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| 2013 | Superiority of ion irradiation over annealing for enhancing the thermopower of PbTe thin films
Gupta, S.; Agarwal, D.C.; Tripathi, S.K.; Neeleshwar, S.; Panigrahi, B.K.; Jacquot, A.; Lenoir, B.; Avasthi, D.K. | Journal Article |
| 2013 | Theoretical and experimental advances in Bi2Te3 / Sb2Te3 - based and related superlattice systems
Winkler, M.; Liu, X.; Schürmann, U.; König, J.D.; Kienle, L.; Böttner, H. | Conference Paper |
| 2012 | Electrochemistry of nanocrystalline 3C silicon carbide films
Yang, N.; Zhuang, H.; Hoffmann, R.; Smirnov, W.; Hees, J.; Jiang, X.; Nebel, C.E. | Journal Article |
| 2012 | Fine line conductors in LTCC
Uhlig, P.; Stoepel, D.; Mueller, J.; Mosch, S. | Conference Paper |
| 2012 | Miniaturized thermoelectric converters, technologies, and applications
Böttner, Harald; Nurnus, Joachim | Book Article |
| 2011 | Determination of fracture toughness of bulk materials and thin films by nanoindentation
Schiffmann, K.I. | Journal Article |
| 2011 | Miniaturised gas chromatographic system with metal oxide gas sensor array for fast detection of off-flavors
Bauersfeld, M.-L.; Bücking, M.; Bruckert, J.; Wöllenstein, J. | Conference Paper |
| 2010 | Correlation between composition and stress for high density plasma CVD silicon nitride films
Sah, R.E.; Baumann, H.; Driad, R.; Wagner, J. | Journal Article |
| 2010 | A journey from ancient China bronze mirrors to picometer shaped interference coatings
Kaiser, N.; Bischoff, M.; Feigl, T.; Schulz, U.; Yulin, S. | Journal Article |
| 2010 | Measurement uncertainties in thermoelectric materials
Jacquot, Alexandre; Pernau, Hans-Fridtjof; König, Jan; Nussel, Ulrike; Bartel, Markus; Ebling, Dirk; Jägle, Martin | Conference Paper |
| 2010 | Micro structuring of inorganic glass by hot embossing of coated glass wafers
Edelmann, J.; Worsch, C.; Schubert, A.; Rüssel, C. | Journal Article |
| 2010 | Net optical gain in a plasmonic waveguide embedded in a fluorescent polymer
Gather, M.; Meerholz, K.; Danz, N.; Leosson, K. | Journal Article |
| 2010 | PvcomB - Thin Film Workshop in Berlin
Holeczek, Harald | Journal Article, Conference Paper |
| 2010 | Time domain characteristics of electrical measures for a piezoelectric thin film to identify defects in the substrate
Ali, R.; Mahapatra, D.R.; Gopalakrishnan, S. | Journal Article |
| 2009 | Atomistic study of structure and stability of thin Ni films on Fe surfaces
Hashibon, A.; Schravendijk, P.; Elsässer, C.; Gumbsch, P. | Journal Article |
| 2009 | A comparative study on the photocatalytic and gas sensing properties of pure and N-doped TiO2 thin films
Delan, A.; Karuppasamy, A.; Schultheiß, E. | Journal Article, Conference Paper |
| 2009 | Comparison of mechanical behaviour of thin film simulated by discrete dislocation dynamics and continuum crystal plasticity
Siska, F.; Weygand, D.; Forest, S.; Gumbsch, P. | Conference Paper, Journal Article |
| 2009 | Determination of the composition of In(x)Ga(1-x)N from strain measurements
Morales, F.M.; Gonzales, D.; Lozano, J.G.; García, R.; Hauguth-Frank, S.; Lebedev, V.; Cimalla, V.; Ambacher, O. | Journal Article |
| 2009 | Doppelseitiges Heißprägen von Mikrolinsenarrays
Neugebauer, Reimund; Edelmann, J. | Book Article |
| 2009 | High performance computing and discrete dislocation dynamics: Plasticity of micrometer sized specimens
Weygand, D.; Senger, J.; Motz, C.; Augustin, W.; Heuveline, V.; Gumbsch, P. | Book Article |
| 2009 | Highly dense amorphous Nb2O5 films with closed nanosized pores
Vinnichenko, M.; Rogozin, A.; Grambole, D.; Munnik, F.; Kolitsch, A.; Möller, W.; Stenzel, O.; Wilbrandt, S.; Chuvilin, A.; Kaiser, U. | Journal Article |
| 2009 | Isothermes Heißprägen von beschichteten Glaswafern
Worsch, C.; Rüssel, C.; Edelmann, J.; Schubert, A. | Journal Article |
| 2009 | Magnetically enhanced hollow cathode - a new plasma source for high-rate deposition processes
Fietzke, F.; Morgner, H.; Günther, S. | Journal Article, Conference Paper |
| 2009 | Method to determine the sticking coefficient of precursor molecules in atomic layer deposition
Rose, M.; Bartha, J.W. | Journal Article |
| 2009 | Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Edelmann, J.; Worsch, C. | Research Report |
| 2009 | Mikrostrukturierung von Glas durch Heißprägen von beschichteten Glaswafern
Neugebauer, Reimund; Rüssel, C.; Edelmann, J. | Book Article |
| 2009 | Properties of plasma polymerized thin films deposited from hexamethyldisiloxane (HMDSO) by magnetron-assisted PECVD process
Nyderle, R.; Preußner, T.; Blüthner, R.; Pavic, D. | Conference Paper |
| 2009 | Sputter deposition of strain gauges using ITO/Ag
Gerdes, H.; Bandorf, R.; Heckmann, U.; Schmidt, V.; Kricheldorf, H.-U.; Bräuer, G. | Journal Article, Conference Paper |
| 2009 | Structure and failure of Fcc/Bcc heterophase boundaries in metals
Hashibon, A.; Elsässer, C.; Gumbsch, P. | Conference Paper |
| 2009 | Ultrathin membranes in x-cut lithium niobate
Schrempel, F.; Gischkat, T.; Hartung, H.; Höche, T.; Kley, E.-B.; Tünnermann, A.; Wesch, W. | Journal Article |
| 2008 | Beschichtungsstrategie für die Heißformgebung von Glas
Edelmann, J.; Schubert, A.; Rüssel, C.; Worsch, C. | Journal Article |
| 2008 | Evaluating factory performance of photovoltaic manufacturing lines by using log data
Reddig, Kevin; Böttinger, Fabian; Fischmann, Christian; Kasperczyk, Martin | Journal Article |
| 2008 | Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation
Füchsel, K.; Schulz, U.; Kaiser, N.; Tünnermann, A. | Journal Article |
| 2008 | Optical and structural properties of LaF3 thin films
Bischoff, M.; Gäbler, D.; Kaiser, N.; Chuvilin, A.; Kaiser, U.; Tünnermann, A. | Journal Article |
| 2008 | Roughness evolution and scatter losses of multilayers for 193 nm optics
Schröder, S.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2008 | Simulation of the film formation at a high-speed rotary bell atomizer used in automotive spray painting processes
Domnick, Joachim; Yang, Z.; Ye, Qiaoyan | Conference Paper |
| 2007 | Atmospheric-pressure plasmas for wide-area thin-film deposition and etching
Hopfe, V.; Sheel, D.W. | Journal Article |
| 2007 | Comparison of thermal shifts in resonant grating waveguide structures and multilayer stacks
Leitel, R.; Stenzel, O.; Kaiser, N.; Tünnermann, A. | Conference Paper |
| 2007 | EUV multilayer optics at the Fraunhofer IOF
Kaiser, N.; Yulin, S.; Feigl, T.; Benoit, N.; Tünnermann, A. | Conference Paper |
| 2007 | EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A. | Journal Article |
| 2007 | Finite element simulations of the cyclic elastoplastic behaviour of copper thin films
Siska, F.; Forest, S.; Gumbsch, P.; Weygand, D. | Journal Article |
| 2007 | Flux of positive ions and film growth in reactive sputtering of Al-doped ZnO thin films
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Wiese, R. | Conference Paper, Journal Article |
| 2007 | High rate deposition of magnetic material by gas flow sputtering
Bandorf, R.; Bloche, A.; Ortner, K.; Lüthje, H.; Jung, T. | Conference Paper, Journal Article |
| 2007 | Low temperature deposition of indium tin oxide films by plasma ion-assisted evaporation
Füchsel, K.; Schulz, U.; Kaiser, N. | Conference Paper |
| 2007 | On-line re-engineeering of interference coatings
Wilbrandt, S.; Stenzel, O.; Kaiser, N.; Trubetskov, M.K.; Tikhonravov, A.V. | Conference Paper |
| 2007 | Planning and erecting factories for mass manufacturing of thin film photovoltaics
Reddig, Kevin; Böttinger, Fabian; Köpfli, Rolf | Conference Paper |
| 2007 | Simulation of thin film manufacturing logistics
Wertz, Roland | Conference Paper |
| 2007 | Simulations of stress-strain heterogeneities in copper thin films: Texture and substrate effects
Siska, F.; Forest, S.; Gumbsch, P. | Conference Paper, Journal Article |
| 2007 | Thin film developments for new companies
Reddig, Kevin | Conference Paper |
| 2006 | Assembly and hermetic encapsulation of wafer level secondary batteries
Marquardt, K.; Hahn, R.; Luger, T.; Reichl, H. | Conference Paper |
| 2006 | Catalytic oxidation activity of Pt3O4 surfaces and thin films
Seriani, N.; Pompe, W.; Colombi Ciacchi, L. | Journal Article |
| 2006 | Deposition and spectral performance of an inhomogeneous broadband wide-angular antireflective coating
Janicki, V.; Gäbler, D.; Wilbrandt, S.; Leitel, R.; Stenzel, O.; Kaiser, N.; Lappschies, M.; Görtz, B.; Ristau, D.; Rickers, C.; Vergöhl, M. | Journal Article |
| 2006 | Design and characterization of nanostructured ultra-hydrophobic coatings
Flemming, M.; Duparre, A. | Journal Article |
| 2006 | Design and deposition of vacuum-ultraviolet narrow-bandpass filters for analytical chemistry applications
Yang, M.; Gatto, A.; Kaiser, N. | Journal Article |
| 2006 | Ion sources for vacuum thin film technology
Reuschling, R.; Schultheiß, E. | Journal Article |
| 2006 | Review of modern techniques to generate antireflective properties on thermoplastic polymers
Schulz, U. | Journal Article |
| 2005 | Coating on plastics
Schulz, U. | Book Article |
| 2005 | Determination of scattering losses in ArF* excimer laser all-dielectric mirrors for 193 nm microlithography application
Rudisill, J.; Duparre, A.; Schröder, S. | Conference Paper |
| 2005 | Lanthanide tri-fluorides: A survey of the optical, mechanical and structural properties of thin films with emphasis of their use in the DUV - VUV - spectral range
Uhlig, H.; Thielsch, R.; Heber, J.; Kaiser, N. | Conference Paper |
| 2005 | Nanostructure and optical properties of fluoride films for high-quality DUV/VUV optical components
Schröder, S.; Uhlig, H.; Duparre, A.; Kaiser, N. | Conference Paper |
| 2005 | New challenges for VUV-XUV radiation resistant coatings
Gatto, A.; Heber, J.; Yang, M.; Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N. | Conference Paper |
| 2005 | New optimization algorithm for the synthesis of rugate optical coatings
Tikhonravov, A.; Trubetskov, M.; Amotchkina, T.; Kokarev, M.; Kaiser, N.; Stenzel, O.; Wilbrandt, S.; Gäbler, D. | Conference Paper |
| 2005 | Novel optical coating concepts
Stenzel, O.; Heger, P.; Bischoff, M.; Wilbrandt, S.; Kaiser, N. | Conference Paper |
| 2005 | The physics of thin film optical spectra
Stenzel, O. | Book |
| 2005 | Recent progress in amorphous and microcrystalline silicon based solar cell technology
Rech, B.; Repmann, T.; Hüpkes, J.; Berginski, M.; Stiebig, H.; Beyer, W.; Sittinger, V.; Ruske, F. | Conference Paper |
| 2005 | Research and development of VUV optical coatings for micro mirrors applications
Yang, M.; Gatto, A.; Kaiser, N. | Journal Article |
| 2005 | Sensitive and flexible light scatter techniques from the VUV to IR regions
Schröder, S.; Gliech, S.; Duparre, A. | Conference Paper |
| 2005 | VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H. | Conference Paper |
| 2004 | Barkhausen noise and eddy current microscopy - a new scanning probe technique for microscale characterization of materials
Szielasko, K.; Lugin, S.; Kopp, M.; Altpeter, I. | Conference Paper |
| 2004 | Discrete dislocation dynamics simulation of thin film plasticity
Blanckenhagen, B. von; Gumbsch, P. | Book Article |
| 2004 | Imaging defects in thin DLC coatings using high frequency scanning acoustic microscopy
Fei, D.; Rebinsky, D.; Zinin, P.; Köhler, B. | Conference Paper |
| 2004 | Investigations on sticking temperature and wear of mold materials and wear of coatings
Rieser, D.; Manns, P.; Spieß, G.; Kleer, G. | Conference Paper |
| 2004 | Verfahren zur tiefenaufgelösten Polarisationsbestimmung in pyroelektrischen Dünnschichten
Sandner, T.; Gerlach, G.; Suchaneck, G. | Book Article |
| 2003 | 3D simulation of the dislocation dynamics in polycrystalline metal thin films
Blanckenhagen, B. von; Arzt, E.; Gumbsch, P. | Conference Paper |
| 2003 | Effects of interface roughness on the spectral properties of thin films and multilayers
Tikhonravov, A.V.; Trubetskov, M.K.; Tikhonravov, A.A.; Duparre, A. | Journal Article |
| 2003 | Influence of substrate material and topography on the tribological behaviour of submicron coatings
Bandorf, R.; Lüthje, H.; Wortmann, A.; Staedler, T.; Wittorf, R. | Conference Paper, Journal Article |
| 2003 | Microtribological behaviour of thin DLC films using different testing methods
Bandorf, R.; Lüthje, H.; Staedler, T. | Conference Paper |
| 2003 | Nanoscale imaging of elastic and piezoelectric properties of nanocrystalline lead calcium titanate
Kopycinska, M.; Ziebert, C.; Schmitt, H.; Rabe, U.; Hirsekorn, S.; Arnold, W. | Conference Paper, Journal Article |
| 2003 | Spectrophotometry in the vacuum-UV
Heber, J.; Gatto, A.; Kaiser, N. | Conference Paper |
| 2003 | Switching behavior of plasma polymer films containing silver nanoparticles
Kiesow, A.; Morris, J.E.; Radehaus, C.; Heilmann, A. | Journal Article |
| 2002 | Dipole lifetime in stratified media
Danz, N.; Waldhäusl, R.; Bräuer, A.; Kowarschik, R. | Journal Article |
| 2002 | Effect of systematic errors in spectral photometric data on the accuracy of determination of optical parameters of dielectric thin films
Tikhonravov, A.V.; Trubetskov, M.K.; Kokarev, M.A.; Amotchkina, T.V.; Duparre, A.; Quesnel, E.; Ristau, D.; Gunster, S. | Journal Article |
| 2002 | Electron probe microanalysis (EPMA) measurement of thin-film thickness in the nanometre range
Procop, M.; Radtke, M.; Krumrey, M.; Hasche, K.; Schädlich, S.; Frank, W. | Journal Article |
| 2002 | Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
Ferre-Borrull, J.; Steinert, J.; Duparre, A. | Journal Article |
| 2002 | Light-scattering measurements of optical thin-film components at 157 and 193 nm
Gliech, S.; Steinert, J.; Duparre, A. | Journal Article |
| 2002 | Photochromic hybrid sol-gel coatings: Preparation, properties, and applications
Klukowska, A.; Posset, U.; Schottner, G.; Wis, M.L.; Salemi-Delvaux, C.; Malatesta, V. | Journal Article |
| 2002 | Ultraviolet optical and microstructural properties of MgF 2 and LaF 3 coatings deposited by ion-beam sputtering and boat and electron-beam evaporation
Ristau, D.; Gunster, S.; Bosch, S.; Duparre, A.; Masetti, E.; Ferre-Borrull, J.; Kiriakidis, G.; Peiro, F.; Quesnel, E.; Tikhonravov, A. | Journal Article |
| 2001 | Blocking improved narrow-band filters for the UV-B region
Uhlig, H.; Kaiser, N. | Journal Article |
| 2001 | High-performance DUV optics for Free Electron Lasers
Gatto, A.; Thielsch, R.; Heber, J.; Kaiser, N.; Ristau, D.; Günster, S.; Kohlhaas, J.; Marsi, M.; Trovo, M.; Walker, R.; Garzella, D.; Couprie, M.E.; Torchio, P.; Alvisi, M.; Amra, C. | Conference Paper |
| 2001 | High-reflectivity dense UV mirrors
Torchio, P.; Gatto, A.; Alvisi, M.; Albrand, G.; Kaiser, N.; Amra, C. | Conference Paper |
| 2001 | Mechanical stress and thermal-elastic properties of oxide coatings for use in the DUV spectral region
Thielsch, R.; Gatto, A.; Kaiser, N. | Conference Paper |
| 2001 | New Applications for Optical Coatings
Kaiser, N. | Book Article |
| 2001 | Optical Coatings for Ultraviolet Radiation
Kaiser, N. | Book Article |
| 2000 | Direct local epitaxy of diamond on Si(100) and surface-roughening-induced crystal misorientation
Jiang, X.; Jia, C.L. | Journal Article |
| 2000 | Effects of hydrogen ion bombardment and boron doping on (001) polycrystalline diamond films
Xia, Y.; Sekiguchi, T.; Zhang, W.; Jiang, X.; Wu, W.; Yao, T. | Journal Article |
| 2000 | A new procedure for the optical characterization of high quality thin films
Bosch, S.; Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J.; Günster, S.; Ristau, D. | Conference Paper |
| 2000 | Non-Destructive Characterization of Ferromagnetic Layers and Laser Systems
Meyendorf, N.; Altpeter, I.; Netzelmann, U.; Rösner, H.; Hoffmann, J. | Conference Paper |
| 2000 | Optical characterization of materials deposited by different processes: the LaF3 in the UV-visible region
Leinfeller, N.; Quesnel, E.; Duparre, A.; Ferre-Borrull, J. | Conference Paper |
| 2000 | Roughness and Light Scattering of Ion-Beam-Sputtered Fluoride Coatings for 193 nm
Ferre-Borrull, J.; Duparre, A.; Quesnel, E. | Journal Article |
| 2000 | Surfaces of undoped and boron doped polycrystalline diamond films influenced by negative DC bias voltage
Xia, Y.; Sekiguchi, T.; Zhang, W.; Jiang, X.; Ju, J.; Wang, L.; Yao, T. | Journal Article |
| 2000 | X-ray study of the roughness of surfaces and interfaces
Kozhevnikov, I.V.; Asadchikov, V.E.; Bukreeva, I.N.; Duparre, A. | Conference Paper |
| 1999 | Defect examination of diamond crystals by surface hydrogen-plasma etching
Jiang, X.; Rickers, C. | Journal Article |
| 1999 | Properties of diamond electrodes for wastewater treatment
Fryda, M.; Herrmann, D.; Schäfer, L.; Klages, C.-P.; Perret, A.; Haenni, W.; Comninellis, C.; Gandini, D. | Journal Article |
| 1999 | Transparent and conductive aluminum doped zinc oxide films prepared by mid-frequency reactive magnetron sputtering
Szyszka, B. | Journal Article |
| 1998 | AFM helps engineer low-scatter thin films
Duparre, A.; Kaiser, N. | Journal Article |
| 1998 | Growth of ceramic thin films by pulsed laser deposition. The role of the kinetic energy of laser ablated particles
Gottmann, J.; Klotzbücher, T.; Kreutz, E.W. | Conference Paper |
| 1998 | Preparation and characterization of thin cubic boron nitride films
Bewilogua, K.; Schütze, A.; Walter, H.; Kouptsidis, S. | Conference Paper |
| 1998 | Pulsed laser deposition of ceramic thin films using different laser sources
Husmann, A.; Gottmann, J.; Klotzbücher, T.; Kreutz, E.W. | Journal Article |
| 1998 | Raman spectroscopy on BaTiO3 ferroelectric thin films deposited by a hybrid DC-field enhanced PLD-process
Klotzbücher, T.; Mergens, M.; Husmann, A.; Gottmann, J.; Kreutz, E.W. | Conference Paper |
| 1997 | Controlling the quality of thin films by surface acoustic waves
Schneider, S.; Schwarz, T.; Bradford, A.S.; Shan, Q.; Dewhurst, R.J. | Journal Article |
| 1997 | A photoacoustic method for characterising thin films
Schneider, D.; Schwarz, T. | Journal Article |
| 1996 | Thin metal and metal oxide films deposited by the anodic vacuum arc technique
Markschläger, Patrick; Lukhaub, W. | Journal Article |
| 1994 | Thinfilm multichip modules - Process development using photosensitive benzocyclobutane
Chmiel, G.; Töpper, M.; Jöhren, C.; Achen, A. | Conference Paper |
| 1992 | Dünne anorganische Schichten für Barrierepackstoffe
Langowski, H.-C.; Utz, H. | Journal Article |