Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2002Highly selective etching of deep silica components using electron cyclotron resonance plasma
Ferstl, M.
Zeitschriftenaufsatz
1995Fresnel zone lenses for an electro-optical 2x2-switch
Ferstl, M.
Konferenzbeitrag
1994Antireflection-coated diffractive optical elements fabricated by thin-film deposition
Pawlowski, E.; Kuhlow, B.
Zeitschriftenaufsatz
1994Multi-level Fresnel zone lenses capable of being fabricated with only one binary mask
Kuhlow, B.; Ferstl, M.; Pawlowski, E.; Przyrembel, G.; Galloway, P.C.M.
Konferenzbeitrag
1993Thin film deposition: An alternative technique for the fabrication of binary optics with high efficiency
Pawlowski, E.
Konferenzbeitrag