Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Scatterometry and diffractometry techniques to monitor surfaces textured by rapid ultra-short pulse laser
Alleaume, Clovis; Alamri, Sabri; Kunze, Tim; Ziegler, Johannes; Wilson, Andy; Bola, Rita
Zeitschriftenaufsatz
2004Effective-medium model for fast evaluation of scatterometric measurements on gratings
Weidner, A.; Slodowski, M.; Halm, C.; Schneider, C.; Pfitzner, L.
Konferenzbeitrag
2002Phi-scatterometry for integrated linewidth and process control in DRAM manufacturing
Hettwer, A.; Benesch, N.; Schneider, C.; Pfitzner, L.; Ryssel, H.
Zeitschriftenaufsatz