Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2013Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J.
Journal Article
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Journal Article
2011Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W.
Journal Article
2010Temperature dependence of the sticking coefficient in atomic layer deposition
Rose, M.; Bartha, J.W.; Endler, I.
Journal Article
2009Comparative study on the photocatalytic behaviour of titanium oxide thermal sprayed coatings from powders and suspensions
Toma, F.-L.; Berger, L.M.; Jacquet, D.; Wicky, D.; Villaluenga, I.; Miguel, Y.R. de; Lindelov, J.S.
Journal Article
2009Suspension characterization as important key for toxicological investigations
Meißner, T.; Potthoff, A.; Richter, V.
Conference Paper
2008Korrosion thermisch gespritzter Schichten auf der Basis von Aluminiumoxid
Stahr, C.C.; Berger, L.-M.; Toma, F.-L.; Herrmann, M.; Deska, D.; Michael, G.
Journal Article
1998Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
Kirchhoff, V.; Kopte, T.; Winkler, T.; Schulze, M.; Wiedemuth, P.
Conference Paper
1997Titanium monophosphide (TiP) layers as potential diffusion barriers
Leutenecker, R.; Fröschle, B.; Ramm, P.
Journal Article