Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1995In situ real-time temperature and thickness measurement for Si/SiGe growth on MBE and RTCVD systems
Möller, H.; Böbel, F.G.; Hertel, B.; Lindenberg, T.; Ritter, G.
Konferenzbeitrag
1994In situ film thickness and temperature monitoring of MBE-growth of vertical cavity surface emitting lasers (VCSELs) by reflexion supported pyrometric interferometry (RSPI)
Böbel, F.G.
Buch
1989Beryllium and manganese diffusion in Ga0.47In0.53As during MBE-growth
Kunzel, H.; Bochnia, R.; Gibis, R.; Harde, P.; Passenberg, W.
Konferenzbeitrag