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| 2009 | Actuators to be integrated in low temperature cofired ceramics (LTCC) microfluidic systems
Klumbies, H.; Partsch, U.; Goldberg, A.; Gebhardt, S.; Keitel, U.; Neubert, H. | Konferenzbeitrag |
| 2009 | A novel platform technology for the detection of genetic variations by surface plasmon resonance
Mertig, M.; Bonsch, M.; Katzschner, B.; Voigt, J.; Sonntag, F.; Schilling, N.; Klotzbach, U.; Danz, N.; Begemann, S.; Herr, A.; Jung, M. | Konferenzbeitrag |
| 2009 | Werkstofftrends: Werkstoffe der Mikrosystemtechnik
Weimert, B.; Reschke, S.; Kohlhoff, J.; Grüne, M. | Zeitschriftenaufsatz |
| 2007 | PZT thick films for sensor and actuator applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A. | Zeitschriftenaufsatz, Konferenzbeitrag |
| 2005 | Laser-assisted structuring for the fabrication of thin film sensors on complex 3D-surfaces
Biehl, S.; Lüthje, H.; Bandorf, R. | Konferenzbeitrag |
| 2004 | Laser-patterning of thin films deposited on complex surfaces for the fabrication of micro-sensors
Biehl, S.; Lüthje, H. | Konferenzbeitrag |
| 2004 | Wear resistant thin film sensors for monotoring force and temperature in the track of ball bearings
Biehl, S.; Lüthje, H. | Konferenzbeitrag |
| 2000 | On-chip programmable monolithic integrated pressure sensor for high pressure applications
Trieu, H.K.; Köster, O.; Knier, M.; Kappert, H.; Mowka, W. | Konferenzbeitrag |
| 1998 | CMOS sensor systems
Hosticka, B.J. | Konferenzbeitrag |
| 1998 | Efficient design and optimizatíon of MEMS by integrating commercial simulation tools
Nagler, O.; Trost, M.; Hillerich, B.; Kozlowski, F. | Konferenzbeitrag |
| 1997 | Microsensor techniques for cardiovascular systems
Kersjes, R.A.; Mokwa, W. | Zeitschriftenaufsatz |
| 1990 | Silicon microsystems
Brockherde, W.; Hosticka, B.J.; Manoli, Y.; Mokwa, W. | Konferenzbeitrag |