Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2001In-situ monitoring of optical coatings on architectural glass and comparison of the accuracy of the layer thicknesses attainable with ellipsometry and photometry
Vergöhl, M.; Malkomes, N.; Matthee, T.; Bräuer, G.; Richter, U.; Nickol, F.-W.; Bruch, J.
Konferenzbeitrag, Zeitschriftenaufsatz
2000In-situ spectroscopic ellipsometry and plasma control for large-scale magnetron sputter deposition processes
Vergöhl, M.; Malkomes, N.; Matthée, T.; Bräuer, G.
Konferenzbeitrag
2000Real-time control of reactive magnetron-sputter deposited optical filters by in situ spectroscopic ellipsometry
Vergöhl, M.; Malkomes, N.; Matthée, T.; Bräuer, G.
Konferenzbeitrag, Zeitschriftenaufsatz
1990Control of a reactive ion etching process for InP and related materials by in-situ ellipsometry in the near infrared
Muller, R.
Konferenzbeitrag