
Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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2011 | Thickness determination of thin anodic titanium oxide films Schneider, M.; Langklotz, U.; Michaelis, A. | Zeitschriftenaufsatz |
2008 | Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments Hill, S.B.; Faradzhev, N.S.; Tarrio, C.; Lucatorto, T.B.; Madey, T.E.; Yakshinskiy, B.V.; Loginova, E.; Yulin, S. | Konferenzbeitrag |
2002 | A comparative study of the UV optical and structural properties of SiO2, Al2O3, and HfO2 single layers deposited by reactive evaporation, ion-assisted deposition and plasma ion-assisted deposition Thielsch, R.; Gatto, A.; Heber, J.; Kaiser, N. | Zeitschriftenaufsatz |