Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Iridium oxide catalyst for hybrid electrochromic device based on tetramethylthiourea (TMTU) redox electrolyte
Bogati, S.; Basnet, R.; Georg, A.
Journal Article
2019Roll-to-roll sputtering of indium tin oxide layers onto ultrathin flexible glass
Fahland, Matthias; Zywitzki, Olaf; Modes, Thomas; Vondkar, Komal; Werner, Torsten; Ottermann, Clemens; Berendt, Markus; Pollak, Gerd
Journal Article
2018Investigation of temperature characteristics and substrate influence on AlScN-based SAW resonators
Ding, Anli; Reusch, Markus; Lu, Yuan; Kurz, Nicolas; Lozar, Roger; Christoph, Tim; Driad, Rachid; Ambacher, Oliver; Zukauskaite, Agne
Conference Paper
2018Modern coating and annealing technologies for advanced multifunctional layer stacks
Preußner, Thomas; Junghähnel, Manuela; Westphalen, Jasper; Täschner, Kerstin
Conference Paper
2018Roll-to-roll sputtering of oxide layers into ultrathin flexible glass
Fahland, Matthias; Dietsch, Tina; Ottermann, Clemens; Zywitzki, Olaf; Linß, Volker
Conference Paper
2017Influence of the transparent electrode sputtering process on the interface passivation quality of silicon heterojunction solar cells
Tutsch, Leonard; Bivour, Martin; Wolke, Winfried; Hermle, Martin; Rentsch, Jochen
Conference Paper
2017Photoelectrochromic devices based on sputtered WO3 and TiO2 films
Bogati, S.; Georg, A.; Graf, W.
Journal Article
2017Roll-to-roll thin film coating on fluoropolymer webs - Status, challenges and applications
Fahlteich, John; Steiner, Cindy; Schiller, Nicolas; Miesbauer, Oliver; Noller, Klaus; Deichmann, Karl-Joachim; Mirza, Mark; Amberg-Schwab, Sabine
Journal Article
2017Structure and properties of magnetron-sputtered manganese ferrite films
Fietzke, Fred; Zywitzki, Olaf
Journal Article, Conference Paper
2017Thin-Film Deposition on Flexible Glass by Plasma Processes
Junghähnel, Manuela; Fahlteich, John
Book Article
2016Al in ZnO - from doping to alloying. An investigation of Al electrical activation in relation to structure and charge transport limits
Cornelius, Steffen; Vinnichenko, Mykola
Journal Article
2016Highly insulating alumina films by a bipolar reactive MF sputtering process with special arc handling
Carreri, F.C.; Bandorf, R.; Gerdes, H.; Vergöhl, M.; Bräuer, G.
Journal Article, Conference Paper
2016Photocatalytic properties of titania thin films prepared by sputtering versus evaporation and aging of induced oxygen vacancy defects
Henkel, B.; Neubert, T.; Zabel, S.; Lamprecht, C.; Selhuber-Unkel, C.; Rätzke, K.; Strunskus, T.; Vergöhl, M.; Faupel, F.
Journal Article
2015Advanced Processing of ITO and IZO Thin Films on Flexible Glass
Junghähnel, Manuela; Weller, Stephanie; Gebel, Thoralf
Journal Article, Conference Paper
2015Degradation of hydrogenated amorphous silicon passivation films caused by sputtering deposition
Meiners, B.-M.; Borchert, D.; Hohage, S.; Holinksi, S.; Schäfer, P.
Journal Article
2015Laminated fabric as top electrode for organic photovoltaics
Steim, R.; Chabrecek, P.; Sonderegger, U.; Kindle-Hasse, B.; Siefert, W.; Kroyer, T.; Reinecke, P.; Lanz, T.; Geiger, T.; Hany, R.; Nüesch, F.
Journal Article
2015Thin film metallization of PDMS with improved adhesion properties for micro electrode arrays
Scharin, Marina; Newcomer, Kate; Dirnecker, Tobias; Al-Naimi, A.; Rumler, Maximilian; Rommel, Mathias; Frey, Lothar
Poster
2014Flexible high efficiency perovskite solar cells
Roldán-Carmona, C.; Malinkiewicz, O.; Soriano, A.; Mínguez Espallargas, G.; Garcia, A.; Reinecke, P.; Kroyer, T.; Dar, M.I.; Nazeeruddin, M.K.; Bolink, H.J.
Journal Article
2014ITO-free organic solar cells with roll-to-roll coated organic functional layers from non-halogenated solvents
Kaduwal, D.; Schleiermacher, H.-F.; Schulz-Gericke, J.; Kroyer, T.; Zimmermann, B.; Würfel, U.
Journal Article
2013Study of hydrogenated AlN as an anti-reflective coating and for the effective surface passivation of silicon
Krugel, G.; Sharma, A.; Wolke, W.; Rentsch, J.; Preu, R.
Journal Article
2012Manufacturing of high-precision optical coatings using cylindrical cathodes in a sputter-up configuration
Rademacher, D.; Kreher, S.; Vergöhl, M.
Conference Paper
2012Sputtered p-type Sb2Te3/(Bi,Sb)2Te3 soft superlattices created by nanoalloying
Winkler, M.; Liu, X.; König, J.; Kirste, L.; Böttner, H.; Bensch, W.; Kienle, L.
Journal Article, Conference Paper
2012Sputtering of freestanding metal nanocrystals
Järvi, T.T.; Nordlund, K.
Journal Article, Conference Paper
2011Cubic boron nitride based coating systems with different interlayers for cutting inserts
Stein, C.; Keunecke, M.; Bewilogua, K.; Chudoba, T.; Kölker, W.; Berg, H. van den
Journal Article
2011Process control in sputtering of optical coatings
Frach, P.; Bartzsch, H.; Glöß, D.; Täschner, K.
Conference Paper
2010Effects of oxygen and forming gas annealing on ZnO-TFTs
Huang, J.; Krishna, U.R.; Lemberger, M.; Jank, M.P.M.; Polster, S.; Ryssel, H.; Frey, L.
Poster
2010High temperature resistant coatings of transparent and conductive Nb doped Titania (TiO2:Nb) for solar cell applications
Junghähnel, M.; Heimke, B.; Hartung, U.; Kopte, T.
Conference Paper
2010Preparation and characterization of Cu'Me"'
Polenzky, C.; Ortner, K.; Szyszka, B.
Conference Paper
2010Properties of transparent conductive niobium doped titania (TNO) thin film deposited by large area DC and pulsed DC sputtering
Junghähnel, M.; Heimke, B.; Hartung, U.; Kopte, T.; Zywitzki, O.
Conference Paper
2010Sputtered n-type soft super lattice thermoelectric layers based on Bi2Te3/(Bi,Sb)2Te3 created by nanoalloying
Winkler, M.; Ebling, D.; Böttner, H.; Kirste, L.
Conference Paper
2009Deposition of functional coatings on polyethylene terephthalate films by magnetronplasma-enhanced chemical vapour deposition
Fahland, M.; Vogt, T.; Meyer, B.; Fahlteich, J.; Schiller, N.; Vinnichenko, M.; Munnik, F.
Journal Article
2009Properties of cosputtered SiO2-Ta2O5-mixtures
Polenzky, C.; Rickers, C.; Vergöhl, M.
Conference Paper, Journal Article
2008Electrically insulating Al2O3 and SiO2 films for sensor and photovoltaic applications deposited by reactive pulse magnetron sputtering, hollow cathode arc activated deposition and magnetron-PECVD
Frach, P.; Bartzsch, H.; Glöß, D.; Fahland, M.; Händel, F.
Journal Article, Conference Paper
2008The quest for transparent barriers on flexible substrates
Fahlteich, J.; Fahland, M.; Schönberger, W.; Schiller, N.
Conference Paper
2008RF superimposed DC sputtering of zinc tin oxide (ZTO) and indium zinc oxide (IZO)
Heimke, B.; Kopte, T.; Hartung, U.; Nyderle, R.; Junghähnel, M.; Krause, U.; Braun, J.
Conference Paper
2008Total reflection x-ray fluorescence as a sensitive analysis method for the investigation of sputtering processes
Sekowski, M.; Steen, C.; Nutsch, A.; Birnbaum, E.; Burenkov, A.; Pichler, P.
Conference Paper, Journal Article
2007CMOS integrable micromirrors with highly improved drift-stability
Schmidt, Jan U.; Knobbe, Jens; Gehner, Andreas; Lakner, Hubert
Conference Paper
2007Determination of plasma parameters during deposition of ZnO films by ceramic and metallic targets and correlation with film properties
Wiese, R.; Kersten, H.; Hannemann, M.; Sittinger, V.; Ruske, F.; Menner, R.
Conference Paper, Journal Article
2007High rate deposition of magnetic material by gas flow sputtering
Bandorf, R.; Bloche, A.; Ortner, K.; Lüthje, H.; Jung, T.
Conference Paper, Journal Article
2007Influence of bias voltage on the structure of lead zirconate titanate piezoelectric films prepared by gas flow sputtering
Ortner, K.; Koeßler, D.; Jung, T.; Jacobsen, H.; Quenzer, H.-J.
Conference Paper, Journal Article
2006Accurate parameter extraction for the simulation of direct structuring by ion beams
Beuer, S.; Rommel, M.; Lehrer, C.; Platzgummer, E.; Kvasnica, S.; Bauer, A.J.; Ryssel, H.
Poster
2006Development of high barrier films on flexible polymer substrates
Charton, C.; Schiller, N.; Fahland, M.; Holländer, A.; Wedel, A.; Noller, K.
Journal Article, Conference Paper
2006Production of MF and DC-pulse sputtered anti-reflective/anti-static optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper, Journal Article
2006Pulse magnetron sputtering in a reactive gas mixture of variable composition to manufacture multilayer and gradient optical coatings
Lange, S.; Bartzsch, H.; Frach, P.; Goedicke, K.
Conference Paper, Journal Article
2006Stability of CIGS minimodules with ZnO:Al films prepared by reactive mid-frequency magnetron sputtering
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Menner, R.; Powalla, M.; Dimmler, B.
Conference Paper
2005An approach to the development of tolerance systems for micro- and nanotechnology
Schöbel, J.; Westkämper, E.
Conference Paper
2005Connected fit algorithm for optical investigations of large area coatings
Gnehr, W.-M.; Hartung, U.; Kopte, T.
Journal Article
2005Hydrogen doping of DC sputtered ZnO:Al films from novel target material
Ruske, F.; Sittinger, V.; Werner, W.; Szyszka, B.; Osten, K.U. van; Dietrich, K.; Rix, R.
Journal Article
2005Ion sputtering at grazing incidence for SIMS-analysis
Ullrich, M.; Burenkov, A.; Ryssel, H.
Conference Paper, Journal Article
2005Radiation stability of EUV Mo/Si multilayer mirrors
Benoit, N.; Yulin, S.; Feigl, T.; Kaiser, N.
Conference Paper, Journal Article
2005Residual stresses modelled by MD simulation applied to PVD DC sputter deposition
Klein, P.; Gottwald, B.; Frauenheim, T.; Köhler, C.; Gemmler, A.
Journal Article
2005Tuning the reactive magnetron sputtering process of Al-doped ZnO on large area substrates for amorphous and microcrystalline silicon solar cells
Sittinger, V.; Ruske, F.; Werner, W.; Szyszka, B.; Rech, B.; Schöpe, G.; Hüpkes, J.
Conference Paper
2004Bestehende Fragestellungen und Ausblick auf zukünftige Entwicklungen
Scheibe, A.
Conference Paper
2004Process stabilisation for large area reactive MF-sputtering of Al-doped ZnO
Ruske, F.; Pflug, A.; Sittinger, V.; Werner, W.; Szyszka, B.
Conference Paper
2004Production of MF and DC-pulse sputtered precision optical interference coatings using a large area in-line coater
Sittinger, V.; Pflug, A.; Werner, W.; Rickers, C.; Vergöhl, M.; Kaiser, A.; Szyszka, B.
Conference Paper
2003Simulation of reactive sputtering kinetics in real in-line processing chambers
Pflug, A.; Szyszka, B.; Niemann, J.
Journal Article
2003Spectrally selective reflecting thin-film filters for laser display technology
Rickers, C.; Vergöhl, M.
Journal Article
2003State-of-the-art mid-frequency sputtered ZnO films for thin film silicon solar cells and modules
Müller, J.; Schöpe, G.; Kluth, O.; Rech, B.; Sittinger, V.; Szyszka, B.; Geyer, R.; Lechner, P.; Schade, H.; Ruske, M.; Dittmar, G.; Bochem, H.-P.
Journal Article
2002Design and fabrication of a novel low cost hotplate micro gas sensor
Hildenbrand, J.; Wöllenstein, J.; Spiller, E.; Kühner, G.; Böttner, H.; Urban, G.; Korvink, J.G.
Conference Paper
2001Effect of deposition parameters on optical and mechanical properties of MF- and DC-sputtered Nb2O5-films
Hunsche, B.; Vergöhl, M.; Neuhäuser, H.; Klose, F.; Szyszka, B.; Matthee, T.
Conference Paper, Journal Article
2001Heat resistance of EUV multilayer mirrors for long-time applications
Feigl, T.; Lauth, H.; Yulin, S.; Kaiser, N.
Journal Article
2001Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper, Journal Article
1999AFM and STM investigation of carbon nanotubes produced by high energy ion irradiation of graphite
Biro, L.P.; Mark, G.I.; Gyulai, J.; Havancszak, K.; Lipp, S.; Lehrer, C.; Frey, L.; Ryssel, H.
Journal Article
1999Light scattering and atomic force microscopic investigations on magnetron sputtered oxide single layers and multilayers for micromechanical laser mirrors
Kupfer, H.; Richter, F.; Schlott, P.; Duparre, A.; Gliech, S.
Conference Paper
1998Deposition of c-BN films by DC magnetron sputtering
Kouptsidis, S.; Lüthje, H.; Bewilogua, K.; Schütze, A.; Zhang, P.
Journal Article
1998Preparation and characterization of thin cubic boron nitride films
Bewilogua, K.; Schütze, A.; Walter, H.; Kouptsidis, S.
Conference Paper
1997Preparation of metal nanosuspensions by high-pressure dc-sputtering on running liquids
Wagener, M.; Günther, B.; Murty, B.S.
Conference Paper
1997Shear test for adhesion measurement of small structures
Schammler, G.; Buschick, K.; Hahn, R.; Reichl, H.
Conference Paper
1995Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S.
Conference Paper
1995Cubic boron nitride films prepared by reactive r.f. - and d.c. sputtering from different boron containing targets
Schütze, A.; Bewilogua, K.; Lüthje, H.; Kouptsidis, S.; Jäger, S.
Journal Article
1995Electron and laser radiation as sources of zirconia film deposition
Kreutz, E.W.; Lemmer, O.; Wesner, D.A.; Alunovic, M.; Erkens, G.; Leyendecker, F.; Voss, A.
Journal Article
1995Sputter deposition of cubic boron nitride films
Bewilogua, K.; Schütze, A.; Kouptsidis, S.; Lüthje, H.
Conference Paper
1993Electronic study of plasma-induced damage in GaAs heterostructures.
Zappe, H.P.
Journal Article
1993Mehrlagenmetallisierung für hochintegrierte mikroelektronische Schaltungen
Vogt, H.
Habilitation
1990The properties of a-C-H films deposited by bias sputtering of carbon.
Dischler, B.; Zou, J.W.; Schmidt, K.; Reichelt, K.
Journal Article
1987Redeposition in ion milling
Müller, K.P.; Pelka, J.
Journal Article
1986Ablation of opaque surfaces due to laser irradiation
Schulz, W.; Simon, G.; Vicanek, M.
Journal Article
1986Influence of sputter effects on the resolution in X-ray mask repair
Betz, H.; Heuberger, A.; Economou, N.P.; Shaver, D.C.
Conference Paper