Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2012Total integrated scatter from surfaces with arbitrary roughness, correlation widths and incident angles
Harvey, James; Schröder, Sven; Choi, Narak; Duparré, Angela
Journal Article
2007EUV reflectance and scattering of Mo/Si multilayers on differently polished substrates
Schröder, S.; Feigl, T.; Duparre, A.; Tünnermann, A.
Journal Article
2005Qualitätssicherung von Laminatfußböden mit optoelektronischen Messtechniken
Meinlschmidt, P.; Plinke, B.; Aderhold, J.
Conference Paper
2002Extending the capabilities of scanning probe microscopy for microroughness analysis in surface engineering
Ferre-Borrull, J.; Steinert, J.; Duparre, A.
Journal Article
1998Wide scale surface measurement using white light interferometry and atomic force microscopy
Recknagel, R.-J.; Feigl, T.; Duparre, A.; Notni, G.
Conference Paper
1991In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K.
Conference Paper