Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Industrial applications of digital holography
Fratz, Markus; Beckmann, Tobias; Anders, Joachim; Bertz, Alexander; Bayer, Markus; Gießler, Thomas; Carl, Daniel
Konferenzbeitrag
2019Multiwavelength digital holography in the presence of vibrations: Laterally resolved multi-step phase-shift extraction
Seyler, Tobias; Bienkowski, Lasse; Beckmann, Tobias; Fratz, Markus; Bertz, Alexander; Carl, Daniel
Konferenzbeitrag
2019Multiwavelength Holography: Height Measurements Despite Axial Motion of Several Wavelengths During Exposure
Schiller, Annelie; Beckmann, Tobias; Fratz, Markus; Bertz, Alexander; Carl, Daniel; Buse, Karsten
Konferenzbeitrag
2012Novel gap alignment sensor for high-resolution proximity lithography
Harzendorf, Torsten; Stürzebecher, Lorenz; Zeitner, Uwe Detlef
Konferenzbeitrag