Fraunhofer-Gesellschaft

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Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Analysis of risks and related damages due to the implementation of virtual metrology algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Vortrag
2012A calculation model for the economic effects of implementing predictive maintenance algorithms into semiconductor fabrication lines
Koitzsch, Matthias; Honold, Alfred; Noll, Humbert; Nemecek, Alexander
Vortrag