Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2008Sputter process with time-variant reactive gas mixture for the deposition of optical multilayer and gradient layer systems
Bartzsch, H.; Weber, J.; Lau, K.; Glöß, D.; Frach, P.
Conference Paper
1993Control of reactive DC magnetron sputtering of SnO2 by means of optical emission
Kirchhoff, V.; Heisig, U.
Conference Paper