Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2009The importance of non-local shadowing for the topography evolution of a-C:H films grown by toluene based plasma enhanced chemical vapor deposition
Hormann, C.; Meier, S.; Moseler, M.
Journal Article
2002Growth of Ag films on PET deposited by magnetron sputtering
Charton, C.; Fahland, M.
Journal Article
2001Diffusion and aggregation of Agn-clusters (n=2-9) on HOPG probed by fs-two-photon-photoemission
Busolt, U.; Cottancin, E.; Socaciu, L.; Rohr, H.; Leisner, T.; Woste, L.
Journal Article
1997Three-dimensional simulation of contact hole metallization using aluminum sputter deposition at elevated temperatures
Bär, E.; Lorenz, J.; Ryssel, H.
Conference Paper