Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Coating technology for locally varying optical function on 2d and 3d elements
Glöß, Daniel; Bartzsch, Hagen; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Frach, Peter
Konferenzbeitrag
2017Effect of scandium content on structure and piezoelectric properties of AlScN films deposited by reactive pulse magnetron sputtering
Zywitzki, Olaf; Modes, Thomas; Barth, Stephan; Bartzsch, Hagen; Frach, Peter
Zeitschriftenaufsatz
2017Large area precision coatings by pulse magnetron sputtering
Frach, Peter; Glöß, Daniel; Goschurny, Thomas; Drescher, Andy; Hartung, Ullrich; Bartzsch, Hagen; Heisig, Andreas; Grune, Harald; Leischnig, L.; Leischnig, S.; Bundesmann, C.
Konferenzbeitrag
2016Adjustment of plasma properties in magnetron sputtering by pulsed powering in unipolar/bipolar hybrid pulse mode
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Gittner, Mathias; Labitzke, Rainer
Zeitschriftenaufsatz, Konferenzbeitrag
2015Photocatalytic effects of reactively sputtered N-doped anatase upon irradiation at UV-A and UV-A/VIS threshold wavelengths
Wu, Yanyun; Klostermann, Heidrun; Geis-Gerstorfer, Jürgen; Scheideler, L.; Rupp, F.
Zeitschriftenaufsatz
2011Properties of piezoelectric AlN layers deposited by reactive pulse magnetron sputtering
Bartzsch, H.; Gittner, M.; Glöß, D.; Frach, P.; Herzog, T.; Walter, S.; Heuer, H.
Konferenzbeitrag
2010Magnetron sputtering. Milestones of 30 years
Bräuer, G.; Szyszka, B.; Vergöhl, M.; Bandorf, R.
Konferenzbeitrag, Zeitschriftenaufsatz
2009Reactive pulse magnetron sputtered SiOxNy coatings on polymers
Lau, K.; Weber, J.; Bartzsch, H.; Frach, D.P.
Zeitschriftenaufsatz, Konferenzbeitrag
2008Electrically insulating Al2O3 and SiO2 films for sensor and photovoltaic applications deposited by reactive pulse magnetron sputtering, hollow cathode arc activated deposition and magnetron-PECVD
Frach, P.; Bartzsch, H.; Glöß, D.; Fahland, M.; Händel, F.
Zeitschriftenaufsatz, Konferenzbeitrag
2008Multifunctional high-reflective and antireflective layer systems with easy-to-clean properties
Glöß, D.; Frach, P.; Gottfried, C.; Klinkenberg, S.; Liebig, J.-S.; Hentsch, W.; Liepack, H.; Krug, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2008Optical properties of metal based transparent electrodes on polymer films
Fahland, M.; Vogt, T.; Schönberger, W.; Schiller, N.
Konferenzbeitrag, Zeitschriftenaufsatz
2007Permeation barrier properties of oxide layers on polymer film deposited by pulsed magnetron sputtering
Fahlteich, J.; Fahland, M.; Schiller, N.
Konferenzbeitrag
2005Nanocomposite oxide and nitride hard coatings produced by pulse magnetron sputtering
Klostermann, H.; Böcher, B.; Fietzke, F.; Modes, T.; Zywitzki, O.
Zeitschriftenaufsatz, Konferenzbeitrag
2005Photocatalytic titanium dioxide thin films prepared by reactive pulse magnetron sputtering at low temperature
Glöß, D.; Frach, P.; Zywitzki, O.; Modes, T.; Klinkenberg, S.; Gottfried, C.
Zeitschriftenaufsatz
2004Graded refractive index layer systems for antireflective coatings and rugate filters deposited by reactive pulse magnetron sputtering
Bartzsch, H.; Lange, S.; Frach, P.; Goedicke, K.
Konferenzbeitrag, Zeitschriftenaufsatz
2004Photocatalytic properties of doped TiO2 and of Ti-based mixed oxide thin films prepared by reactive pulse magnetron sputtering
Vergöhl, M.; Frach, P.; Neumann, F.; Hunsche, B.; Glöß, D.
Konferenzbeitrag
2004Structure and properties of crystalline titanium oxide layers deposited by reactive pulse magnetron sputtering
Zywitzki, O.; Modes, T.; Sahm, H.; Frach, P.; Goedicke, K.; Gloss, D.
Konferenzbeitrag, Zeitschriftenaufsatz
2003Plasma surface technologies in Germany
Fellenberg, R.; Bräuer, G.
Konferenzbeitrag