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| 2013 | Detailed leakage current analysis of metal-insulator-metal capacitors with ZrO2, ZrO2/SiO2/ZrO2, and ZrO2/Al2O3/ZrO2 as dielectric and TiN electrodes
Weinreich, W.; Shariq, A.; Seidel, K.; Sundqvist, J.; Paskaleva, A.; Lemberger, M.; Bauer, A.J. | Journal Article, Conference Paper |
| 2013 | Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J. | Journal Article |
| 2011 | Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W. | Journal Article |
| 2010 | Temperature dependence of the sticking coefficient in atomic layer deposition
Rose, M.; Bartha, J.W.; Endler, I. | Journal Article |
| 2009 | Comparative study on the photocatalytic behaviour of titanium oxide thermal sprayed coatings from powders and suspensions
Toma, F.-L.; Berger, L.M.; Jacquet, D.; Wicky, D.; Villaluenga, I.; Miguel, Y.R. de; Lindelov, J.S. | Journal Article, Conference Paper |
| 2009 | Suspension characterization as important key for toxicological investigations
Meißner, T.; Potthoff, A.; Richter, V. | Conference Paper |
| 2008 | Korrosion thermisch gespritzter Schichten auf der Basis von Aluminiumoxid
Stahr, C.C.; Berger, L.-M.; Toma, F.-L.; Herrmann, M.; Deska, D.; Michael, G. | Journal Article |
| 1998 | Dual magnetron sputtering (DMS) system with sine-wave power supply for large-area coating
Kirchhoff, V.; Kopte, T.; Winkler, T.; Schulze, M.; Wiedemuth, P. | Conference Paper, Journal Article |
| 1997 | Titanium monophosphide (TiP) layers as potential diffusion barriers
Leutenecker, R.; Fröschle, B.; Ramm, P. | Conference Paper |