Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019An experimental and theoretical study on the crystal structure and elastic properties of Ta 1-xOx coatings
Almeida Alves, C.F.; Marques, Luís Silvino Alves; Calderon, S.V.; Ferreira, Paulo J.; Schneider, Dieter; Cavaleiro, Albano J.; Carvalho, S.
Zeitschriftenaufsatz
2019Freeform and Laser Optical Coatings by Inline Magnetron Sputtering
Glöß, Daniel; Hartung, Ullrich; Drescher, Andy; Frach, Peter; Bartzsch, Hagen
Konferenzbeitrag
2019Surface evaluation of titanium oxynitride coatings used for developing layered cardiovascular stents
Beshchasna, Nataliia; Kwan Ho, Au Yeung; Saqib, Muhammad; Kraśkiewicz, Honorata; Wasyluk, Łukasz; Kuzmin, Oleg; Duta, Oana; Ficai, Denisa; Trusca, Roxana; Ficai, Anton; Pichugin, Vladimir F.; Opitz, Jörg; Andronescu, Ecaterina
Zeitschriftenaufsatz
2018Development of a broadband dielectric beam splitter with reduced spectral wavefront error
Vergöhl, M.; Britze, C.; Bruns, S.; Ahrens, J.; Schäfer, B.; Mann, K.; Kirschner, V.
Konferenzbeitrag
2018Influence of rf substrate bias on density and mechanical properties of sputtered SiO2 thin films for SAW applications
Täschner, Kerstin; Hildisch, Jahn; Bartzsch, Hagen; Modes, Thomas; Zywitzki, Olaf
Konferenzbeitrag
2018Investigation of industrially-suited processes for deposition of oxide thin films by high power impulse magnetron sputtering
Campos Carreri, Felipe de
Dissertation
2018Roll-to-roll deposition of silicon oxynitride layers on polymer films using a rotatable dual magnetron system
Himmler, Anika; Fahland, Matthias; Linß, Volker
Zeitschriftenaufsatz
2018Titanium oxynitride coatings deposited by magnetron sputtering for improvement of cardiovascular stent design
Duta, Oana Cristina; Ficai, Denisa; Ficai, Anton; Andronescu, Ecaterina; Beshchasna, Nataliia; Saqib, Muhammad; Opitz, Jörg; Kraśkiewicz, Honorata; Wasyluk, Łukasz; Kuzmin, Oleg; Pichugin,Vladimir
Konferenzbeitrag
2017A biodegradable AZ91 magnesium alloy coated with a thin nanostructured hydroxyapatite for improving the corrosion resistance
Mukhametkaliyev, Timor M.; Surmeneva, Maria A.; Vladescu, Alina; Cotrut, Cosmin M.; Braic, Mariana; Dinu, Mihaela; Vranceanu, Diana Maria; Pana, Iulian; Müller, Michaela; Surmenev, Roman A.
Zeitschriftenaufsatz
2017Vibration-assisted sputter coating of cenospheres: A new approach for realizing Cu-based metal matrix syntactic foams
Shishkin, Andrei; Drozdova, Maria; Kozlov, Viktor; Hussainova, Irina; Lehmhus, Dirk
Zeitschriftenaufsatz
2016Influence of thin-film properties on the reliability of flexible glass
Westphalen, J.; Junghähnel, M.; Weller, S.; Lorenz, G.; Naumann, F.
Konferenzbeitrag
2016Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Modes, Thomas; Zywitzki, Olaf; Suchaneck, Gunnar; Gerlach, Gerald
Zeitschriftenaufsatz
2016Roll to roll deposition of silicon nitride permeation barrier coatings using rotatable magnetrons
Fahland, M.; Fahlteich, J.; Himmler, A.; Vogt, T.; Zywitzki, O.; Linss, V.
Konferenzbeitrag
2015Industrial-scale deposition of highly uniform and precise optical interference filters by the use of an improved cylindrical magnetron sputtering system
Vergöhl, M.; Bruns, S.; Rademacher, D.; Bräuer, G.
Konferenzbeitrag, Zeitschriftenaufsatz
2015Investigation of the corrosion behavior of NiVAl multilayer coatings in hot salt melts
Gurr, M.; Bau, S.; Burmeister, F.; Wirth, M.; Piedra-Gonzalez, E.; Krebser, K.; Preussner, J.; Pfeiffer, W.
Zeitschriftenaufsatz
20143D PIC-MC simulation of anode effects in dual magnetron discharges
Melzig, T.; Siemers, M.; Pflug, A.; Rank, R.
Zeitschriftenaufsatz, Konferenzbeitrag
2014Co-sputtering of rugate filters of reduced loss and roughness
Taeschner, Kerstin; Bartzsch, Hagen; Herffurth, Tobias; Schröder, Sven; Duparre, Angela; Frach, Peter
Konferenzbeitrag
2014Increasing the carbon deposition rate using sputter yield amplification upon serial magnetron co-sputtering
Schmidt, R.M.; Ries, P.; Pflug, A.; Wuttig, M.; Kubart, T.
Zeitschriftenaufsatz
2014Model based investigation of Ar+ ion damage in DC magnetron sputtering
Siemers, M.; Pflug, A.; Melzig, T.; Gehrke, K.; Weimar, A.; Szyszka, B.
Zeitschriftenaufsatz, Konferenzbeitrag
2014Numerical optimization of baffles for sputtering optical precision filters
Pflug, A.; Siemers, M.; Melzig, T.; Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Zeitschriftenaufsatz, Konferenzbeitrag
2014Simulation of linear magnetron discharges in 2D and 3D
Pflug, A.; Siemers, M.; Melzig, T.; Schäfer, L.; Bräuer, G.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Formation of Ti2AlN phase after post-heat treatment of Ti-Al-N films deposited by pulsed magnetron sputtering
Yang, Y.; Keunecke, M.; Stein, C.; Gao, L.-J.; Jiang, X.; Bewilogua, K.; Sun, C.
Zeitschriftenaufsatz
2012Low demage magnetron sputtering of TCO films
Bartzsch, H.; Glöß, D.; Frach, P.; Gittner, M.; Gottfried, C.; Suzuki, K.
Konferenzbeitrag
2012Modelling of sputtering yield amplification in serial reactive magnetron co-sputtering
Kubart, T.; Schmidt, R.M.; Austgen, M.; Nyberg, T.; Pflug, A.; Siemers, M.; Wuttig, M.; Berg, S.
Zeitschriftenaufsatz
2012Nb2O5 and TiO2 thin films deposited by pulse magnetron sputtering of cylindrical ceramic targets
Preußner, T.; Blüthner, R.; Kopte, T.
Konferenzbeitrag
2012Parallel particle-in-cell Monte-Carlo algorithm for simulation of gas discharges under PVM and MPI
Schwanke, C.; Pflug, A.; Siemers, M.; Szyszka, B.
Konferenzbeitrag
2012Recent developments in the field of transparent conductive oxide films for spectral selective coatings, electronics and photovoltaics
Szyszka, B.; Dewald, W.; Gurram, S.K.; Pflug, A.; Schulz, C.; Siemers, M.; Sittinger, V.; Ulrich, S.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Annealing effects on titania doped zinc oxide (ZNO:TI) and gallium doped zinc oxide (ZnO:GA) thin films prepared by DC-magnetron sputtering
Heimke, B.; Hartung, U.; Kopte, T.
Konferenzbeitrag
2011The deposition of multilayer films on plastic substrates by reactive pulse magnetron sputtering
Fukagawa, T.; Kato, Y.; Bartzsch, H.; Suzuki, K.
Zeitschriftenaufsatz
2011New sputtering concept for optical precision coatings
Rademacher, D.; Bräuer, G.; Vergöhl, M.; Fritz, B.; Zickenrott, T.
Konferenzbeitrag
2010Magnetron sputtering. Milestones of 30 years
Bräuer, G.; Szyszka, B.; Vergöhl, M.; Bandorf, R.
Konferenzbeitrag, Zeitschriftenaufsatz
2010Modelling of sputtering yield amplification effect in reactive deposition of oxides
Kubart, T.; Nyberg, T.; Pflug, A.; Siemers, M.; Austgen, M.; Koehl, D.; Wuttig, M.; Berg, S.
Zeitschriftenaufsatz
2010Multifunctional optical coatings on polymers deposited by pulse magnetron sputtering and magnetron enhanced PECVD
Frach, P.; Bartzsch, H.; Täschner, K.; Liebig, J.-S.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Plasma characterization and technological application of a hollow cathode plasma source with an axial magnetic field
Fietzke, F.; Zimmermann, B.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Synchronal pulsed RF superimposed DC sputtering of aluminium doped zinc oxide (ZnO:Al)
Heimke, B.; Hartung, U.; Kopte, T.; Junghähnel, M.; Nyderle, R.
Konferenzbeitrag
2009A comparative study on the photocatalytic and gas sensing properties of pure and N-doped TiO2 thin films
Delan, A.; Karuppasamy, A.; Schultheiß, E.
Zeitschriftenaufsatz, Konferenzbeitrag
2009Optical properties of magnetron sputtered thin dielectric films containing terbium(III) for spectral conversion in thin film solar cells
Baumgartner, K.; Angelov, O.; Sendova-Vassileva, M.; Holländer, B.; Ahrens, B.; Schweizer, S.; Dimova-Malinovska, D.; Carius, R.
Konferenzbeitrag
2008Investigation of transparent conductive silver based de-icing coatings for automotive application
Nyderle, R.; Kopte, T.; Preussner, T.
Konferenzbeitrag
2007Large area ZnO:Al films with tailored light scattering properties for photovoltaic applications
Ruske, F.; Jacobs, C.; Sittinger, V.; Szyszka, B.; Werner, W.
Konferenzbeitrag, Zeitschriftenaufsatz
2007Zr-Al-N nanocomposite coatings deposited by pulse magnetron sputtering
Klostermann, H.; Fietzke, F.; Modes, T.; Zywitzki, O.
Zeitschriftenaufsatz
2006EUV multilayer optics
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Konferenzbeitrag, Zeitschriftenaufsatz
2006High-rate deposition of MgO by reactive ac pulsed magnetron sputtering in the transition mode
Kupfer, H.; Kleinhempel, R.; Richter, F.; Peters, C.; Krause, U.; Kopte, T.; Cheng, Y.
Zeitschriftenaufsatz
2006Influence of different interlayers and bias voltage on the properties of a-C:H and a-C:H:Me coatings prepared by reactive d.c. magnetron sputtering
Weber, M.; Bewilogua, K.; Thomsen, H.; Wittorf, R.
Zeitschriftenaufsatz
2006Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures
Hunsche, B.; Vergöhl, M.; Ritz, A.
Konferenzbeitrag, Zeitschriftenaufsatz
2005Multilayer optics for the EUV and soft X-Rays
Feigl, T.; Yulin, S.; Benoit, N.; Kaiser, N.
Zeitschriftenaufsatz
2004DLC based coatings prepared by reactive d.c. magnetron sputtering
Bewilogua, K.; Wittorf, R.; Thomsen, H.; Weber, M.
Konferenzbeitrag, Zeitschriftenaufsatz
2004Electrical properties of Ag films on polyethylene terephthalate deposited by magnetron sputtering
Charton, C.; Fahland, M.
Zeitschriftenaufsatz
2004Heuristic model of the plasma impedance in magnetron sputtering
Pflug, A.; Szyszka, B.; Berg, S.; Nyberg, T.; Kappertz, O.
Konferenzbeitrag
2004Investigation of TiO2 based thin films deposited by reactive magnetron sputtering for use at high temperatures
Hunsche, B.; Vergöhl, M.; Ritz, A.
Konferenzbeitrag
2004Oxidation behaviour of thin silver films deposited on plastic web characterized by spectroscopic ellipsometry (SE)
Sahm, H.; Charton, C.; Thielsch, R.
Konferenzbeitrag, Zeitschriftenaufsatz
2004Synthesis of high-density MgO films by a novel magnetron sputtering system
Nam, K.H.; Jung, M.J.; Han, J.G.; Kopte, T.; Hartung, U.; Peters, C.
Zeitschriftenaufsatz
2004Transparent conductive ZnO:Al thin films prepared by in-line reactive mid-frequency magnetron sputtering
Hong, R.
Dissertation
2003Optical properties of thin Ag films deposited by magnetron sputtering
Charton, C.; Fahland, M.
Konferenzbeitrag
2002Growth of Ag films on PET deposited by magnetron sputtering
Charton, C.; Fahland, M.
Zeitschriftenaufsatz
2001Damage resistant and low stress EUV multilayer mirrors
Feigl, T.; Yulin, S.; Kuhlmann, T.; Kaiser, N.
Konferenzbeitrag
2000Si-based multilayers with high thermal stability
Kaiser, N.; Yulin, S.; Feigl, T.
Konferenzbeitrag
1997Substrate Heating in Sputter Processes
Kälber, T.; Jung, T.
Konferenzbeitrag