Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Spatially resolved cross-linking characterization by imaging low-coherence interferometry
Taudt, Christopher; Nelsen, Bryan; Rossegger, Elisabeth; Schlögl, Sandra; Koch, Edmund; Hartmann, Peter
Zeitschriftenaufsatz
2018Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry
Taudt, Christopher; Nelsen, Bryan; Schlögl, Sandra; Koch, Edmund; Hartmann, Peter
Zeitschriftenaufsatz, Konferenzbeitrag
2013Innovative approach to high stroke electrostatic actuators
Lange, Nicolas; Wippermann, Frank; Beckert, Erik; Eberhardt, Ramona; Tünnermann, Andreas
Konferenzbeitrag
2011First results on electrostatic polymer actuators based on UV-replication
Lange, N.; Wippermann, F.; Leitel, R.; Bruchmann, C.; Beckert, E.; Eberhardt, R.; Tünnermann, A.
Konferenzbeitrag
2011Numerical optimization of illumination and mask layout for the enlargement of process windows and for the control of photoresist profiles in proximity printing
Motzek, Kristian; Partel, Stefan; Vogler, Uwe; Erdmann, Andreas
Konferenzbeitrag
2007Mesoscopic simulation of photoresist processing in optical lithography
Schnattinger, T.
Dissertation
2001The impact of exposure induced refractive index changes of photoresists on the photolithographic process
Erdmann, A.; Henderson, C.L.; Willson, C.G.
Zeitschriftenaufsatz
1999FIRM: a new software tool for calibration of lithography simulation
Krüger, D.; Kalus, C.K.; Erdmann, A.; Friedrich, C.; Käsmaier, R.; Feike, A.
Konferenzbeitrag
1994Fabricating spherical microlens arrays with a two step laser beam writing technique
Przyrembel, G.
Konferenzbeitrag
1986Reactive ion beam etching of InP with N2 and N2/O2 mixtures
Katzschner, W.; Niggebrügge, U.; Löffler, R.; Schroeter-Janssen, H.
Zeitschriftenaufsatz