Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Resistless Ga+ beam lithography for flexible prototyping of nanostructures
Rommel, Mathias
Vortrag
2018Detailed characterisation of focused ion beam induced lateral damage on silicon carbide samples by electrical scanning probe microscopy and transmission electron microscopy
Stumpf, Florian; Abu Quba, A.A.; Singer, Philip; Rumler, Maximilian; Cherkashin, Nikolay; Schamm-Chardon, Sylvie; Cours, Robin; Rommel, Mathias
Zeitschriftenaufsatz
2018Investigation of Ga ion implantation-induced damage in single-crystal 6H-SiC
He, Zhongdu; Xu, Zongwei; Rommel, Mathias; Yao, Boteng; Liu, Tao; Song, Ying; Fang, Fengzhou
Zeitschriftenaufsatz
2017Materials response to glancing incidence femtosecond laser ablation
Echlin, M.P.; Titus, M.S.; Straw, M.; Gumbsch, P.; Pollock, T.M.
Zeitschriftenaufsatz
2014Fabrication of customizable wedged multilayer Laue lenses by adding a stress layer
Niese, Sven; Krüger, Peter; Kubec, Adam; Laas, Roman; Gawlitza, Peter; Melzer, Kathleen; Braun, Stefan; Zschech, Ehrenfried
Zeitschriftenaufsatz
2014Formation and evolution of ultrashort pulse-induced nanogratings in Borosilicate glass
Zimmermann, Felix; Plech, Anton; Richter, Sören; Tünnermann, Andreas; Nolte, Stefan
Konferenzbeitrag
2014Morphological evolution of nanopores and cracks as fundamental components of ultrashort pulse laser-induced nanogratings
Zimmermann, Felix; Plech, Anton; Richter, Sören; Tünnermann, Andreas; Nolte, Stefan
Konferenzbeitrag
2013Evaluation of resistless Ga+ beam lithography for UV NIL stamp fabrication
Rumler, Maximilian; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton; Frey, Lothar
Zeitschriftenaufsatz
2013Highly resolved analysis of the chemistry and mechanical properties of an a-C:H coating system by nanoindentation and auger electron spectroscopy
Schmid, C.; Maier, V.; Schaufler, J.; Butz, B.; Spiecker, E.; Meier, S.; Göken, M.; Durst, K.
Konferenzbeitrag, Zeitschriftenaufsatz
2013Processing of silicon nanostructures by Ga+ resistless lithography and reactive ion etching
Rommel, M.; Rumler, M.; Haas, A.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2013The underlying structure of ultrashort pulse laser-induced nanogratings
Zimmermann, Felix; Richter, Sören; Plech, Anton; Döring, Sven; Heinrich, Matthias; Steinert, Michael; Peschel, Ulf; Kley, Ernst-Bernhard; Tünnermann, Andreas; Nolte, Stefan
Konferenzbeitrag
2012FIB preparation and SEM investigations for three-dimensional analysis of cell cultures on microneedle arrays
Friedmann, A.; Cismak, A.; Tautorat, C.; Koester, P.J.; Baumann, W.; Held, J.; Gaspar, J.; Ruther, P.; Paul, O.; Heilmann, A.
Zeitschriftenaufsatz
2012On the fundamental structure of femtosecond laser-induced nanogratings
Richter, Sören; Plech, Anton; Steinert, Michael; Heinrich, Matthias; Döring, Sven; Zimmermann, Felix; Peschel, Ulf; Kley, Ernst Bernhard; Tünnermann, Andreas; Nolte, Stefan
Zeitschriftenaufsatz
2012Reliability of thermosonic bonded palladium wires in high temperature environments up to 350 °C
Heiermann, Wolfgang; Geruschke, Thomas; Grella, Katharina; Bartsch, M.; Borrmann, Thomas; Ruß, Marco; Vogt, Holger
Konferenzbeitrag
2012Simple and efficient method to fabricate nano cone arrays by FIB milling demonstrated on planar substrates and on protruded structures
Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
20113D simulation of sputter etching with the Monte-Carlo approach
Kunder, D.
Dissertation
2011Investigation of cell-substrate interactions by focused ion beam preparation and scanning electron microscopy
Friedmann, A.; Hoess, A.; Cismak, A.; Heilmann, A.
Zeitschriftenaufsatz
2011Light confinement by structured metal tips for antenna-based scanning near-field optical microscopy
Jambreck, J.D.; Böhmler, M.; Rommel, M.; Hartschuh, A.; Bauer, A.J.; Frey, L.
Konferenzbeitrag
2010Comprehensive study of focused ion beam induced lateral damage in silicon by scanning probe microscopy techniques
Rommel, M.; Spoldi, G.; Yanev, V.; Beuer, S.; Amon, B.; Jambreck, J.; Petersen, S.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz
2010Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Influence of FIB patterning strategies on the shape of 3D structures: Comparison of experiments with simulations
Rommel, M.; Jambreck, J.D.; Ebm, C.; Platzgummer, E.; Bauer, A.J.; Frey, L.
Zeitschriftenaufsatz, Konferenzbeitrag
2010Manufacturing, characterization, and application of nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2010Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application
Jambreck, J.D.; Yanev, V.; Schmitt, H.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2009Fabrication of metallic SPM tips by combining UV nanoimprint lithography and focused ion beam processing
Jambreck, J.D.; Schmitt, H.; Amon, B.; Rommel, M.; Bauer, A.J.; Frey, L.
Poster
2008Experimental observation of FIB induced lateral damage on silicon samples
Spoldi, G.; Beuer, S.; Rommel, M.; Yanev, V.; Bauer, A.J.; Ryssel, H.
Poster
2006Influence of intermetallic phases on reliability in thermosonic Au-Al wire bonding
Müller, T.; Schräpler, L.; Altmann, F.; Knoll, H.; Petzold, M.
Konferenzbeitrag
2006TEM-Präparation mittels "low-voltage-FIB"
Altmann, F.; Graff, A.; Simon, M.; Hoffmeister, H.; Gnauck, P.
Zeitschriftenaufsatz
2005Effekte bei der Nanostrukturierung mittels fokussierter Ionenstrahlen
Lehrer, C.
Dissertation
2005An electron microscope study of the in situ interaction between CaF2-like precipitates and dental enamel surfaces
Petzold, M.; Berthold, L.; Cismak, A.; Wohlfart-Zhou, J.; Schaller, H.-G.
Zeitschriftenaufsatz
2003FIB-Zielpräparation von TEM-Proben mittels Nadelmanipulationstechnik
Altmann, F.
Zeitschriftenaufsatz
1996Tetramethoxysilane as a precursor for focused ion beam and electron beam assisted insulator (SiO(x)) deposition
Lipp, S.; Frey, L.; Lehrer, C.; Frank, B.; Demm, E.; Pauthner, S.; Ryssel, H.
Zeitschriftenaufsatz
1995Local material removal by focused ion beam milling and etching
Lipp, S.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Zeitschriftenaufsatz
1995Local material removal by focused ion beam milling and etching
Lipp, K.; Frey, L.; Franz, G.; Demm, E.; Petersen, S.; Ryssel, H.
Konferenzbeitrag