Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2002Integrated flow sensor with monocrystalline silicon membrane operating in Thermal Time-of-Flight mode
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Investigations on silicon thermal flow sensors with mesa structures
Hariadi, I.; Trieu, H.-K.; Mokwa, W.; Vogt, H.
Conference Paper
2002Modeling of microsystem flow sensor based on thermal time-of-flight mode
Hariadi, I.; Trieu, H.-K.; Vogt, H.
Conference Paper