Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1998Noncontacting measurement of thickness of thin titanium silicide films using spectroscopic ellipsometry
Kal, S.; Kasko, I.; Ryssel, H.
Journal Article
1997Characterization of thin TiSi2 films by spectroscopic ellipsometry and thermal wave analysis
Kasko, I.; Kal, S.; Ryssel, H.
Conference Paper