Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Konferenzbeitrag
1997Progress in the layer thickness determination of AlGaAs/GaAs heterostructures using selective etching and AFM imaging of the (110) cleavage planes
Müller, S.; Weyher, J.L.; Dian, R.; Jantz, W.
Zeitschriftenaufsatz
1996Combination of selective etching and AFM imaging for the thickness analysis of AlGaAs/GaAs heterostructures
Müller, S.; Weyer, J.L.; Köhler, K.; Jantz, W.; Frigeri, C.
Konferenzbeitrag