Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2003Impedance Control of Reactive Sputtering Process in Mid-Frequency Mode with Dual Cathodes to Deposit Al-Doped ZnO Films
Kon, M.; Song, P.K.; Shigesato, Y.; Frach, P.; Ohno, S.; Suzuki, K.
Journal Article
1998Electrical and optical properties of indium tin oxide thin films deposited with plasma ion-assistance
Laux, S.; Kaiser, N.; Zöllner, A.; Götzelmann, R.; Lauth, H.; Bernitzki, H.
Conference Paper