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| 2018 | Influence of cutting edge micro-geometry in micro-milling of copper alloys with reduced lead content
Uhlmann, Eckart; Kuche, Yves; Polte, Julian; Polte, Mitchel | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2018 | Scattering-loss reduction of ridge waveguides by sidewall polishing
Wolf, Richard; Breunig, Ingo; Zappe, Hans; Buse, Karsten | Zeitschriftenaufsatz |
| 2015 | Optical micro-metrology of structured surfaces micro-machined by jet-ECM
Quaglotti, Danilo; Tosello, Guido; Islam Aminul M.; Hansen Hans N.; Zeidler, Henning; Martin, Andre; Schubert, Andreas; Brandao, Carla; Riemer, Oltmann | Konferenzbeitrag |
| 2015 | Porous silicon reorganization: Influence on the structure, surface roughness and strain
Milenkovic, N.; Drießen, M.; Weiss, C.; Janz, S. | Zeitschriftenaufsatz |
| 2014 | In situ and ex situ characterization of optical surfaces by light scattering techniques
Trost, Marcus; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Beier, Matthias; Risse, Stefan; Tünnermann, Andreas; Böwering, Norbert | Zeitschriftenaufsatz |
| 2014 | Light scattering characterization of optical components – BRDF, BTDF and scatter losses
Schröder, Sven; Finck, Alexander von; Katsir, Dina; Zeitner, Uwe; Duparré, Angela | Konferenzbeitrag |
| 2013 | Angle and wavelength resolved light scattering measurement of optical surfaces and thin films
Schröder, Sven; Unglaub, David; Fink, Alexander von; Hauptvogel, Matthias; Trost, Marcus; Herffurth, Tobias; Duparré, Angela; Stover, John | Konferenzbeitrag |
| 2013 | Light scattering of interference coatings from the IR to the EUV spectral regions
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Finck, Alexander von; Duparré, Angela | Zeitschriftenaufsatz |
| 2013 | Roughness, optical and wetting properties of nanostructured thin films
Schröder, Sven; Coriand, Luisa; Duparré, Angela | Konferenzbeitrag |
| 2013 | Using light scattering to investigate damage-relevant imperfections of surfaces, coatings, and bulk materials
Schröder, Sven; Trost, Marcus; Herffurth, Tobias; Duparré, Angela | Konferenzbeitrag |
| 2012 | Light scattering to detect imperfections relevant for laser-induced damage
Herffurth, Tobias; Schröder, Sven; Trost, Marcus; Duparré, Angela | Konferenzbeitrag |
| 2012 | Optical performance of LPP multilayer collector mirrors
Feigl, Torsten; Perske, Marco; Pauer, Hagen; Fiedler, Tobias; Yulin, Sergiy; Trost, Marcus; Schroeder, Sven; Duparré, Angela; Kaiser, Norbert; Tünnermann, Andreas; Böwering, Norbert; Ershov, Alex; Hoffmann, Kay; La Fontaine, Bruno; Cummings, Kevin D. | Konferenzbeitrag |
| 2012 | Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas | Konferenzbeitrag |
| 2011 | Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E. | Konferenzbeitrag |
| 2011 | Impact of surface roughness on scatter losses and the scattering distribution of surfaces and thin film coatings
Schröder, S.; Herffurth, T.; Duparre, A. | Konferenzbeitrag |
| 2011 | Machine integrated optical measurement of honed surfaces in presence of cooling lubricant
Schmitt, Robert; König, Niels; Zheng, Hanqing | Konferenzbeitrag, Zeitschriftenaufsatz |
| 2011 | Roughness characterization of large EUV mirror optics by laser light scattering
Trost, M.; Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Konferenzbeitrag |
| 2010 | Cost-efficient metal-ceramic composites - novel foam-preforms, casting processes and characterisation
Standke, G.; Müller, T.; Neubrand, A.; Weise, J.; Göpfert, M. | Zeitschriftenaufsatz |
| 2009 | Ultra-hydrophobicity through stochastic surface roughness
Flemming, M.; Coriand, L.; Duparre, A. | Aufsatz in Buch |
| 2008 | Anwendungsnahe Charakterisierung von ta-C-Schichten
Makowski, S. | Diplomarbeit |
| 2008 | Eigenschaftsanalyse kaltgewalzter Hochverzahnungen
Hellfritzsch, U.; Lahl, M.; Schiller, S. | Konferenzbeitrag |
| 2008 | Finish assessment of complex surfaces by advanced light scattering techniques
Schröder, S.; Duparre, A. | Konferenzbeitrag |
| 2008 | Fusion multimodaler Daten am Beispiel eines Mikrolinsen-Arrays
Regin, Johan; Westkämper, Engelbert; Schröder, Sven | Zeitschriftenaufsatz |
| 2008 | Mechanical strength of mono- and multicrystalline wafers
Schönfelder, S.; Bohne, A.; Bagdahn, J. | Konferenzbeitrag |
| 2008 | Scattering of EUV optics - substrate, coating, and degradation effects
Schröder, S.; Tünnermann, A.; Benoit, N.; Feigl, T.; Duparre, A. | Konferenzbeitrag |
| 2007 | Characterization of thin films and bulk materials for DUV optical components
Schröder, S.; Kamprath, M.; Duparre, A. | Konferenzbeitrag |
| 2007 | EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Zeitschriftenaufsatz |
| 2007 | Evaluation of ultrasonic scattering at LCF cracks including optically measured, real roughness profiles
Spies, Martin; Satzger, W.; Bamberg, J. | Konferenzbeitrag |
| 2007 | Roughness evolution and scatter losses of multilayers for 193 nm
Schröder, S.; Duparre, A.; Tünnermann, A. | Konferenzbeitrag |
| 2007 | Scanning force microscopy of coatings and nanostructured surfaces
Flemming, M.; Duparre, A. | Konferenzbeitrag |
| 2006 | Design and characterization of nanostructured ultra-hydrophobic coatings
Flemming, M.; Duparre, A. | Zeitschriftenaufsatz |
| 2005 | Scanning force microscopy for optical surface metrology
Flemming, M.; Roder, K.; Duparre, A. | Konferenzbeitrag |
| 2004 | Improved mechanical properties of metallic micro-structures
Schreiber, J.; Braun, S.; Gatto, A.; Schenk, H. | Konferenzbeitrag |
| 2003 | Characterization procedures for nanorough ultrahydrophobic surfaces with controlled optical matter
Flemming, M.; Reihs, K.; Duparre, A. | Konferenzbeitrag |
| 2003 | Structuring of poly ether ether ketone by ArF excimer laser radiation in different atmospheres
Feng, Y.; Gottmann, J.; Kreutz, E.W. | Zeitschriftenaufsatz |
| 2002 | Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A. | Zeitschriftenaufsatz |
| 2002 | Optical coatings with enhanced roughness for ultrahydrophobic, low-scatter applications
Duparre, A.; Flemming, M.; Steinert, J.; Reihs, K. | Zeitschriftenaufsatz |
| 2000 | X-ray investigation of a near surface layer of metal samples
Gilev, O.N.; Asadchikov, V.E.; Duparre, A. | Konferenzbeitrag |
| 2000 | X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A. | Konferenzbeitrag |
| 1999 | Ion-assisted deposition of oxide materials at room temperature by use of different ion sources
Niederwald, H.S.; Laux, S.; Kennedy, M.; Schallenberg, U.; Duparre, A.; Kaiser, N.; Ristau, D. | Zeitschriftenaufsatz |
| 1999 | Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S. | Konferenzbeitrag |
| 1998 | Coatings give machine tools a harder edge
Schäfer, L.; Lüthje, H. | Zeitschriftenaufsatz |
| 1998 | Comparative study of surface roughness measured on polysilicon using spectroscopic ellipsometry and atomic force microscopy
Petrik, P.; Biro, L.P.; Fried, M.; Lohner, T.; Berger, R.; Schneider, C.; Gyulai, J.; Ryssel, H. | Zeitschriftenaufsatz |
| 1998 | Diamantbeschichtete Werkzeuge für die Präzisionsbearbeitung
Matthee, T.; Schäfer, L. | Zeitschriftenaufsatz |
| 1998 | Schwingfestigkeit wetterfester Stähle nach 10- bis 20-jähriger Bewitterung
Sonsino, C.M.; Müller, F. | Bericht |
| 1998 | Wide scale surface measurement using white light interferometry and atomic force microscopy
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G. | Konferenzbeitrag |
| 1997 | Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N. | Konferenzbeitrag |
| 1997 | Measurement and analysis of microtopography using wavelet methods
Recknagel, R.-J.; Notni, G. | Konferenzbeitrag |
| 1995 | Schwingfestigkeit von hochfesten Feinkornbaustählen im brenngeschnittenen Zustand
Kaufmann, H.; Sonsino, C.M.; Schönherr, W. | Zeitschriftenaufsatz |
| 1994 | STM-Untersuchungen von Diamant- und DLC-Schichten
Gorbunov, A.A.; Pimenov, S.M.; Smolin, A.A.; Drescher, D.; Scheibe, H.J. | Konferenzbeitrag |
| 1993 | Characterization of multilayer-interfaces by X-ray diffraction, TEM, SNMS and AES.
Hopfe, S.; Kallis, N.; Mai, H.; Pompe, W.; Scholz, R.; Völlmar, S.; Wehner, B.; Weißbrodt, P. | Konferenzbeitrag |
| 1993 | Schwingfestigkeit von hochfesten Feinkornbaustählen im brenngeschnittenen Zustand. Forschungsbericht.
Sonsino, C.M.; Kaufmann, H.; Müller, F.; Berghöfer, U. | Buch |
| 1992 | Vergleich fraktaler Parameter von Rauheitsmessungen an glatten Oberflächen mit profilometrischen und Streulichtmessungen
Neubert, J.; Truckenbrodt, H.; Usbeck, K.; Harnisch, B. | Konferenzbeitrag |
| 1990 | About some turbulent and mesoscale processes in the coastal region
Neisser, J.; Foken, T.; Bull, G.; Richter, S.H.; Weimann, M.; Gerstmann, W.; Weiss, J.; Kohlmeyer, H.; Baum, W.; Schindler, V.; Finke, U. | Zeitschriftenaufsatz |
| 1990 | Optische Fehlererkennung an Holz. Was ist bereits möglich - wo liegen die Grenzen
Plinke, B. | Zeitschriftenaufsatz |
| 1990 | Visual inspection of wood surfaces using digital image processing.
Plinke, B. | Konferenzbeitrag |