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| 2019 | Large Area TOPCon Cells Realized by a PECVD Tube Process
Feldmann, F.; Fellmeth, T.; Steinhauser, B.; Nagel, H.; Ourinson, D.; Mack, S.; Lohmüller, E.; Polzin, J.-I.; Benick, J.; Richter, A.; Moldovan, A.; Bivour, M.; Clement, F.; Rentsch, J.; Hermle, M.; Glunz, S.W. | Konferenzbeitrag |
| 2019 | Passivation and Microstructure of Dual Intrinsic a-Si:H Layers for SHJ Solar Cells
Temmler, J.; Bodlak, L.; Moldovan, A.; Bivour, M.; Wolf, A.; Rentsch, J. | Konferenzbeitrag |
| 2019 | Plasma Oxidation for the Front Side Passivation of PERC Solar Cells
Mohamed Okasha Mohamed Okasha, A.; Kafle, B.; Torda, B.; Teßmann, C.; Moldovan, A.; Hofmann, M. | Konferenzbeitrag |
| 2018 | Comparison of reliability of 100 nm AlGaN/GaN HEMTs with T-gate and SAG-gate technology
Dammann, Michael; Baeumler, Martina; Brueckner, Peter; Kemmer, Tobias; Konstanzer, Helmer; Graff, Andreas; Simon-Najasek, Michél; Quay, Rüdiger | Zeitschriftenaufsatz |
| 2018 | Development of 4 nm-Thin PECVD aluminium oxide using plasma analysis and its application to PERC solar cells and modules
Hofmann, Marc; Wagenmann, Dirk; Teßmann, Christopher; Jäcklein, Martin; Saint-Cast, Pierre; Eberlein, Dirk; Kraft, Achim; Dippell, T.; May, F.; Dörr, M.; Cord, B.; Schütte, T.; Neiß, P.; Eichhorn, L.; Klick, M.; Richter, U.; Siemens, M.; Wiedemuth, P. | Konferenzbeitrag |
| 2018 | Excellent surface passivation quality using industrial-scale direct-plasma TOPCon deposition technology
Steinhauser, B.; Polzin, J.-I.; Feldmann, F.; Hermle, M.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2018 | Industrial biPERC Solar Cells with Varied Rear Side Characteristics under Bifacial Illumination
Wöhrle, N.; Fellmeth, T.; Krieg, A.; Palinginis, P.; Weber, T.; Steckemetz, S.; Ramspeck, K.; Greulich, J.; Rein, S. | Konferenzbeitrag |
| 2018 | Insulating and passivating plasma-enhanced atomic layer deposited aluminum oxide thin films for silicon solar cells
Reichel, C.; Reusch, M.; Kotula, S.; Granek, F.; Richter, A.; Hermle, M.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2018 | Medical Device Manufacturing. Conference 2018 - Tagungsband
: Schneider, Urs (Hrsg.) | Tagungsband |
| 2018 | Micro‐electrochemical investigation of the passive behavior of thin anodic titanium oxide films on TiAlV6‐4
Langklotz, Ulrike; Noeske, Michael; Schneider, Michael | Zeitschriftenaufsatz |
| 2018 | PECVD-AlOx
Saint-Cast, P.; Hofmann, M. | Aufsatz in Buch |
| 2018 | Potential analysis of a rear-side passivation for multi-junction space solar cells based on germanium substrates
Weiss, Charlotte; Schön, Jonas; Höhn, Oliver; Mohr, Christian; Kurstjens, Rufi; Boizot, Bruno; Janz, Stefan | Konferenzbeitrag |
| 2018 | Role of oxygen for boron diffusion from borosilicate glass layers deposited by atmospheric pressure chemical vapor deposition
Meier, S.; Wolf, A.; Mack, S.; Lohmüller, S.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2018 | Taking monocrystalline silicon to the ultimate lifetime limit
Niewelt, Tim; Richter, Armin; Kho, T.C.; Grant, N.E.; Bonilla, R.S.; Steinhauser, Bernd; Polzin, Jana-Isabelle; Feldmann, Frank; Hermle, Martin; Murphy, J.D.; Phang, S.P.; Kwapil, Wolfram; Schubert, Martin C. | Zeitschriftenaufsatz |
| 2018 | Taking Monocrystalline Silicon to the Ultimate Lifetime Limit
Niewelt, T.; Richter, A.; Kho, T.; Grant, N.; Bonilla, R.; Steinhauser, B.; Polzin, J.-I.; Feldmann, F.; Hermle, M.; Murphy, J.; Phang, S.; Kwapil, W.; Schubert, M.C. | Vortrag |
| 2017 | Amorphous silicon carbide rear-side passivation and reflector layer stacks for multi-junction space solar cells based on germanium sustrates
Janz, Stefan; Weiss, Charlotte; Mohr, Christian; Kurstjens, Rufi; Boizot, Bruno; Fuhrmann, Bianca; Khorenko, Victor | Konferenzbeitrag |
| 2017 | Development and characterization of multifunctional PassDop layers for local p+-laser doping
Norouzi, M.; Saint-Cast, P.; Lohmüller, E.; Steinhauser, B.; Benick, J.; Werner, S.; Bitnar, B.; Palinginis, P.; Neuhaus, H.; Hofmann, M.; Wolf, A. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2017 | Influence of surface preparation and cleaning on the passivation of boron diffused silicon surfaces for high efficiency photovoltaics
Ali, H.; Moldovan, A.; Mack, S.; Wilson, M.; Schoenfeld, W.V.; Davis, K.O. | Zeitschriftenaufsatz |
| 2017 | Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J. | Konferenzbeitrag |
| 2017 | Key aspects for fabrication of p-type Cz-Si PERC solar cells exceeding 22% conversion efficiency
Werner, S.; Lohmüller, E.; Saint-Cast, P.; Greulich, J.M.; Weber, J.; Schmidt, S.; Moldovan, A.; Brand, A.A.; Dannenberg, T.; Mack, S.; Wasmer, S.; Demant, M.; Linse, M.; Ackermann, R.; Wolf, A.; Preu, R. | Konferenzbeitrag |
| 2017 | Suitability of POCL3 diffusion processes with in-situ oxidation for forming laser-doped selective emitters with low carrier recombination
Werner, S.; Lohmüller, E.; Weber, J.; Wolf, A. | Konferenzbeitrag |
| 2017 | Superacid-treated silicon surfaces: Extending the limit of carrier lifetime for photovoltaic applications
Grant, N.E.; Niewelt, T.; Wilson, N.R.; Wheeler-Jones, E.C.; Bullock, J.; Al-Amin, M.; Schubert, M.C.; Veen, A.C. van; Javey, A.; Murphy, J.D. | Zeitschriftenaufsatz |
| 2017 | Transmission electron microscopy based interface analysis of the origin of the variation in surface recombination of silicon for different surface preparation methods and passivation materials
Ali, H.; Moldovan, A.; Mack, S.; Schoenfeld, W.V.; Davis, K.O. | Zeitschriftenaufsatz |
| 2016 | High-efficiency n-type silicon solar cells: Advances in PassDop technology and NiCu plating on boron emitter
Steinhauser, B.; Kamp, M.; Brand, A.A.; Jäger, U.; Bartsch, J.; Benick, J.; Hermle, M. | Zeitschriftenaufsatz |
| 2016 | Ozone-Based Surface Conditioning Focused on an Improved Passivation for SHJ Solar Cells
Moldovan, A.; Dannenberg, T.; Temmler, J.; Kroely, L.; Zimmer, M.; Rentsch, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2016 | Ozone-based surface conditioning: Combining excellent surface passivation and industrial feasibility for SHJ solar cells
Moldovan, A.; Fischer, A.; Dannenberg, T.; Temmler, J.; Bivour, M.; Zimmer, M.; Hermle, M.; Rentsch, J.; Adou-Ras, D.; Sonntag, D.; Zhao, J.; Wissen, A. | Vortrag |
| 2016 | Precise parameterization of the recombination velocity at passivated phosphorus doped surfaces
Kimmerle, A.; Rahman, M.M.; Werner, S.; Mack, S.; Wolf, A.; Richter, A.; Haug, H. | Zeitschriftenaufsatz |
| 2016 | Ultrathin titanium dioxide nanolayers by atomic layer deposition for surface passivation of crystalline silicon
Gad, K.M.; Vössing, D.; Richter, A.; Rayner, B.; Reindl, L.M.; Mohney, S.E.; Kasemann, M. | Zeitschriftenaufsatz |
| 2015 | Degradation of hydrogenated amorphous silicon passivation films caused by sputtering deposition
Meiners, B.-M.; Borchert, D.; Hohage, S.; Holinksi, S.; Schäfer, P. | Zeitschriftenaufsatz |
| 2015 | Impact of rear side roughness on optical and electrical properties of a high-efficiency solar cell
Richter, M.; Saint-Cast, P.; Dannenberg, T.; Zimmer, M.; Rentsch, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2015 | Industrial N-type PERL cells with screen printed front side electrodes approaching 21% efficiency
Jäger, U.; Steinhauser, B.; Benick, J.; Chong, E.; Lam, J.; Steeman, R.; Rostan, H.; Nekarda, J.; Hermle, M. | Konferenzbeitrag |
| 2015 | Via hole conditioning in silicon heterojunction metal wrap through solar cells
Dirnstorfer, Ingo; Schilling, Niels; Körner, Stefan; Gierth, Paul; Waltinger, Andreas; Leszczynska, Barbara; Simon, Daniel K.; Gärtner, Jan; Jordan, Paul M.; Mikolajick, Thomas; Dani, Ines; Eberstein, Markus; Rebenklau, Lars; Krause, Jens | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2014 | Firing-stable PassDop passivation for screen printed n-type PERL solar cells based on a-SiNx:P
Steinhauser, B.; Mansoor, M. bin; Jäger, U.; Benick, J.; Hermle, M. | Zeitschriftenaufsatz |
| 2014 | Inline quality control of passivation stacks in high-efficiency silicon solar cell concepts
Greulich, J.; Wöhrle, N.; Krieg, A.; Rein, S. | Konferenzbeitrag |
| 2014 | Investigations on the passivation mechanism of AlN:H and AlN:H-SiN:H stacks
Krugel, G.; Jenkner, F.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2014 | PECVD Al2O3 for Surface Passivation: A Review of Solar Cell and Thin Layer Characteristics Silicon Solar Cell
Kühnhold, S.; Saint-Cast, P.; Hofmann, M.; Paramanathan, R.; El-Safoury, M.; Kafle, B.; Kania, D.; Weiss, L.; Heo, Y.-H.; Billot, E.; Olwal, P.; Rentsch, J.; Preu, R. | Konferenzbeitrag |
| 2014 | Process optimization for the front side of P-type silicon solar cells
Werner, S.; Lohmüller, E.; Maier, S.; Kimmerle, A.; Spribille, A.; Wasmer, S.; Clement, F.; Wolf, A. | Konferenzbeitrag |
| 2014 | Properties of the c-Si/Al2O3 interface of ultrathin atomic layer deposited Al2O3 layers capped by SiNx for c-Si surface passivation
Schuldis, D.; Richter, A.; Benick, J.; Saint-Cast, P.; Hermle, M.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2014 | Reaction kinetics during the thermal activation of the silicon surface passivation with atomic layer deposited Al2O3
Richter, A.; Benick, J.; Hermle, M.; Glunz, S.W. | Zeitschriftenaufsatz |
| 2014 | Surface passivation and boundary lubrication of self-mated tetrahedral amorphous carbon asperities under extreme tribological conditions
Romero, A.P.; Pastewka, L.; Lautz, J.; Moseler, M. | Zeitschriftenaufsatz |
| 2013 | CIP (cleaning-in-place) stability of AlGaN/GaN pH sensors
Linkohr, S.; Pletschen, W.; Schwarz, S.U.; Anzt, J.; Cimalla, V.; Ambacher, O. | Zeitschriftenaufsatz |
| 2013 | Effective passivation of black silicon surfaces by atomic layer deposition
Repo, P.; Haarahiltunen, A.; Sainiemi, L.; Yli-Koski, M.; Talvitie, H.; Schubert, M.C.; Savin, H. | Zeitschriftenaufsatz |
| 2013 | Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz |
| 2013 | Fire-through contacts - a new approach to contact the rear side of passivated silicon solar cells
Thaidigsmann, Benjamin; Kick, Christopher; Drews, Andreas; Clement, Florian; Wolf, Andreas; Biro, Daniel | Zeitschriftenaufsatz |
| 2013 | High-power-plasma PECVD of SiNx and Al2O3 for industrial solar cell manufacturing
Hofmann, M.; Kohn, N.; Schwarz, F.; Nölker, S.; Kastl, S.; Beckmann, R.; Ferré, R.; Pernau, T.; Trogus, D.; Kühnhold, S.; Saint-Cast, P.; Rentsch, J. | Konferenzbeitrag |
| 2013 | In-line deposition of silicon-based films by hot-wire chemical vapor deposition
Schäfer, L.; Harig, T.; Höfer, M.; Laukart, A.; Borchert, D.; Keipert-Colberg, S.; Trube, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2013 | Industrial screen-printed solar cells with novel atmospheric pressure dry texturing process
Kafle, B.; Trogus, D.; Dresler, B.; Mäder, G.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J. | Konferenzbeitrag |
| 2013 | Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Repo, P.; Benick, J.; Gastrow, G. von; Vähänissi, V.; Heinz, F.D.; Schön, J.; Schubert, M.C.; Savin, H. | Zeitschriftenaufsatz |
| 2013 | Passivation of solar cell emitters using aluminum nitride
Krugel, G.; Sharma, A.; Moldovan, A.; Wolke, W.; Rentsch, J.; Preu, R. | Konferenzbeitrag |
| 2013 | Study of contact formation of printed contacts through different passivation layers on lowly doped emitters
Kalio, A.; Richter, A.; Glatthaar, M.; Wilde, J. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2013 | Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Krugel, G.; Sharma, A.; Wolke, W.; Rentsch, J.; Preu, R. | Zeitschriftenaufsatz |
| 2013 | Study of the electrical insulation of dielectric passivation layers and stacks for back-contact back-junction silicon solar cells
Keding, R.; Bock, R.; Katkhouda, K.; Stüwe, D.; Reichel, C.; Clement, F.; Woehl, R.; Reinecke, H.; Geppert, T. | Konferenzbeitrag |
| 2013 | Technologies for mass production of > 20% efficient P-Type silicon solar cells
Mack, S.; Wolf, A.; Thaidigsmann, B.; Lohmüller, E.; Jäger, U.; Pospischil, M.; Clement, F.; Eberlein, D.; Preu, R.; Biro, D. | Konferenzbeitrag |
| 2012 | Hafnium oxide passivation of InGaAs/InP heterostructure bipolar transistors by electron beam evaporation
Driad, R.; Schmidt, R.; Kirste, L.; Lösch, R.; Mikulla, M.; Ambacher, O. | Zeitschriftenaufsatz |
| 2010 | Crystallographic orientation effects on the performance of InP-based heterojunction bipolar transistors
Driad, R.; Lösch, R.; Benkhelifa, F.; Kuri, M.; Rosenzweig, J. | Zeitschriftenaufsatz |
| 2010 | A novel bio-functionalization of AlGaN/GaN-ISFETs for DNA-sensors
Linkohr, S.; Schwarz, S.; Krischok, S.; Lorenz, P.; Cimalla, V.; Nebel, C.E.; Ambacher, O. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2007 | Corrosion of Si3N4-ceramics in aqueous solutions. Part 2: Corrosion mechanisms in acids as a function of concentration, temperature and composition
Schilm, J.; Herrmann, M.; Michael, G. | Zeitschriftenaufsatz |
| 2007 | Electrochemical dissolution of hard metal alloys
Walther, B.; Schilm, J.; Lohrengel, M.M.; Michaelis, A. | Konferenzbeitrag |
| 2006 | Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles
Murray, P.; Köhler, B.; Lipfert, S.; Kaspar, J.; Schreiber, J. | Konferenzbeitrag |
| 2005 | High-density ECR-plasma deposited silicon nitride films for applications in III/V-based compound semiconductor devices
Sah, R.E.; Mikulla, M.; Baumann, H.; Benkhelifa, F.; Quay, R.; Weimann, G. | Konferenzbeitrag |
| 2002 | Pulsed laser deposition of diamond like carbon (DLC) and zirconia-tougened alumina (ZTA) on steels and PMMA
Perera, Y.; Schlaghecken, G.; Gottmann, J.; Kreutz, E.W.; Poprawe, R. | Konferenzbeitrag |
| 2000 | Conservation of low dark current of InGaAs photodiodes after NH3/HF etch with a BCB passivation layer
Schmidt, D.; Trommer, D. | Konferenzbeitrag |
| 2000 | Hydrogen passivation in InP:Zn resulting from reactive ion etching during laser stripe formation
Kreissl, J.; Moehrle, M.; Sigmund, A.; Bochnia, R.; Harde, P.; Ulrici, W. | Konferenzbeitrag |
| 1998 | Optimised gate-drain feedback capacitance of W-band high gain passivated 0.15 mu m InAlAs/InGaAs HEMTs
Chertouk, M.; Steinhagen, F.; Massler, H.; Haydl, W.H.; Köhler, K.; Weimann, G. | Zeitschriftenaufsatz |
| 1997 | New developments of the ELYMAT technique
Eichinger, P.; Rommel, M. | Konferenzbeitrag |
| 1997 | Surface acoustic wave devices and applications in liquid sensing
Leidl, A.; Oberlack, I.; Schaber, U.; Mader, B.; Drost, S. | Zeitschriftenaufsatz |
| 1996 | Influence of SiNx passivation on the surface potential of GaInAs and AlInAs in HEMT layer structures
Arps, M.; Each, H.-G.; Passenberg, W.; Umbach, A.; Schlaak, W. | Konferenzbeitrag |
| 1995 | Passivation of the interdigital transducers of acoustic sensors based on surface localized HPSWs for measurements in liquids
Leidl, A.; Filser, H.; Labatzki, A. | Zeitschriftenaufsatz |
| 1993 | Hydrogen passivation of shallow impurities in GaAs/AlGaAs quantum wells.
Harris, C.I.; Stutzmann, M.; Köhler, K. | Zeitschriftenaufsatz |
| 1993 | Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
Vogt, H. | Habilitationsschrift |
| 1992 | Passivation effects in novolak based resists during O2-RIE
Jagdhold, U.; Pelka, J. | Konferenzbeitrag |
| 1991 | Characterization of anodic fluoride films on Hg1-xCdxTe
Esquivias, I.; Dal Colle, M.; Brink, D.; Baars, J.; Bruder, M. | Konferenzbeitrag |
| 1991 | Properties of anodic fluoride films on Hg1-xCdxTe
Esquivias, I.; Brink, D.; Dal Colle, M.; Baars, J.; Bruder, M. | Konferenzbeitrag |
| 1990 | Hydrogen passivation of Zn acceptors in InGaAs during reactive ion etching
Moehrie, M. | Zeitschriftenaufsatz |
| 1990 | Starting points for raising the efficiency of practical silicon solar cells
Knobloch, J.; Aberle, A.G.; Warta, W.; Voss, B. | Konferenzbeitrag |
| 1987 | Dielectrics for passivation of planar InP/InGaAs diodes
Unterborsch, G.; Bach, H.G.; Schmitt, F.; Schmidt, R.; Schlaak, W. | Konferenzbeitrag, Zeitschriftenaufsatz |