Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2020In-Plane Oriented Stacks of c-AlScN/Mo (110) for BAW Resonators Grown by Magnetron Sputter Epitaxy
Sundarapandian, Balasubramanian; Kessel, Matthias; Zukauskaite, Agne; Kirste, Lutz; Sun, Cheng; Ambacher, Oliver
Konferenzbeitrag
2020Non-Polar a-plane AlScN(1120) Thin Film Based SAW Resonantors with Significantly Improved Electromechanical Coupling
Ding, Anli; Driad, Rachid; Lu, Yuan; Feil, Niclas M.; Kirste, Lutz; Christoph, Tim; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2020Novel Method for Extracting Material Constants of Epitaxial Wurtzite AlScN Films on Sapphire Using Higher Order Surface Acoustic Wave Modes
Feil, Niclas M.; Mayer, Elena; Christian, Björn; Ding, Anli; Zukauskaite, Agne; Ambacher, Oliver
Konferenzbeitrag
2019Experimental determination of Al1-xScxN thin film thermo-electro-acoustic properties up to 140°C by using SAW resonators
Ding, Anli; Kurz, Nicolas; Driad, Rachid; Lu, Yuan; Lozar, Roger; Christoph, Tim; Kirste, Lutz; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2019Finite element analysis of SAW propagation characteristics in c-plane (0001) and a-plane (11-20) ALScN thin films
Feil, Niclas M.; Kurz, Nicolas; Urban, Daniel F.; Altayara, Abdullah; Bjoern, Christian; Ding, Anli; Zukauskaite, Agne; Ambacher, Oliver
Konferenzbeitrag
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Konferenzbeitrag
2017Energy harvesting based on piezoelectric AlN and AlScN thin films deposited by high rate sputtering
Frach, Peter; Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel
Konferenzbeitrag
2014Effect of process parameters on structure and piezoelectric properties of AlN and AlXSc1-XN films deposited by pulsed magnetron sputtering
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Zywitzki, Olaf; Herzog, Thomas; Walter, Susan; Heuer, Henning
Konferenzbeitrag
2013Sputter deposition of stress controlled piezoelectric AlN and AlScN films for ultrasonic and energy harvesting applications
Barth, Stephan; Bartzsch, Hagen; Glöß, Daniel; Frach, Peter; Herzog, Thomas; Walter, Susan; Heuer, Henning
Konferenzbeitrag