Publica
Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten. | | |
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| 2020 | Area scanning method for 3D surface profilometry based on an adaptive confocal microscope
Luo, Ding; Taphanel, Miro; Claus, Daniel; Boettcher, Tobias; Osten, Wolfgang; Längle, Thomas; Beyerer, Jürgen | Journal Article |
| 2017 | Characterization of edge effects in precision low-coherence interferometry using broadband light sources
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter | Conference Paper |
| 2016 | Measurement of surface topographies in the nm-range for power chip technologies by a modified low-coherence interferometer
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan L.; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Paul | Conference Paper |
| 2016 | Two-dimensional low-coherence interferometry for the characterization of nanometer-wafer-topographies
Taudt, Christopher; Baselt, Tobias; Nelsen, Bryan; Aßmann, Heiko; Greiner, Andreas; Koch, Edmund; Hartmann, Peter | Conference Paper |