Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2015Optical elements for EUV lithography and X-ray optics
Braun, Stefan; Leson, Andreas
Aufsatz in Buch
2004Combination of X-ray reflectometry and optical spectroscopy as a new tool for thin films parameter determination
Pflug, A.; Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.
1995Investigation of the thermal stability of NI/C multilayers by X-ray methods
Krawietz, R.; Wehner, B.; Meyer, D.; Richter, K.; Mai, H.; Dietsch, R.; Hopfe, S.; Scholz, R.; Pompe, W.
1994Thermal ageiing of Ni/C multilayers prepared by pulsed laser deposition
Krawietz, R.; Wehner, B.; Kallis, N.; Dietsch, R.; Mai, H.
1993Investigation of thermal aging of Ni/C-multilayers by X-ray methods.
Krawietz, R.; Wehner, B.; Sebald, T.; Mai, H.; Dietsch, R.