Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020Development of a 3D-integrated thermocatalytic sensor for combustible gas detection
Münchenberger, Finja M.; Dreiner, Stefan; Kappert, Holger; Neubieser, Rahel-Manuela; Vogt, Holger
Konferenzbeitrag
2019Hermetical sealing of pressure sensor diaphragms by CVD of Si1-XGeX with minimized cavity deposition
Walk, Christian; Netaev, Alexander; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Konferenzbeitrag
2019Hermeticity of SI1-XGeX diaphragms for the fabrication of a capacitive post-CMOS pressure sensor
Walk, Christian; Netaev, Alexander; Wiemann, Matthias; Görtz, Michael; Vogt, Holger; Mokwa, Wilfried; Seidl, Karsten
Konferenzbeitrag
2018Development of a post-CMOS compatible nanoporous thin film layer based on Al2O3
Dogan, Özgü; Buschhausen, Andre; Walk, Christian; Mokwa, Wilfried; Vogt, Holger
Konferenzbeitrag
2018Post-CMOS MEMS capacitive pressure sensor: Porous ALD membrane for sacrificial layer release and diaphragm sealing
Walk, Christian; Dogan, Özgü; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Konferenzbeitrag
2017Development of a patterning process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Vidovic, Nino; Görtz, Michael; Vogt, Holger
Konferenzbeitrag
2017A side-wall spacer process for releasing and sealing of post-CMOS MEMS pressure sensor membranes
Walk, Christian; Görtz, Michael; Mokwa, Wilfried; Vogt, Holger
Konferenzbeitrag
2016Development of a low temperature SiC protection layer for post-CMOS MEMS fabrication utilizing vapour release technologies
Walk, Christian; Chen, Yizhou; Vidovic, Nino; Kuhl, Andreas; Görtz, Michael; Vogt, H.
Konferenzbeitrag
2016Post-CMOS integrated ALD 3D micro- and nanostructures and application for multi-electrode arrays
Jupe, Andreas; Figge, Martin; Goehlich, Andreas; Vogt, Holger
Konferenzbeitrag
2016Post-CMOS integration of miniaturized solar cells for energy harvesting of autonomous sensor nodes
Stühlmeyer, Martin; Goehlich, Andreas; Figge, Martin; Vogt, Holger
Konferenzbeitrag