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| 2021 | Improved mounting of strain sensors by reactive bonding
Schumacher, Axel; Shah, Vraj; Steckemetz, Stefan; Dietrich, Georg; Pflug, Erik; Hehn, Thorsten; Knappmann, Stephan; Dehe, Alfons; Leson, Andreas | Zeitschriftenaufsatz |
| 2019 | Direct Growth of GaInP/GaAs/Si Triple-Junction Solar Cell with 22.3% AM1.5g efficiency
Feifel, Markus; Lackner, David; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Dimroth, Frank | Zeitschriftenaufsatz |
| 2019 | Process and design optimization of SiC MOSFET for low on-state resistance
Sledziewski, Tomasz; Erlbacher, Tobias; Bauer, Anton | Vortrag |
| 2018 | Confined electron and hole states in semiconducting carbon nanotube sub-10 nm artificial quantum dots
Buchs, G.; Bercioux, D.; Mayrhofer, L.; Gröning, O. | Zeitschriftenaufsatz |
| 2018 | Extrusion foaming of thermoplastic cellulose acetate sheets with HFO-1234ze and co-blowing agents
Hendriks, Sven; Hopmann, Christian H.; Zepnik, Stefan | Zeitschriftenaufsatz |
| 2018 | High-speed quantum efficiency determination of multijunction solar cells
Missbach, T.; Dengler, S.A.; Siefer, G.; Bett, A.W. | Zeitschriftenaufsatz |
| 2018 | OLED-on-silicon microdisplays: Technology, devices, applications
Vogel, Uwe; Wartenberg, Philipp; Richter, Bernd; Brenner, Stephan; Fehse, Karsten; Schober, Matthias | Konferenzbeitrag |
| 2018 | Selective silver sintering of semiconductor dies on PCB
Dresel, Fabian; Letz, Sebastian; Zischler, Sigrid; Schletz, Andreas; Novak, Michael | Konferenzbeitrag |
| 2017 | High-speed broadband quantum efficiency determination of solar cells
Missbach, T.; Straub, R.S.L.; Benkhoff, T.M.; Siefer, G. | Zeitschriftenaufsatz |
| 2017 | Multi-segment photovoltaic laser power converters and their electrical losses
Kimovec, R.; Helmers, H.; Bett, A.W.; Topic, M. | Konferenzbeitrag |
| 2016 | Drill-down analysis with equipment health monitoring
Krauel, Christopher; Weishäupl, Laura; Pfeffer, Markus | Vortrag |
| 2016 | Inhomogeneous growth of micrometer thick plasma polymerized films
Akhavan, Behnam; Menges, Bernhard; Förch, Renate | Zeitschriftenaufsatz |
| 2015 | Energy level of the Si-related DX-center in (AlyGa1-y)1-xInxAs
Heckelmann, S.; Lackner, D.; Bett, A.W. | Zeitschriftenaufsatz |
| 2015 | Enhanced pressure response in ZnO nanorods due to spontaneous polarization charge
Seifikar, M.; O'Reilly, E.P.; Christian, B.; Lebedev, V.; Volk, J.; Erdélyi, R.; Lukács, I.E.; Dauksevicious, R.; Gaidys, R. | Konferenzbeitrag |
| 2015 | Imaging defect luminescence measurements of 4H-SiC by UV-PL
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael | Vortrag |
| 2015 | Imaging defect luminescence of 4H-SiC by UV-photoluminescence
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen; Oppel, Steffen; Schneider, Adrian; Schütz, Michael | Vortrag |
| 2015 | Impact of Photon Recycling and Luminescence Coupling in III-V Photovoltaic Devices
Walker, A.; Höhn, O.; Micha, D.; Wagner, L.; Helmers, H.; Dimroth, F.; Bett, A. | Konferenzbeitrag |
| 2015 | Influence of growth temperature on the defect density for 4H-SiC homoepitaxy
Kaminzky, Daniel; Roßhirt, Katharina; Kallinger, Birgit; Berwian, Patrick; Friedrich, Jochen | Poster |
| 2014 | Focus on quantum efficiency. Editorial
Buchleitner, A.; Burghardt, I.; Cheng, Y.C.; Scholes, G.D.; Schwarz, U.T.; Weber-Bargioni, A.; Wellens, T. | Editorial |
| 2013 | Breve introdução à Tecnologia de Salas Limpas: Enfrentando os desafios futuros
Gommel, Udo; Kreck, Guido | Zeitschriftenaufsatz |
| 2013 | Opposites attract: An approach to collaborative supply chain management between semiconductor and automotive companies
Aelker, Judith; Meister, Verena; Forster, Christoph; Zapp, Matthias; Bauernhansl, Thomas | Zeitschriftenaufsatz |
| 2012 | Future Demands and Challenges for Cleanroom Technology
Gommel, Udo | Vortrag |
| 2012 | Im Spannungsfeld der Absatzmärkte
Forster, Christoph; Zapp, Matthias | Zeitschriftenaufsatz |
| 2012 | A short introduction to cleanliness technology: Meeting the future challenges
Gommel, Udo; Kreck, Guido | Konferenzbeitrag |
| 2012 | Traceable measurements of electrical conductivity and Seebeck coefficient of β-Fe0.95Co0.05Si2 and Ge in the temperature range from 300 K to 850 K
Lenz, E.; Haupt, S.; Edler, F.; Ziolkowski, P.; Pernau, H.-F. | Zeitschriftenaufsatz |
| 2011 | (Bi,Sb)2Te3-PbTe chalcogenide alloys: Impact of the cooling rate and sintering parameters on the microstructures and thermoelectric performances
Jacquot, A.; Thomas, J.; Schumann, J.; Jägle, M.; Böttner, H.; Gemming, T.; Schmidt, J.; Ebling, D. | Zeitschriftenaufsatz |
| 2011 | A more reliable supply of semiconductor components
Forster, Christoph; Zapp, Matthias | Zeitschriftenaufsatz |
| 2011 | Reduzierung von Beschaffungsrisiken bei Halbleiterbauteilen
Zapp, Matthias; Forster, Christoph | Zeitschriftenaufsatz |
| 2010 | Analysis of polar GaN surfaces with photoelectron and high resolution electron energy loss spectroscopy
Lorenz, P.; Haensel, T.; Gutt, R.; Koch, R.J.; Schaefer, J.A.; Krischok, S. | Zeitschriftenaufsatz |
| 2009 | Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M. | Zeitschriftenaufsatz |
| 2008 | Optically pumped GaSb-based VECSELs
Schulz, N.; Rattunde, M.; Rösener, B.; Manz, C.; Köhler, K.; Wagner, J. | Konferenzbeitrag |
| 2008 | Werkstofftrends: Thermoelektrika
Reschke, S.; Grüne, M.; Kohlhoff, J. | Zeitschriftenaufsatz |
| 2007 | Barrier- and in-well pumped GaSb-based 2.3 µm VECSELs
Wagner, J.; Schulz, N.; Rattunde, M.; Ritzenthaler, C.; Manz, C.; Wild, C.; Köhler, K. | Zeitschriftenaufsatz |
| 2007 | High-speed asynchronous optical sampling for high-sensitivity detection of coherent phonons
Dekorsy, T.; Taubert, R.; Hudert, F.; Schrenk, G.; Bartels, A.; Cerna, R.; Kotaidis, A.; Plech, A.; Köhler, K.; Schmitz, J.; Wagner, J. | Konferenzbeitrag |
| 2007 | InGaAs/AlAsSb quantum cascade detectors operating in the near infrared
Giorgetta, F.R.; Baumann, E.; Hofstetter, D.; Manz, C.; Yang, Q.K.; Köhler, K.; Graf, M. | Zeitschriftenaufsatz |
| 2006 | Neue Halbleiter
Ruhlig, K. | Zeitschriftenaufsatz |
| 2006 | Tool supported capability management for semiconductor high volume equipment integration
Erdmann, B.; Dreiss, P. | Konferenzbeitrag |
| 2005 | Current gaps in production planning frameworks for real-time semiconductor enterprises
Fricke, P.; Fischmann, C.; Seidelmann, J. | Konferenzbeitrag |
| 2005 | Grid system for solving computing bottlenecks in semiconductor industries at the example of an AMHS
Knoll, G.; Wesemann, M.; Sturm, R. | Konferenzbeitrag |
| 2005 | High-power high-brightness tapered diode lasers and amplifiers
Kelemen, M.T.; Weber, J.; Mikulla, M.; Weimann, G. | Konferenzbeitrag |
| 2005 | Requirements engineering für die Automatisierung
Reddig, K. | Konferenzbeitrag |
| 2005 | Tutorial: The new specification template and procedures for writing SEMI information and control standards
Bricker, D.; Carrubba, M.; Crandell, B.; Dreiss, P.; Ghiselli, J.; Muckenhirn, R.; Rist, L.; Walsh, D. | Konferenzbeitrag |
| 2004 | Architecture of a flexible scheduling component
Wiechers, O.; Zehtaban, M. | Konferenzbeitrag |
| 2004 | Authorization and authentification standard (overview and status)
Dreiss, P.; Bichlmeier, J. | Konferenzbeitrag |
| 2004 | Design of the core scheduling component for a flexible scheduling tool
Zehtaban, M.; Seidelmann, J.; Wiechers, O. | Konferenzbeitrag |
| 2004 | Diagnostic data acquisition (DDA) data collection management standards (overview and status)
Dreiss, P.; Willmann, R. | Konferenzbeitrag |
| 2004 | EDA demonstration
Dreiss, P.; Kender, E. | Konferenzbeitrag |
| 2004 | FabSCORE
Janssen, D.; Peissner, M.; Schlegel, T.; Schuntermann, J. | Konferenzbeitrag |
| 2004 | High-power, high-brightness GaInSb/AlGaAsSb quantum-well diode-lasers emitting at 1.9µm
Pfahler, C.; Manz, C.; Kaufel, G.; Kelemen, M.T.; Mikulla, M.; Wagner, J. | Konferenzbeitrag |
| 2004 | Influence of Mg doping profile on the electroluminescence properties of GaInN multiple quantum well light emitting diodes
Stephan, T.; Köhler, K.; Maier, M.; Kunzer, M.; Schlotter, P.; Wagner, J. | Konferenzbeitrag |
| 2004 | Infrared semiconductor lasers for sensing and diagnostics
Wagner, J.; Mann, C.; Rattunde, M.; Weimann, G. | Zeitschriftenaufsatz |
| 2004 | Linearisation issues in microwave amplifiers
O'Droma, M.S.; Portilla, J.; Bertran, E.; Donati, S.; Brazil, T.J.; Rupp, M.; Quay, R. | Konferenzbeitrag |
| 2004 | Lot release planning for customer oriented manufacturing
Löffler, B. | Konferenzbeitrag |
| 2004 | Using simulation as test tool in semiconductor industries
Wiechers, O.; Zehtaban, M.; Seidelmann, J. | Konferenzbeitrag |
| 2003 | High-brightness 1040 nm tapered diode laser
Kelemen, M.T.; Weber, J.; Rinner, F.; Rogg, J.; Mikulla, M.; Weimann, G. | Konferenzbeitrag |
| 2002 | 2K PL topography of silicon doped VGf-GaAs wafers
Baeumler, M.; Maier, M.; Herres, N.; Bünger, T.; Stenzenberger, J.; Jantz, W. | Zeitschriftenaufsatz |
| 2002 | Beam quality and linewidth enhancement factor of ridge-waveguide tapered diode lasers
Kelemen, M.T.; Weber, J.; Rogg, J.; Rinner, F.; Mikulla, M.; Weimann, G. | Konferenzbeitrag |
| 2002 | High-power high-brightness ridge-waveguide tapered diode lasers at 940 nm
Kelemen, M.T.; Rinner, F.; Rogg, J.; Wiedmann, N.; Kiefer, R.; Walther, M.; Mikulla, M.; Weimann, G. | Konferenzbeitrag |
| 2002 | Nanoscopic measurements of surface recombination velocity and diffusion length in a semiconductor quantum well
Malyarchuk, V.; Tomm, J.; Lienau, C.; Rinner, F.; Baeumler, M. | Zeitschriftenaufsatz |
| 2002 | Near-diffraction-limited high power diode laser tunable from 895 to 960 nm
Kelemen, M.T.; Rinner, F.; Rogg, J.; Kiefer, R.; Mikulla, M.; Weimann, G. | Konferenzbeitrag |
| 2001 | Organic Contamination Workshop 2001. Proceedings
Pfitzner, L.; Bügler, J.; Frickinger, J. | Tagungsband |
| 2001 | Werkstofftrends: Halbleitermaterialien
Kretschmer, T.; Reschke, S.; Kohlhoff, J. | Zeitschriftenaufsatz |
| 2000 | Deposition and characterization of nanocrystalline diamond films prepared by ion bombardement-assisted method
Gu, C.Z.; Jiang, X. | Zeitschriftenaufsatz |
| 2000 | Grundlagen der Reinraumtechnik und Personalverhalten - Trends in der reinen Produktion
Gaugel, T. | Konferenzbeitrag |
| 2000 | Medien in der Reinstproduktion - Reinstflüssigkeiten
Ernst, C.; Matuscheck, P. | Konferenzbeitrag |
| 1999 | Chemically-assisted ion-beam etching of (AlGa)As/GaAs. Lattice damage and removal by in-situ Cl2 treatment
Daleiden, J.; Kiefer, R.; Klußmann, S.; Kunzer, M.; Manz, C.; Walther, M.; Braunstein, J.; Weimann, G. | Zeitschriftenaufsatz |
| 1999 | Grundlagen der Reinraumtechnik und Personalverhalten - Trends in der reinen Produktion
Gaugel, T. | Konferenzbeitrag |
| 1999 | The Quality Chain for (U)HP Media and Joint Media in its Meaning
Dorner, J.; Matuscheck, P.; Ernst, C. | Konferenzbeitrag |
| 1999 | A View to the Future - A Modular Simulation Kit for Cost-Efficient Fab-Wide Planning and the Simulation of Automated Material Handling Systems in the Semiconductor Industry
Bader, U.; Besler, A.; Schließer, J.; Dorner, J. | Konferenzbeitrag |
| 1999 | X-ray Reflectivity Investigation of Thin P-Type Porous Silicon Layers
Buttard, D.; Dolino, G.; Bellet, D.; Baumbach, T.; Rieutord, F. | Zeitschriftenaufsatz |
| 1998 | Coupled simulation of gas flow and heat transfer in an RTP-system with rotating wafer
Poscher, S.; Theiler, T. | Zeitschriftenaufsatz |
| 1998 | Grundlagen der Reinraumtechnik und Personalverhalten - Trends in der reinen Produktion
Gommel, U. | Konferenzbeitrag |
| 1997 | Grundlagen der Reinraumtechnik und Personalverhalten - Trends in der reinen Produktion
Gommel, U. | Konferenzbeitrag |
| 1997 | A new approach for semiconductor models basing on SPICE model equations
Leitner, T. | Konferenzbeitrag |
| 1997 | Progress in the layer thickness determination of AlGaAs/GaAs heterostructures using selective etching and AFM imaging of the (110) cleavage planes
Müller, S.; Weyher, J.L.; Dian, R.; Jantz, W. | Zeitschriftenaufsatz |
| 1996 | Dickschicht-Feuchtesensor auf der Basis halbleitenden MnWO4-Metalloxids. Teil 1. Aufbau und Charakterisierung des Feuchtesensors
Qu, W.; Meyer, J.-U.; Haeusler, A. | Zeitschriftenaufsatz |
| 1995 | Analysis of contamination - a must for ultraclean technology
Ryssel, H.; Streckfuß, N.; Aderhold, W.; Berger, R.; Falter, T.; Frey, L. | Konferenzbeitrag |
| 1995 | Electric-field effects on above-barrier states in GaAs/Al(x)Ga(1-x)As superlattice
Nakayama, M.; Ando, M.; Tanaka, I.; Nishimura, H.; Schneider, H.; Fujiwara, K. | Zeitschriftenaufsatz |
| 1995 | On the role of interface properties in the degradation of metalorganic vapor phase epitaxially grown Fe profiles in InP
Roehle, H.; Schroeter-Janssen, H.; Harde, P.; Franke, D. | Zeitschriftenaufsatz |
| 1995 | Synthese von -FeSi2-Schichten durch PLD
Panzner, M.; Mai, H.; Schöneich, B.; Witke, T.; Lenk, A.; Selle, B.; Lange, H.; Henrion, W.; Grötzschel, R.; Theresiak, A. | Konferenzbeitrag |
| 1994 | Applications of single-beam photothermal analysis
Schork, R.; Krügel, S.; Schneider, C.; Pfitzner, L.; Ryssel, H. | Zeitschriftenaufsatz |
| 1994 | Assessment of clustering induced internal strain in AlInAs on InP grown by molecular beam epitaxy
Hase, A.; Kunzel, H.; Zahn, D.R.T.; Richter, W. | Zeitschriftenaufsatz |
| 1994 | Determination of band-edge offset by weak field hall measurement on MBE PbSe/PbEuSe multi-quantum well structures on KCl
Shi, Z.; Lambrecht, A.; Tacke, M. | Zeitschriftenaufsatz |
| 1994 | Luminescence of a quantum-confined dense electron-hole plasma from PbSe nanostructures
Herrmann, K.H.; Tomm, J.W.; Haertel, S.; Hoerstel, W.; Möllmann, K.-P.; Heimbrodt, W.; Tacke, M.; Böttner, H. | Zeitschriftenaufsatz |
| 1994 | Neue Keramische Werkstoffe
Krell, A.; Pippel, E.; Reetz, T.; Sorge, G.; Woltersdorf, J.
: Michalowsky, L.; Herrmann, M. | Buch |
| 1994 | Nuclear microprobe application to semiconductor process development - silicide formation and multi-layered structure
Takai, M.; Katayama, Y.; Lohner, T.; Kinomura, A.; Ryssel, H.; Tsien, P.H.; Satou, M.; Chayahara, A.; Burte, E.P. | Zeitschriftenaufsatz |
| 1994 | Practical aspects of ion beam analysis of semiconductor structures
Frey, L.; Pichler, P.; Kasko, I.; Thies, I.; Lipp, S.; Streckfuß, N.; Gong, L. | Zeitschriftenaufsatz |
| 1994 | Valence band hybridizing in europium-alloyed lead selenide
Tomm, J.W.; Möllmann, K.-P.; Peuker, F.; Herrmann, K.H.; Böttner, H.; Tacke, M. | Zeitschriftenaufsatz |
| 1993 | The electrical characteristics of Pb1-xEuxSe homojunctions.
Xu, J.; Halford, B.; Tacke, M. | Zeitschriftenaufsatz |
| 1993 | Low-temperature MBE of AlGaInAs lattice-matched to InP
Künzel, H.; Böttcher, J.; Gibis, R.; Hoenow, H.; Heedt, C. | Zeitschriftenaufsatz |
| 1993 | MBE growth and properties of high quality Al(Ga)InAs/GaInAs MQW structures
Kunzel, H.; Bottcher, J.; Hase, A.; Shramm, C. | Zeitschriftenaufsatz |
| 1993 | Monolithic integrated wavelength duplexer-receiver on InP
Bornholdt, C.; Trommer, D.; Unterborsch, G.; Bach, H.-G.; Venghaus, H.; Weinert, C.M. | Zeitschriftenaufsatz |
| 1993 | Optisches Prozessieren
Eyer, A.; Räuber, A. | Konferenzbeitrag |
| 1992 | Chemical transport reactions during crystal growth of PbTe and PbSe via vapour phase influenced by AgI.
Stöber, D.; Hildmann, B.O.; Böttner, H.; Schelb, S.; Binnewies, M.; Bachem, K.H. | Zeitschriftenaufsatz |
| 1992 | Gold and platinum diffusion. The key to the understanding of intrinsic point defect behaviour in silicon
Zimmermann, H.; Ryssel, H. | Zeitschriftenaufsatz |
| 1992 | Information processing in semiconductor manufacturing
| Tagungsband |
| 1992 | Laser induced sputtering of insulators
Panzner, M.; Pompe, W.; Schöneich, B.; Völlmar, S. | Zeitschriftenaufsatz |
| 1992 | Shallow p-n junctions produced by laser doping with boron silicate glass
Bollmann, D.; Buchner, R.; Haberger, K.; Neumayer, G. | Konferenzbeitrag |
| 1992 | Some band structure related optical and photoelectrical properties of Pb1-xEuxSe 0 < x < 0.2
Herrmann, K.H.; Möllmann, K.-P.; Tomm, J.W.; Böttner, H.; Lambrecht, A.; Tacke, M. | Zeitschriftenaufsatz |
| 1992 | Temperature dependence of RoA product for PbSe photodiodes fabricated by MBE and diffusion.
Tacke, M.; Xu, J. | Zeitschriftenaufsatz |
| 1992 | Ultrafast dephasing in GaAs and GaAs/AlGaAs quantum wells
Leo, K.; Haring Bolivar, P.; Maidorn, G.; Kurz, H.; Köhler, K. | Konferenzbeitrag |
| 1992 | Ultrafast electron dynamics at semiconductor surfaces and interfaces studied with subpicosecond laser photoemission.
Haight, R.; Baeumler, M.; Silberman, J.A.; Kirchner, P.D. | Zeitschriftenaufsatz |
| 1991 | Application of localized Zn diffusion across heterointerfaces for the realization of a compact high-speed bipolar driver circuit on InGaAsP/InP
Weber, R.; Paraskevopoulos, A.; Schroeter-Janssen, H.; Bach, H.G. | Zeitschriftenaufsatz |
| 1991 | Hohes Automatisierungspotential in der Chip-Produktion. Kommunikation als Schwachstelle, Fertigungszellen sollen Automatisierungsgrad im Reinraum erhöhen
Schäfer, W.; Wohnhas, S. | Zeitschriftenaufsatz |
| 1991 | In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K. | Konferenzbeitrag |
| 1991 | An integrated laser driver circuit based on implanted collector InGaAs/InAlAs HBTs
Su, L.M.; Kunzel, H.; Bach, H.G.; Schlaak, W.; Grote, N. | Konferenzbeitrag |
| 1991 | Ist deutsches Halbleiterfertigungsequipment noch konkurrenzfähig
Frühauf, W. | Zeitschriftenaufsatz |
| 1991 | Metallization of integrated circuits by laser evaporation of metal sandwich layers
Bollmann, D.; Haberger, K.; Pielmeier, R. | Konferenzbeitrag |
| 1991 | Partikelmessungen in Gasen
Dorner, J.; Müller, B. | Konferenzbeitrag |
| 1991 | Polarisation diversity waveguide network integrated on InP for a coherent optical receiver front-end
Heidrich, H.; Hamacher, M.; Albrecht, P.; Engel, H.; Hoffmann, D.; Imhof, D.; Nolting, H.-P.; Reier, F.; Weinert, C.M. | Konferenzbeitrag |
| 1991 | Raman characterization of semiconducting materials and related structures.
Prevot, B.; Wagner, J. | Zeitschriftenaufsatz |
| 1991 | Shallow p-n junctions produced by laser doping with Boron and Phosphorus Silicate glass
Bollmann, D.; Stock, G.; Neumayer, G.; Haberger, K. | Konferenzbeitrag |
| 1990 | Den Gigachip im Visier
Dorner, J.; Geißinger, J. | Zeitschriftenaufsatz |
| 1990 | Doping and diffusion behaviour of Fe in MOVPE grown InP layers
Franke, D.; Harde, P.; Wolfram, P.; Grote, N. | Zeitschriftenaufsatz |
| 1990 | Economical feasibility study of local cleanrooms as an alternative for conventional cleanrooms in semiconductor manufacturing
Kahlden, T. von | Konferenzbeitrag |
| 1990 | In situ etching depth monitoring for reactive ion etching of InGaAs(P)/InP heterostructures by ellipsometry
Muller, R. | Zeitschriftenaufsatz |
| 1990 | Incorporation behaviour of manganese in MBE grown Ga0.47In0.53As
Kunzel, H.; Bochnia, R.; Gibis, R.; Harde, P.; Passenberg, W. | Zeitschriftenaufsatz |
| 1990 | Influence of the BaF2 substrate preparation on the structural perfection of epitaxially grown IV-VI compounds.
Clemens, H.; Voiticek, A.; Holzinger, A.; Bauer, G. | Zeitschriftenaufsatz |
| 1990 | Laser evaporation of metal sandwich layers for improved IC metallization
Bollmann, D.; Haberger, K.; Pielmeier, R. | Zeitschriftenaufsatz |
| 1990 | Leitsysteme für die Halbleiterfertigung. Praxisnahe Forschungsförderung am IPA
Sauter, K.-D. | Zeitschriftenaufsatz |
| 1990 | A luminescence study in the Pb(1-x)Eu(x)Se system
Böttner, H.; Herrmann, K.H.; Lambrecht, A.; Tacke, M.; Tomm, J.W. | Zeitschriftenaufsatz |
| 1990 | New manufacturing concepts for the production of integrated circuits
Warnecke, H.-J.; Frühauf, W.; Schmutz, W. | Konferenzbeitrag |
| 1990 | Nondestructive thickness mapping of epitaxial InGaAsP/InP layers
Sartorius, B.; Brandstattner, M. | Konferenzbeitrag |
| 1990 | Optimization of extremely highly p-doped In0.53Ga0.47As:Be contact layers grown by MBE
Passenberg, W.; Harde, P.; Kunzel, H.; Trommer, D. | Konferenzbeitrag |
| 1990 | Strong asymmetry of non-resonant optical four-wave mixing in PbSe and PbSnSe
Dorbath, K.; Häfele, H.G.; Tacke, M. | Zeitschriftenaufsatz |
| 1990 | Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K. | Konferenzbeitrag |
| 1990 | Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K. | Zeitschriftenaufsatz |
| 1990 | Untersuchungen über Regelparameter in einer Lithographiezelle
Pfitzner, L.; Ryssel, H.; Temmel, G.; Zielonka, G. | Konferenzbeitrag |
| 1989 | Endpoint detection for CH4/H2 reactive ion etching of InGaAsP heterostructures by mass spectrometry
Schmid, H.; Fidorra, F.; Grutzmacher, D. | Konferenzbeitrag |
| 1989 | Entwicklung von Prozessmodulen und in-situ-Meßmethoden für ein Flexibles Fotolithografisches Prozeßzentrum
Temmel, G.; Zielonka, G.; Olbrich, H.; Mann, R.; Pfitzner, L.; Ryssel, H. | Konferenzbeitrag |
| 1989 | Origin and penetration depth of thermal degradation in InP
Sartorius, B.; Pfanner, K. | Zeitschriftenaufsatz |
| 1988 | Partikelfrei handeln - Handhabungssysteme in reinen Räumen
Seitz, D.; Geissinger, J. | Zeitschriftenaufsatz |
| 1987 | Dielectrics for passivation of planar InP/InGaAs diodes
Unterborsch, G.; Bach, H.G.; Schmitt, F.; Schmidt, R.; Schlaak, W. | Zeitschriftenaufsatz |
| 1987 | Plasma mass spectrometric analysis and control of reactive ion etching of InP and related compounds
Schmid, H. | Konferenzbeitrag |
| 1987 | Self-aligned low-loss totally reflecting waveguide mirrors in InGaAsP/InP
Niggebrugge, U.; Albrecht, P.; Doldissen, W.; Nolting, H.-P.; Schmid, H. | Konferenzbeitrag |
| 1986 | Electro-optic modulators in GaInAsP/InP
Krauser, J.; Albrecht, P.; Bornholdt, C.; Doldissen, W.; Niggebrugge, U.; Nolting, H.-P.; Schlak, M. | Konferenzbeitrag |
| 1986 | A novel process for reactive ion etching on InP, using CH4/H2
Niggebrugge, U.; Klug, M.; Garus, G. | Konferenzbeitrag |
| 1986 | Reactive ion beam etching of InP with N2 and N2/O2 mixtures
Katzschner, W.; Niggebrügge, U.; Löffler, R.; Schroeter-Janssen, H. | Zeitschriftenaufsatz |
| 1985 | A novel npn InGaAs bipolar transistor with a wide gap cadmium oxide (CdO) emitter
Su, L.M.; Grote, N.; Bach, H.G.; Doldissen, W.; Rosenzweig, M. | Konferenzbeitrag |
| 1984 | Ion beam milling of InP with an Ar/O2-gas mixture
Katzchner, W.; Steckenborn, A.; Löffler, R.; Grote, N. | Zeitschriftenaufsatz |