Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Nanostructuring of polymer surfaces by magnetron plasma treatment
Steiner, Cindy; Fichtner, Juliane; Fahlteich, John
Konferenzbeitrag
2018TiO2/AZO bilayer thin films by magnetron sputtering as transparent electrodes for electrochromic devices
G-Berasategui, E.; Zubizarreta, Cristina; Mendizabal, Lucía; Barriga, Javier; Viñuales, Ana; Palenzuela, Jesús; Alesanco, Yolanda; Herbig, Bettina; Posset, Uwe
Zeitschriftenaufsatz
2017Roll-to-roll thin film coating on fluoropolymer webs - Status, challenges and applications
Fahlteich, John; Steiner, Cindy; Schiller, Nicolas; Miesbauer, Oliver; Noller, Klaus; Deichmann, Karl-Joachim; Mirza, Mark; Amberg-Schwab, Sabine
Zeitschriftenaufsatz
2016Al in ZnO - from doping to alloying. An investigation of Al electrical activation in relation to structure and charge transport limits
Cornelius, Steffen; Vinnichenko, Mykola
Zeitschriftenaufsatz
2015A hybrid electron cyclotron resonance metal ion source with integrated sputter magnetron for the production of an intense Al+ ion beam
Weichsel, Tim; Hartung, Ullrich; Kopte, Torsten; Zschornack, Günther; Kreller, M.; Phillipp, A.
Zeitschriftenaufsatz
2014An inverted cylindrical sputter magnetron as metal vapor supply for electron cyclotron resonance ion sources
Weichsel, Tim; Hartung, Ullrich; Kopte, Torsten; Zschornack, G.; Kreller, M.; Silze, A.
Zeitschriftenaufsatz
2013From DLC to Si-DLC based layer systems with optimized properties for tribological applications
Hofmann, D.; Kunkel, S.; Bewilogua, K.; Wittorf, R.
Zeitschriftenaufsatz, Konferenzbeitrag
2013Sputtering of dielectric single layers by metallic mode reactive sputtering and conventional reactive sputtering from cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Zickenrott, T.; Vergöhl, M.
Zeitschriftenaufsatz, Konferenzbeitrag
2012Manufacturing of high-precision optical coatings using cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Kreher, S.; Vergöhl, M.
Konferenzbeitrag
2010Transparente Hochbarriereschichten auf flexiblen Substraten
Fahlteich, J.
Dissertation
2009Deposition of functional coatings on polyethylene terephthalate films by magnetronplasma-enhanced chemical vapour deposition
Fahland, M.; Vogt, T.; Meyer, B.; Fahlteich, J.; Schiller, N.; Vinnichenko, M.; Munnik, F.
Zeitschriftenaufsatz
2008Deposition of functional coatings on PET films by Magnetron-PECVD
Fahland, M.; Vogt, T.; Meyer, B.; Fahlteich, J.; Schiller, N.
Konferenzbeitrag
2007Determination of plasma parameters during deposition of ZnO films by ceramic and metallic targets and correlation with film properties
Wiese, R.; Kersten, H.; Hannemann, M.; Sittinger, V.; Ruske, F.; Menner, R.
Konferenzbeitrag, Zeitschriftenaufsatz
2007Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R.
Konferenzbeitrag, Zeitschriftenaufsatz
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Konferenzbeitrag
1998Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
Kirchhoff, V.; Kopte, T.; Winkler, T.; Schulze, M.; Wiedemuth, P.
Konferenzbeitrag, Zeitschriftenaufsatz