Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2016Inverse image modeling for defect detection and optical system characterization
Xu, Dongbo
: Erdmann, Andreas
Dissertation
2004Frequency scaling in a hollow-cathode-triggered pinch plasma as radiation source in the extreme ultraviolet
Rosier, O.; Apetz, R.; Bergmann, K.; Jonkers, J.; Wester, R.; Neff, W.; Pankert, J.
Zeitschriftenaufsatz
2001A multi-kilohertz pinch plasma radiation source for extreme ultraviolet lithography
Bergmann, K.; Rosier, O.; Lebert, R.; Neff, W.; Poprawe, R.
Zeitschriftenaufsatz