitrag
2006Abschlussbericht zum Vorhaben "Modifizierung von einheimischen Hölzern durch Imprägnierung mit überkritischem Kohlendioxid"
Deerberg, G.; Danzig, J.; Jelen, E.
Bericht
2006Development of functional ceramic films for nano and microsystems technology
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Mayer-Uhma, T.; Uhlig, S.
Konferenzbeitrag
2006Diffusion and activation of dopants in silicon and advanced silicon-based materials
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Uppal, S.; Karunaratne, M.S.A.; Bonar, J.M.; Willoughby, A.F.W.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S.
Zeitschriftenaufsatz
2006Efficient generation of Cherenkov-type terahertz radiation from a lithium niobate crystal with a silicon prism output coupler
Theuer, M.; Torosyan, G.; Rau, C.; Beigang, R.; Maki, K.; Otani, C.; Kawase, K.
Zeitschriftenaufsatz
2006Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E.
Zeitschriftenaufsatz
2006Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles
Murray, P.; Köhler, B.; Lipfert, S.; Kaspar, J.; Schreiber, J.
Konferenzbeitrag
2006Neuartige Methoden zur Imprägnierung von Werkstoffen und Bauteilen
Jelen, E.; Brandin, H.G.; Danzig, J.; Deerberg, G.; Kareth, S.; Kilzer, A.; Weidner, E.; Petermann, M.
Abstract
2006Numerical identification of geometric parameters from dynamic measurement of grinded membranes on wafer level
Ebert, M.; Gerbach, R.; Bagdahn, J.; Michael, S.; Hering, S.
Konferenzbeitrag
2006PZT thick films for microsystems applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A.
Konferenzbeitrag
2006A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
Knechtel, R.; Knaup, M.; Bagdahn, J.
Konferenzbeitrag, Zeitschriftenaufsatz
2005Ab initio identification of the nitrogen diffusion mechanism in silicon
Stoddard, N.; Pichler, P.; Duscher, G.; Windl, W.
Zeitschriftenaufsatz
2005Mechanical reliability of directly bonded silicon MEMS components
Bagdahn, J.; Wiemer, M.; Petzold, M.
Konferenzbeitrag
2005Preparation and characterization of multilayers for EUV applications
Foltyn, T.; Braun, S.; Friedrich, W.; Leson, A.; Menzel, M.
Konferenzbeitrag
2004Automatische Optimierung von Festphasenbildungsprozessen bei der Abscheidung von Reinstsilizium
Kümmel, R.; Blömer, J.; Hediger, F.; Laqua, R.; Bäck, T.; Emmerich, M.
Konferenzbeitrag
2004Debonding of wafer-bonded interfaces for handling and transfer applications
Bagdahn, J.; Petzold, M.
Aufsatz in Buch
2004Effect of oxygen on the diffusion of nitrogen implanted in silicon
Mannino, G.; Privitera, V.; Scalese, S.; Libertino, S.; Napolitani, E.; Pichler, P.; Cowern, N.E.B.
Zeitschriftenaufsatz
2004Electrical deactivation and diffusion of boron in preamorphized ultrashallow junctions: Interstitial transport and F co-implant control
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lerch, W.; Paul, S.; Pawlak, B.J.; Cristiano, F.; Hebras, X.; Bolze, D.; Ortiz, C.; Pichler, P.
Konferenzbeitrag
2004Intrinsic point defects, impurities, and their diffusion in silicon
Pichler, P.
Buch
2004Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing
Ortiza, C.J.; Cristiano, F.; Colombeau, B.; Claverie, A.; Cowern, N.E.B.
Konferenzbeitrag
2004On the modeling of transient diffusion and activation of boron during post-implantation annealing
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S.
Konferenzbeitrag
2004Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"
Mannino, G.; Feudel, T.; Pichler, P.; Servidori, M.
Konferenzbeitrag
2003L'Anisotropia de propagazione della frattura in silicio: Simulazione teorica mediante une nuova technica di embedding
Vita, A. de; Albaret, T.; Gumbsch, P.; Meriani, S.
Konferenzbeitrag
2003Transient-diffusion effects
Stiebel, D.; Pichler, P.
Zeitschriftenaufsatz
20022K PL topography of silicon doped VGf-GaAs wafers
Baeumler, M.; Maier, M.; Herres, N.; Bünger, T.; Stenzenberger, J.; Jantz, W.
Zeitschriftenaufsatz
2002Anomalous refraction and diffraction in discrete optical systems
Pertsch, T.; Zentgraf, T.; Peschel, U.; Bräuer, A.; Lederer, F.
Zeitschriftenaufsatz
2002Imaging and measurement of local mechanical material properties by atomic force acoustic microscopy
Rabe, U.; Amelio, S.; Kopycinska, M.; Hirsekorn, S.; Kempf, M.; Göken, M.; Arnold, W.
Zeitschriftenaufsatz
2002Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
Thielsch, R.; Gatto, A.; Kaiser, N.
Zeitschriftenaufsatz
2001Locally selective bonding of silicon and glass with laser
Wild, M.J.; Gillner, A.; Poprawe, R.
Zeitschriftenaufsatz
2001Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R.
Konferenzbeitrag
2001New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT
Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A.
Konferenzbeitrag
2001Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Konferenzbeitrag, Zeitschriftenaufsatz
2000Lifetime investigations of directly wafer-bonded samples under static and cyclic loading
Bagdahn, J.; Petzold, M.; Sommer, E.
Konferenzbeitrag
2000Strength analysis of a micromechanical acceleration sensor by fracture mechanical approaches
Bagdahn, J.; Petzold, M.; Seidel, H.
Konferenzbeitrag
1999Basic investigations on a system for measuring intraocular pressure
Schnakenberg, U.; Walter, P.; VomBögel, G.; Krüger, C.; Lüdtke Handjery, H.C.; Richter, H.A.; Specht, W.; Ruokonen, P.; Mokwa, W.
Konferenzbeitrag
1999Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H.
Konferenzbeitrag
1999Implantable microdevices
Mokwa, W.; Schnakenberg, U.
Konferenzbeitrag
1999Monolithic integration of III-V microcavity LEDs on silicon drivers using conformal epitaxy
Gerard, B.; Marcadet, X.; Etienne, P.; Pribat, D.; Friedrich, D.; Eichholz, J.; Bernt, H.; Carlin, J.-F.; Ilegems, M.
Konferenzbeitrag
1999Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.
Konferenzbeitrag
1999Simulation of the production of functional layers for vibration sensors for tool state monitoring and finite element analysis of mechanical characteristics
Thomas, J.; Kuhnhold, R.; Schnupp, R.; Temmel, G.; Ryssel, H.
Konferenzbeitrag
1999Theoretische und experimentelle Untersuchungen für eine Bemessung und serienreife Entwicklung von Ein- und Auslassventilen aus Siliziumnitrid
Sonsino, C.M.; Brandt, U.; Stoerzel, K.
Konferenzbeitrag
1998CMOS sensor systems
Hosticka, B.J.
Konferenzbeitrag
1998Gas Flow Simulation in a Rapid Thermal Processing System
Poscher, S.
Aufsatz in Buch
1998Selective infill metalorganic molecular beam epitaxy of InP:Si n+/n- layers for buried collector double heterostructure bipolar transistors
Schelhase, S.; Bottcher, J.; Gibis, R.; Harde, P.; Paraskevopoulos, A.; Kunzel, H.
Zeitschriftenaufsatz
1998A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases
Linnemann, R.; Woias, P.; Senfft, C.-D.; Ditterich, J.A.
Konferenzbeitrag
1998Variation of the wettability of DLC-coatings by network modification using silicon and oxygen
Grischke, M.; Hieke, A.; Morgenweck, F.; Dimigen, H.
Zeitschriftenaufsatz, Konferenzbeitrag
1997Characterization of vapor phase deposited organic molecules on silicon surfaces
Dieckhoff, S.; Höper, R.; Schlett, V.; Gesang, T.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V.
Zeitschriftenaufsatz
1997Electron microscopic investigation of structural changes in single crystalline silicon induced by short pulse laser drilling
Kaspar, J.; Luft, A.
Konferenzbeitrag
1997Low energy implantation and transient enhanced diffusion
Cowern, N.E.B.; Collart, E.J.H.; Politiek, J.; Bancken, P.H.L.; Berkum, J.G.M. van; Kyllesbech Larsen, K.; Stolk, P.A.; Huizing, H.G.A.; Pichler, P.; Burenkov, A.; Gravensteijn, D.J.
Konferenzbeitrag
1997MBE growth of high-quality InP for GaInAs/InP heterostructures using incongruent evaporation of GaP
Kuenzel, H.; Boettcher, J.; Harde, P.; Maessen, R.
Konferenzbeitrag, Zeitschriftenaufsatz
1997Microchannels for applications in liquid dosing and flow-rate measurement
Richter, M.; Woias, P.; Weiss, D.
Konferenzbeitrag
1997New developments of the ELYMAT technique
Eichinger, P.; Rommel, M.
Konferenzbeitrag
1996Adhesion and film structure of cyanurates on solids
Possart, W.; Dieckhoff, S.; Gesang, T.; Schlett, V.; Hennemann, O.-D.
Konferenzbeitrag
1996The analysis of surface-adsorbed organic molecules by alkali-assisted MIES combined with UPS(Hel)
Günster, J.; Ochs, D.; Dieckhoff, S.; Schlett, V.
Zeitschriftenaufsatz
1996Characterization of triazine derivatives on silicon wafers studied by photoelectron spectroscopy (XPS, UPS) and metastable impact electron spectroscopy (MIES)
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V.
Zeitschriftenaufsatz
1996Dry etching and micromachining of precision Silicon components
Kreutz, E.W.; Pfleging, W.; Jandeleit, J.; Urbasch, G.
Konferenzbeitrag
1996MOMBE selective infill growth of InP:Si and InGaAs:Si and large area MOMBE regrowth
Schelhase, S.; Boettcher, J.; Gibis, R.; Kuenzel, H.; Paraskevopoulos, A.
Konferenzbeitrag, Zeitschriftenaufsatz
1995Active silicon CMOS addressing matrices for light-valve projection displays
Molzow, W.-D.; Brinker, W.; Wirges, W.; Gerhard-Multhaupt, R.; Melcher, R.; Budde, W.; Fiedler, H.
Zeitschriftenaufsatz
1995Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin prepolymer films
Gesang, T.; Fanter, D.; Höper, R.; Possart, W.; Hennemann, O.-D.
Zeitschriftenaufsatz
1995Determination of vacancy concentration in float zone and Czochralski silicon
Jacob, M.; Pichler, P.; Ryssel, H.; Gambaro, D.; Falster, R.
Konferenzbeitrag
1995Elektronenspektroskopische Charakterisierung der Adhäsion von Triazinderivaten und Cyansäureestern auf Siliziumoberflächen
Dieckhoff, S.
Dissertation
1995Nitrogen implanted etch-stop layers in silicon
Paneva, R.; Temmel, G.; Ryssel, H.; Burte, E.P.
Konferenzbeitrag
1995Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Konferenzbeitrag
1995Platinum diffusion at low temperatures
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.
Konferenzbeitrag
1995Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
Gesang, T.; Höper, R.; Dieckhoff, S.; Hartwig, A.; Possart, W.; Hennemann, O.-D.
Zeitschriftenaufsatz
1995A Raman spectroscopic study of the Si, Be, and C incorporation in InxGa1-xAs relaxed layers
Alvarez, A.-L.; Calle, F.; Sacedon, A.; Calleja, E.; Munoz, E.; Wagner, J.; Maier, M.; Mazuelas, A.; Ploog, K.H.
Zeitschriftenaufsatz
1995Silicon incorporation in GaAs. From delta-doping to monolayer insertion
Wagner, J.; Newman, R.C.; Roberts, C.
Zeitschriftenaufsatz
1995Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L.
Konferenzbeitrag
1995Ultrasonic transducer with silicon membrane for liquid nebulization
Paneva, R.; Temmel, G.
Konferenzbeitrag
1995Ultrasonic transducer with silicon. A well known material with new applications
Paneva, R.; Temmel, G.; Ryssel, H.
Konferenzbeitrag
1995X-ray curve characterization of homo-epitaxial layers on silicon deposited after DC hydrogen cleaning
Dommann, A.; Herres, N.; Deller, H.R.; Nissen, H.U.; Krüger, D.; Pixley, R.E.; Ramm, J.
Zeitschriftenaufsatz
1995XPS studies of thin polycyanurate films on silicon wafers
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.
Zeitschriftenaufsatz
1994Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D.
Konferenzbeitrag
1994Analytical description of high energy implantation profiles of bordon and phosphorus into crystalline silicon
Gong, L.; Bogen, S.; Frey, L.; Jung, W.; Ryssel, H.
Zeitschriftenaufsatz
1994CO and CO2 thin-film SnO2 gas sensors on Si-substrates
Hoefer, U.; Kühner, G.; Schweizer, W.; Sulz, G.; Steiner, K.
Zeitschriftenaufsatz
1994Electrical and structural characteristics of thin buried oxides
Meda, L.; Bertoni, S.; Cerofolini, G.F.; Gassel, H.
Zeitschriftenaufsatz
1994Investigation of the effect of altered defect structure produced by photon assisted the diffusion of As in silicon during thermal anneallagation
Biro, L.P.; Gyulai, J.; Bogen, S.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
1994Observation of local SIMOX layers by microprobe RBS
Kinomura, A.; Horino, Y.; Mokuno, Y.; Chayahara, A.; Kiuchi, M.; Fujii, K.; Takai, M.; Lohner, T.; Ryssel, H.; Schork, R.
Zeitschriftenaufsatz
1994On modeling of ion implantation at high temperatures
Pichler, P.; Schork, R.
Zeitschriftenaufsatz
1994Proceedings of the FORWIHR Symposium on High Performance Scientific Computing
Griebel, M.; Zenger, C.
Tagungsband
1994Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Zeitschriftenaufsatz
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Konferenzbeitrag
1994Single crystal growth of Si-Ge alloy by ion implantation and sequential rapid thermal
Kal, S.; Kasko, I.; Ryssel, H.
Zeitschriftenaufsatz
1994Single-shell carbon nanotubes imaged by atomic force microscopy.
Höper, R.; Workman, R.K.; Chen, D.; Sarid, D.; Yadav, T.; Withers, J.C.; Loutfy, R.O.
Zeitschriftenaufsatz
1994SOI-Herstellung und Anwendung am Fraunhofer-Institut IMS Duisburg.
Gassel, H.
Konferenzbeitrag
1993A controllable mechanism of forming extremely low-resistance nonalloyed ohmic contacts to group III-V compound semiconductors
Stareev, G.; Kunzel, H.; Dortmann, G.
Zeitschriftenaufsatz
1993Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J.
Konferenzbeitrag
1993Effect of ion-beam mixing temperature on cobalt silicide formation
Kasko, I.; Dehm, C.; Frey, L.; Ryssel, H.
Zeitschriftenaufsatz
1993The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P.
Zeitschriftenaufsatz, Konferenzbeitrag
1993Evaluation of residual stresses in a strongly textured saw blade for the production of silicon-wafers
Hauk, V.; Derycke, Pascal; Theiner, Werner Alfred
Konferenzbeitrag
1993High energy implantation of high10 B and high11 B into -100- silicon in channel and in random
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Zeitschriftenaufsatz
1993Influence of impurities on ion beam induced TiSi2 formation
Dehm, C.; Raum, B.; Kasko, I.; Ryssel, H.
Zeitschriftenaufsatz
1993An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Konferenzbeitrag
1993A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J.
Konferenzbeitrag
1993A novel delineation technique for 2D-profiling of dopants in crystalline silicon
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Zeitschriftenaufsatz
1993Photon assisted implantation -PAI-
Biro, L.P.; Gyulai, J.; Ryssel, H.; Frey, L.; Kormany, T.; Tuan, N.M.
Zeitschriftenaufsatz
1993Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Konferenzbeitrag
1993Residual stress during local SIMOX process - Raman measurement and simulation
Seidl, A.; Takai, M.; Sayama, H.; Haramura, K.; Ryssel, H.; Schork, R.; Kato, K.
Zeitschriftenaufsatz
1993Silicon microsystems
Heuberger, A.
Konferenzbeitrag
1993Test monolithischer Sensorsysteme
Dudaicevs, H.; Gottfried-Gottfried, R.
Zeitschriftenaufsatz
1992Excited defect energy states from temperature dependent ESR.
Kisielowski, C.; Maier, K.; Schneider, J.; Oding, V.
Zeitschriftenaufsatz
1992Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W.
Zeitschriftenaufsatz
1992Gold and platinum diffusion. The key to the understanding of intrinsic point defect behaviour in silicon
Zimmermann, H.; Ryssel, H.
Zeitschriftenaufsatz
1992An investigation of vacancy concentrations in bulk silicon
Zimmermann, H.; Ryssel, H.
Konferenzbeitrag
1992Shallow p-n junctions produced by laser doping with boron silicate glass
Bollmann, D.; Buchner, R.; Haberger, K.; Neumayer, G.
Konferenzbeitrag
1992Silicon technologies for sensor fabrication
Mokwa, W.
Aufsatz in Buch
1991Controlled nucleation - a new approach to improve the crystallinity of RAFT-foils
Reis, I.; Hurrle, A.; Helmreich, D.; Beck, A.; Räuber, A.
Konferenzbeitrag
1991In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K.
Konferenzbeitrag
1991MBE growth and electrical behavior of single and double Si delta-doped InGaAs-layers
Passenberg, W.; Bach, H.G.; Bottcher, J.
Konferenzbeitrag
1991MBE overgrowth of implanted regions in InP:Fe substrates
Kunzel, H.; Gibis, R.; Schlaak, W.; Su, L.M.; Grote, N.
Konferenzbeitrag, Zeitschriftenaufsatz
1991Metallization of integrated circuits by laser evaporation of metal sandwich layers
Bollmann, D.; Haberger, K.; Pielmeier, R.
Konferenzbeitrag
1991Molecular beam epitaxy grown Al(Ga)InAs: Schottky contacts and deep levels
Schramm, C.; Bach, H.G.; Kunzel, H.; Praseuth, J.P.
Zeitschriftenaufsatz
1991Shallow p-n junctions produced by laser doping with Boron and Phosphorus Silicate glass
Bollmann, D.; Stock, G.; Neumayer, G.; Haberger, K.
Konferenzbeitrag
1991Thickness inhomogeneity during silicon X-ray mask membrane fabrication: generation and prevention
Löchel, B.; Macioßek, A.; Huber, H.-L.; König, M.
Konferenzbeitrag
1991Überblick und Haupttrends im Bereich Halbleitermaterialien und -technologien
Kersten, G.
Buch
1990Laser evaporation of metal sandwich layers for improved IC metallization
Bollmann, D.; Haberger, K.; Pielmeier, R.
Zeitschriftenaufsatz
1990Silicon micromachining for microsensors and microactuators
Benecke, W.
Konferenzbeitrag
1990Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K.
Konferenzbeitrag
1990Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K.
Konferenzbeitrag
1989Phase diversity transmission experiments employing novel optical and electronic components
Langenhorst, R.; Wenke, G.; Fluge, M.; Pieper, W.; Weber, H.G.
Konferenzbeitrag
1989State of the art of pattern placement accuracy of silicon X-ray master masks
Pongratz, S.; Mescheder, U.; Ehrlich, C.; Huber, H.-L.; Kohlmann, K.; Windbracke, W.
Konferenzbeitrag
1989Wideband bipolar multiplier IC with high dynamic range for use in coherent optical receivers
Fluge, M.; Frederiksen, P.T.; Enning, B.; Walf, G.; Weber, H.G.; Rein, H.M.
Zeitschriftenaufsatz
1988Wafer slicing by internal diameter sawing
Steffens, K.; König, W.; Struth, W.
Konferenzbeitrag