Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Strukturierungsverfahren
Fader, Robert; Lorenz, Jürgen; Rommel, Mathias; Baum, Mario; Danylyuk, Serhiy; Gillner, Arnold; Stollenwerk, Jochen; Bläsi, Benedikt
Aufsatz in Buch
2016Hybrid polymers processed by substrate conformal imprint lithography for the fabrication of planar Bragg gratings
Förthner, Michael; Rumler, Maximilian; Stumpf, Florian; Fader, Robert; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Zeitschriftenaufsatz
2016Stamps for nanoimprint lithography - R&D at Fraunhofer IISB
Rommel, Mathias; Rumler, Maximilian; Förthner, Michael; Scharin, Marina; Fader, R.; Schmidt, H.
Vortrag
2015Comparison of surface relief Bragg gratings fabricated by UV-SCIL and volume index Bragg gratings based on hybrid polymers
Förthner, Michael; Rumler, Maximilian; Michel, Felix; Rommel, Mathias; Frey, Lothar; Girschikofsky, Maiko; Belle, Stefan; Hellmann, Ralf; Klein, Jan Jasper
Poster
2015Large area fabrication of hybrid polymer waveguides for planar Bragg grating sensors using UV-enhanced Substrate Conformal Imprint Lithography (UV-SCIL)
Förthner, Michael; Fader, Robert; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar; Girschikofsky, M.; Belle, S.; Hellmann, R.; Klein, Jan Jasper
Poster
2013Evaluation of UV-SCIL resists for structure transfer using plasma etching
Rumler, Maximilian; Rusch, O.; Fader, Robert; Haas, Anke; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Brehm, Markus; Kraft, Andreas
Poster
2012Functional epoxy polymer for direct nano-imprinting of micro optical elements
Fader, Robert; Landwehr Johannes; Rumler, Maximilian; Rommel, Mathias; Bauer, Anton J.; Frey, Lothar; Völkel, Reinhard; Brehm, Markus; Kraft, Andreas
Poster
2012Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Zeitschriftenaufsatz, Konferenzbeitrag
2011Life time evaluation of PDMS stamps for UV-enhanced substrate conformal imprint lithography
Schmitt, H.; Duempelmann, P.; Fader, R.; Rommel, M.; Bauer, A.J.; Frey, L.; Brehm, M.; Kraft, A.
Poster