Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Roughness characterization of EUV multilayer coatings and ultra-smooth surfaces by light scattering
Trost, Marcus; Schröder, Sven; Lin, C.C.; Duparré, Angela; Tünnermann, Andreas
Konferenzbeitrag
2011Efficient specification and characterization of surface roughness for extreme ultraviolet optics
Schröder, S.; Trost, M.; Feigl, T.; Duparre, A.; Harvey, J.E.
Konferenzbeitrag
2008Accelerated lifetime metrology of EUV multilayer mirrors in hydrocarbon environments
Hill, S.B.; Faradzhev, N.S.; Tarrio, C.; Lucatorto, T.B.; Madey, T.E.; Yakshinskiy, B.V.; Loginova, E.; Yulin, S.
Konferenzbeitrag