Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008High power pulsed magnetron sputtering of transparent conducting oxides
Sittinger, V.; Ruske, F.; Werner, W.; Jacobs, C.; Szyszka, B.; Christie, D.J.
Zeitschriftenaufsatz
2008Reactive deposition of aluminium-doped zinc oxide thin films using high power pulsed magnetron sputtering
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Zeitschriftenaufsatz
2006Reactive deposition of Al-doped ZnO thin films using high power pulsed magnetron sputtering (HPPMS)
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.; Christie, D.J.
Konferenzbeitrag
2004Transparent conductive ZnO:Al thin films prepared by in-line reactive mid-frequency magnetron sputtering
Hong, R.
Dissertation
2003Studies on ZnO:Al thin films deposited by in-line reactive mid-frequency magnetron sputtering
Hong, R.J.; Jiang, X.; Szyszka, B.; Sittinger, V.; Pflug, A.
Zeitschriftenaufsatz