Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators
Kurz, N.; Ding, A.; Urban, F.D.; Lu, Y.; Kirste, L.; Feil, N.M.; Zukauskaitė, A.; Ambacher, O.
Journal Article
2017Direct laser interference patterning, 20 years of development: From the basics to industrial applications
Lasagni, Andrés-Fabián; Gachot, Carsten; Trinh, Kim E.; Hans, Michael; Rosenkranz, Andreas; Roch, Teja; Eckhardt, Sebastian; Kunze, Tim; Bieda, Matthias; Günther, Denise; Lang, Valentin; Mücklich, Frank
Conference Paper
2017Entwicklung von Werkzeugbeschichtungen für die Hochtemperatur-Titanumformung
Abraham, T.; Weber, M.; Keunecke, M.; Stein, C.; Weirauch, R.; Grahs, M.; Bräuer, G.
Journal Article
2016From evaporation-induced self-assembly to shear-induced alignment
Srikantharajah, Rubitha; Schindler, Torben; Landwehr, Inga; Romeis, Stefan; Unruh, Tobias; Peukert, Wolfgang
Journal Article
2016Kontinuierliche Verschleißmessung in Echtzeit mit einem modifizierten Kalottenschleifgerät
Bethke, R.; Nöcker, N.; Menzel, R.; Eder, M.
Conference Paper
2016Mechanical characterization of porous nano-thin films by use of atomic force acoustic microscopy
Kopycinska-Müller, Malgorzata; Clausner, André; Yeap, Kong Boon Oon; Köhler, Bernd; Kuzeyeva, Nataliya; Mahajan, Sukesh; Savage, Travis; Zschech, Ehrenfried; Wolter, Klaus-Jürgen
Journal Article
2016Nanostructure, thermoelectric properties, and transport theory of V2VI3 and V2VI3/IV–VI based superlattices and nanomaterials
Dankwort, Torben; Hansen, Anna-Lena; Winkler, Markus; Schürmann, Ulrich; König, Jan D.; Johnson, David C.; Hinsche, Nicki; Zahn, Peter; Mertig, Ingrid; Bensch, Wolfgang; Kienle, Lorenz
Journal Article
2015Flash lamp annealing of ITO thin films on ultra-thin glass
Weller, Stephanie; Junghähnel, Manuela
Journal Article
2015Light management in flexible thin-film solar cells - the role of nanoimprinted textures and tilted surfaces
Wilken, Karen; Paetzold, Ulrich W.; Meier, Matthias; Smeets, Michael; Prager, Nicole; Fahland, Matthias; Finger, Friedhelm; Smirnov, Vladimir
Journal Article
2015Nanoimprint texturing of transparent flexible substrates for improved light management in thin-film solar cells
Wilken, Karen; Paetzold, Ulrich W.; Meier, Matthias; Prager, Nicole; Fahland, Matthias; Finger, Friedhelm; Smirnov, Vladimir
Journal Article
2015Photocatalytic properties of TiO2 thin films modified with Ag and Pt nanoparticles deposited by gas flow sputtering
Maicu, Marina; Glöß, Daniel; Frach, Peter; Hecker, Dominic; Gerlach, Gerald; Cordoba, Jose M.
Journal Article
2015Practice-oriented optical thin film growth simulation via multiple scale approach
Turowski, M.; Jupé, M.; Melzig, T.; Moskovkin, P.; Daniel, A.; Pflug, A.; Lucas, S.; Ristau, D.
Journal Article, Conference Paper
2015Selective absorption of carbon nanotube thin films for solar energy applications
Abendroth, Thomas; Althues, Holger; Mäder, Gerrit; Kaskel, Stefan; Beyer, Eckhard
Journal Article
2015Simulation in thin film technology
Turowski, M.; Jupe, M.; Ehlers, H.; Melzig, T.; Pflug, A.; Ristau, D.
Conference Paper
2015The synthesis, structure, and electrical characterization of (SnSe)(1.2)TiSe2
Merrill, D.R.; Moore, D.B.; Ditto, J.; Sutherland, D.R.; Falmbigl, M.; Winkler, M.; Pernau, H.F.; Johnson, D.C.
Journal Article
2014Actinic damage of Y/Mo multilayer optics in a table-top plasma-driven x-ray laser
Bleiner, David; Yulin, Sergiy; Martynczuk, Julia; Ruiz-Lopez, Mabel; Arbelo, Yunieski; Balmer, Jürg E.; Günther, Detlef
Journal Article
2014Characterization of optical coatings using a multisource table-top scatterometer
Finck, Alexander von; Herffurth, Tobias; Schröder, Sven; Duparré, Angela; Sinzinger, Stefan
Journal Article
2014Effect of oxygen vacancies on the laser-induced damage resistance of Y0.26Hf0.74Ox thin films
Chen, Xiaoying; Zhao, Lili; Fu, Xinji; You, Lijun; Stenzel, Olaf; Kämmer, Helena; Dreisow, Felix; Nolte, Stefan; Song, Lixin
Journal Article
2014Thickness effect on the structural and electrical properties of poly-SiGe films
Asafa, T.B.; Witvrouw, Ann; Schneider, Dieter; Moussa, Alain; Tabet, N.; Said, Syed Ahmad M.
Journal Article
2013Assessment criteria for superhydrophobic surfaces with stochastic roughness
Duparré, Angela; Coriand, Luisa
Book Article
2013Lifetime measurements of crystalline silicon thin films by microwave photo conductance decay
Rachow, T.; Flatten, L.; Schillinger, K.; Janz, S.; Reber, S.
Conference Paper
2013Stability and annealing of alucones and alucone alloys
Ghazaryan, Lilit; Kley, Ernst-Bernhard; Tünnermann, Andreas; Szeghalmi, Adriana Viorica
Journal Article
2013Structural properties of as deposited and annealed ZrO2 influenced by atomic layer deposition, substrate, and doping
Weinreich, W.; Wilde, L.; Müller, J.; Sundqvist, J.; Erben, E.; Heitmann, J.; Lemberger, M.; Bauer, A.J.
Journal Article
2012Electrical and structural properties of Bi2Te3 and Sb2Te3 thin films grown by the nanoalloying method with different deposition patterns and compositions
Winkler, M.; Liu, X.; König, J.; Buller, S.; Schürmann, U.; Kienle, L.; Bensch, W.; Böttner, H.
Journal Article
2012Fabrication and evaluation of SixNy coatings for total joint replacements
Olofsson, J.; Pettersson, M.; Teuscher, N.; Heilmann, A.; Larsson, K.; Grandfield, K.; Persson, C.; Jacobson, S.; Engqvist, H.
Journal Article
2012Material characterization to model linear viscoelastic behavior of thin organic polymer films in microelectronics
Unterhofer, K.; Preu, H.; Walter, J.; Lorenz, G.; Mack, W.; Petzold, M.
Conference Paper
2012Room temperature MBE deposition of Bi2Te3 and Sb2Te3 thin films with low charge carrier densities
Peranio, N.; Winkler, M.; Aabdin, Z.; König, J.; Böttner, H.; Eibl, O.
Journal Article
2012Sb2Te3 and Bi2Te3 thin films grown by room-temperature MBE
Aabdin, Z.; Peranio, N.; Winkler, M.; Bessas, D.; König, J.; Hermann, R.P.; Böttner, H.; Eibl, O.
Journal Article, Conference Paper
2012Soft x-ray reflectometry, hard x-ray photoelectron spectroscopy and transmission electron microscopy investigations of the internal structure of TiO2(Ti)/SiO2/Si stacks
Filatova, E.O.; Kozhevnikov, I.V.; Sokolov, A.A.; Ubyivovk, E.V.; Yulin, S.; Gorgoi, M.; Schäfers, F.
Journal Article
2012Wet chemical preparation of YVO4:Eu thin films as red-emitting phosphor layers for fully transparent flat dielectric discharge lamp
Klausch, A.; Althues, H.; Freudenberg, T.; Kaskel, S.
Journal Article
2011Determination of adhesive forces and sticking temperature of coated glasses for the hot-embossing-process
Worsch, C.; Edelmann, J.; Rüssel, C.; Schubert, A.
Journal Article
2011High-Performance Heating Elements
Nemec, Dominik
Conference Paper
2010Zinc oxide based transparent electrodes for flexible thin film devices
Fahland, M.; Vogt, T.; Schönberger, A.
Conference Paper
2009The stability of C60 and its derivatives upon handling in microsystems technologies
Klocek, Jolanta; Friedrich, Daniel; Schmeißer, Dieter; Hecker, Michael; Zschech, Ehrenfried
Conference Paper
2008Logistical performance measurement of photovoltaic manufacturing lines
Reddig, Kevin; Kischlat, Kay; Böttinger, Fabian
Conference Paper
2008Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Neugebauer, Reimund; Edelmann, J.; Rüssel, C.
Book Article
2007Instrument for the Measurement of EUV Reflectance and Scattering - MERLIN
Schröder, S.; Kamprath, M.; Gliech, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007Roughness evolution and scatter losses of multilayers for 193 nm
Schröder, S.; Duparre, A.; Tünnermann, A.
Conference Paper
2007UV-VIS-NIR scatter measurement methods for ultra precision surfaces and coatings
Gliech, S.; Wendt, R.; Duparre, A.
Conference Paper
2000Studies on phase transformations of Cu-phthalocyanine thin films
Berger, O.; Fischer, W.-J.; Adolphi, B.; Tierbach, S.; Melov, V.G.; Schreiber, J.
Journal Article
1999Comparative study of the roughness of optical surfaces and thin films by x-ray scattering and atomic force microscopy
Asadchikov, V.E.; Duparre, A.; Jakobs, S.; Karabekov, Y.; Kozhevnikov, I.V.
Journal Article
1999Ion-assisted deposition of oxide materials at room temperature by use of different ion sources
Niederwald, H.S.; Laux, S.; Kennedy, M.; Schallenberg, U.; Duparre, A.; Kaiser, N.; Ristau, D.
Journal Article
1999Laser damage of optical coatings from UV to deep UV at 193 nm
Dijon, J.; Quesnel, E.; Pelle, C.; Thielsch, R.
Conference Paper
1999Lateral Force Microscopy using Acoustic Friction Force Microscopy
Scherer, V.; Arnold, W.; Bhushan, B.
Journal Article
1999Study on the Relationship between the Thermal Properties of CuNiSi Thin Films and Adding Amount of Rare Earth Elements
Wang, J.; Mao, D.; Wu, J.; Zhang, L.; Netzelmann, U.; Zhang, H.
Journal Article
1999X-ray and AFM studies of ultrthin films for EUV and soft X-ray applications
Asadchikov, V.E.; Duparre, A.; Kozhevnikov, I.V.; Krivonosov, Y.S.; Sagitov, S.I.
Conference Paper
1998Charakterisierung ferromagnetisch dünner Schichten mit Hilfe der Barkhausenrausch-Mikroskopie
Altpeter, I.; Hoffmann, J.; Nichtl-Pecher, W.; Grimm, H.
Conference Paper
1998Deposition of carbon nitride thin films in a hybrid r.f.-PLD technique
Klotzbücher, T.; Scherge, M.; Mergens, M.; Wesner, D.A.; Kreutz, E.W.
Journal Article
1997Beschichtungen zur Verminderung der Umweltbelastung bei Umformprozessen
Taube, K.
Conference Paper
1997Beschichtungen zur Verminderung der Umweltbelastung bei Umformprozessen
Taube, K.; Straehler, B.
Conference Paper
1997Electron field emission from thin fine-grained CVD diamond films
Lacher, F.; Wild, C.; Behr, D.; Koidl, P.
Journal Article
1997Influence of substrate surface and film roughness on the quality of optical coatings for the UV spectral region
Duparre, A.; Jakobs, S.; Kaiser, N.
Conference Paper
1997The selective etching of H+ ions and its effect on the oriented growth of diamond films
Jiang, X.; Xia, Y.B.; Zhang, W.J.
Journal Article
1996Adhesion and film structure of cyanurates on solids
Possart, W.; Dieckhoff, S.; Gesang, T.; Schlett, V.; Hennemann, O.-D.
Conference Paper
1996The analysis of surface-adsorbed organic molecules by alkali-assisted MIES combined with UPS(Hel)
Günster, J.; Ochs, D.; Dieckhoff, S.; Schlett, V.
Journal Article
1996Barriereeigenschaften von flexiblen Packstoffen
Langowski, H.-C.
Conference Paper
1996Carbon-based coatings for dry sheet metal working
Taube, K.
Conference Paper
1996Characterization of triazine derivatives on silicon wafers studied by photoelectron spectroscopy (XPS, UPS) and metastable impact electron spectroscopy (MIES)
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V.
Journal Article
1996Electroluminescence in thin films
Mauch, R.H.
Conference Paper, Journal Article
1996Indentation cracking of brittle thin films on brittle substrates
Weppelmann, E.; Wittling, M.; Swain, M.V.; Munz, D.
Conference Paper
1996Luminescence properties of SrS:Ce thin films
Hüttl, B.; Velthaus, K.-O.; Troppenz, U.; Kreissl, J.; Mauch, R.H.
Conference Paper
1996Material characterisation of SrS:Ce,Mn,Cl films
Troppenz, U.; Bilger, G.; Bohne, W.; Gers, G.; Kreissl, J.; Mauch, R.-H.; Sieber, K.; Velthaus, K.O.
Conference Paper
1995Elektronenspektroskopische Charakterisierung der Adhäsion von Triazinderivaten und Cyansäureestern auf Siliziumoberflächen
Dieckhoff, S.
Dissertation
1995Improvements in a-C film properties by metal incorporation and intermediate layers
Eckel, M.; Kampschulte, G.; Markschläger, P.
Journal Article
1995Improvements in a-C film properties by metal incorporation and intermediate layers
Eckel, M.; Kampschulte, G.; Markschläger, P.
Conference Paper
1995Investigation of the thermal stability of NI/C multilayers by X-ray methods
Krawietz, R.; Wehner, B.; Meyer, D.; Richter, K.; Mai, H.; Dietsch, R.; Hopfe, S.; Scholz, R.; Pompe, W.
Conference Paper
1995Laser radiation. A tool for generation of defined thin film properties for application
Kreutz, E.W.; Alunovic, M.; Klotzbücher, T.; Mertin, M.; Wesner, D.A.; Pfleging, W.
Journal Article
1995Light scattering of thin dielectric films
Duparre, A.
Book Article
1995Pulsed laser deposition - an advanced state for technical applications
Dietsch, R.; Holz, T.; Mai, H.; Panzner, M.; Völlmar, S.
Journal Article
1995Thin metal and SiOx films deposited by the anodic vacuum arc technique
Eckel, M.; Kampschulte, G.; Markschläger, P.; Morlok, O.
Journal Article
1995Thin metal and SiOx films deposited by the anodic vacuum arc technique
Eckel, M.; Kampschulte, G.; Markschläger, P.; Morlok, O.
Conference Paper
1995XPS studies of thin polycyanurate films on silicon wafers
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.
Journal Article
1995XPS studies of thin polycyanurate films on silicon wafers and aluminium substrates
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.
Conference Paper
1994Adsorption and growth of polycyanurate films on silicon wafers and aluminium substrates
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.
Conference Paper
1994Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D.
Conference Paper
1994Description of transfer and deposition during PLD of thin ceramic films
Alunovic, M.; Kreutz, E.W.; Voss, A.; Aden, M.; Sung, H.
Journal Article
1994Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.
Wittkampf, M.; Naendorf, B.; Cammann, K.; Rospert, M.; Mokwa, W.; Hagenhoff, B.; Benninghoven, A.; Amrein, M.; Reichelt, R.; Gründig, B.
Conference Paper
1994Eigenspannungen in der Dünnschichttechnik
Schultrich, B.
Journal Article
1994Improvement of carbon-based coatings for use in the cold forming of non-ferrous metals
Taube, K.; Grischke, M.; Bewilogua, K.
Conference Paper
1994Limitations of the electro-optic response of thin potassium tantalate niobate (KTN) films caused by ferroelectric hysteresis behavior
Gerhard-Multhaupt, R.; Yilmaz, S.; Bauer, S.; Ren, W.
Conference Paper, Journal Article
1994Material selection for thin film thermocouples operating at extremely high temperatures
Bewilogua, K.; Hübsch, H.; Bethke, R.; Willich, P.; Dieckmann, M.; Bugeat, J.-P.
Conference Paper
1994Residual stress in Ni and C monolayers and multilayers produced by pulsed laser deposition
Kallis, N.; Mai, H.
Conference Paper
1994Theoretical description of pulse laser deposition as a new thin film technique
Völlmar, S.; Mai, H.; Dietsch, R.; Granse, G.; Lenk, A.
Conference Paper
1993Electron probe microanalysis of submicron coatings containing ultralight elements
Willich, P.; Bethke, R.
Conference Paper
1993Elektronenstrahl-Mikroanalyse zur Charakterisierung dünner Schichten
Willich, P.; Bethke, R.; Schiffmann, K.I.
Journal Article
1993Gas sensors based on ion implanted SnO2 thin-films.
Steiner, K.; Sulz, G.; Schweizer, W.; Wagner, E.
Conference Paper
1993Investigation of thermal aging of Ni/C-multilayers by X-ray methods.
Krawietz, R.; Wehner, B.; Sebald, T.; Mai, H.; Dietsch, R.
Conference Proceedings
1993A modified plasma source for controlled layer thickness synthesis in laser pulse vapour deposition -LPVD-.
Dietsch, R.; Mai, H.; Pompe, W.; Völlmar, S.
Conference Paper
1993A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J.
Conference Paper
1993Performance of thin film solar cells under realistic reporting conditions including degradation effects
Kleiss, G.; Bücher, K.; Raicu, A.; Heidler, K.
Conference Paper
1993SPM investigation of metal/carbon-multilayer surfaces prepared by pulsed laser deposition -PLD-.
Dietsch, R.; Eichler, H.; Mai, H.; Pompe, W.
Conference Proceedings
1993X-ray analysis of residual stress gradients and textures in thin coatings
Schubert, A.; Kämpfe, B.; Auerswald, E.; Michel, B.
Conference Paper
1993X-ray analysis of residual stress gradients and textures in thin coatings
Schubert, A.; Kämpfe, B.; Auerswald, E.
Conference Paper
1992Analytical observations and depth profile simulation in regular-d and graded-d metal/carbon multilayers prepared by laser pulse vapour deposition.
Dietsch, R.; Hopfe, S.; Mai, H.; Oertel, G.; Pompe, W.; Prokop, M.; Schöneich, B.; Völlmar, S.; Wehner, B.; Weißbrodt, P.; Werner, P.
Conference Paper
1992Effect of process parameters on the residual stresses and the wear behavior of aluminium nitride physical vapor deposition coatings.
Kleer, G.; Kassner, R.; Meyer, E.-M.; Schinker, M.G.; Döll, W.
Journal Article
1992Implanted thin-film SnO2 gas sensors.
Sulz, G.; Löw, H.; Lacher, M.; Kühner, G.; Reiter, H.; Uptmoor, G.; Schweizer, W.; Steiner, K.
Conference Paper
1992Laser induced sputtering of insulators
Panzner, M.; Pompe, W.; Schöneich, B.; Völlmar, S.
Journal Article, Conference Paper
1992Laser pulse vapour deposition of metal-carbon superlattices for soft X-ray mirror applications
Dietsch, R.; Mai, H.; Pompe, W.; Schöneich, B.; Völlmar, S.; Hopfe, S.; Scholz, R.; Wehner, B.; Weißbrodt, P.; Wendrock, H.
Conference Paper
1992Laseroberflächenverfahren für Funktions- und Schutzschichten
Nowotny, S.; Pompe, W.; Reitzenstein, W.; Schultrich, B.
Journal Article
1992Measurement of mechanical properties of thin solid films -hardness, elasticity, stress-
Taube, K.
Conference Paper
1992Multischichten für die Optik im weichen Röntgengebiet
Dietsch, R.; Mai, H.; Pompe, W.; Völlmar, S.
Conference Paper
1992Ni, In and Sb implanted Pt and V catalysed thin-film SnO2 gas sensors
Sulz, G.; Kühner, G.; Reiter, H.; Uptmoor, G.; Schweizer, W.; Löw, H.; Lacher, M.; Steiner, K.
Conference Paper
1992Preparation of soft X-ray monochromators by laser pulse vapour deposition -LPVD-
Mai, H.; Dietsch, R.; Pompe, W.
Conference Paper
1992Programs for data processing of electron probe microanalysis applied to thin films and multilayers
Willich, P.; Schiffmann, K.I.
Conference Paper
1992Simultane Bestimmung von Schichtdicke und Zusammensetzung bei dünnen Filmen und Mehrschichtsystemen mit Hilfe der Elektronenstrahl-Mikrosonde
Schiffmann, K.I.
Conference Paper
1992Stress compensation techniques in thin layers applied to silicon micromachining
Mück, G.; Bausells, J.; Csepregi, L.; Moldovan, N.; Suski, J.; Lang, W.
Conference Proceedings
1992Thin-film In-doped V-catalysed SnO2 gas sensors.
Löw, H.; Sulz, G.; Lacher, M.; Kühner, G.; Uptmoor, G.; Reiter, H.; Steiner, K.
Journal Article
1991Characterization of thin films and multilayers by use of electron beam excited X-ray spectrometry
Willich, P.
Book
1991Electron probe microanalysis of Y-Ba-Cu-O superconducting materials
Willich, P.
Book
1990Epitaxial growth of thin films studies by molecular dynamics simulation
Rahman, A.; Schneider, M.; Schuller, I.K.
Journal Article
1990Reliability investigations of thin film metallizations on AlN-ceramics
Bonfert, D.; Drost, A.; Feil, M.
Conference Paper
1989Characterization of thermal and deposited thin oxide layers by LO-TO excitation in FTIR-transmission measurements
Lange, P.; Windbracke, W.
Journal Article
1989Effects in sputtered Y1Ba2Cu3O7-8 films
Springholz, G.; Aichholzer, K.; Abt, R.; Leising, G.; Leitner, O.; Kranebitter, P.; Pölt, P.
Journal Article
1989Interference effects in the Raman scattering intensity from thin films.
Ramsteiner, M.; Wagner, J.; Wild, C.
Journal Article