Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2002Enhancements in rigorous simulation of light diffraction from phase-shift masks
Erdmann, A.; Kachwala, N.
Conference Paper
1987Simulation of the modulation transfer function of a projecting optical system
Reden, W. von; Sinnig, T.
Journal Article