Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019High accuracy beam splitting using spatial light modulator combined with machine learning algorithms
Mikhaylov, Dmitriy; Zhou, Baifan; Kiedrowski, Thomas; Mikut, Ralf; Lasagni, Andrés-Fabián
Journal Article
2019Machine learning aided phase retrieval algorithm for beam splitting with an LCoS-SLM
Mikhaylov, Dmitriy; Zhou, Baifan; Kiedrowski, Thomas; Mikut, Ralf; Lasagni, Andrés-Fabián
Conference Paper
2018Heat accumulation effects during ultrashort pulse laser ablation with spatially shaped beams
Mikhaylov, Dmitriy; Kiedrowski, Thomas; Lasagni, Andrés-Fabián
Journal Article
2016In situ bow change of Al-alloy MEMS micromirrors during 248-nm laser irradiation
Mai, Alexander; Bunce, Christopher; Hübner, René; Pahner, Daniel; Dauderstädt, Ulrike
Journal Article
2015Automatic laser glare suppression in electro-optical sensors
Ritt, Gunnar; Eberle, Bernd
Journal Article
2014Characterization of the digital holographic wavefront sensor
Marin Palomo, Pablo; Zepp, Andreas; Gladysz, Szymon
Conference Paper
2014Deeper insight with MEMS based illumination
Skupsch, Christoph; Heber, Jörg; Berndt, Dirk; Wagner, Michael; Rückerl, Florian; Tinevez, Jean-Yves; Shorte, Spencer
Presentation
2012Automatic suppression of intense monochromatic light in electro-optical sensors
Ritt, Gunnar; Eberle, Bernd
Journal Article
2012Monolithic integration of MOEMS on CMOS backplanes using surface micromachining techniques
List, Matthias; Friedrichs, Martin; Müller, Michael
Conference Paper
2011In situ surface topography measurement of MOEMS structures under laser exposure
Mai, A.; Krellmann, M.; Sinning, S.; Wolschke, S.; Dauderstädt, U.; Schenk, H.; Schmeißer, D.; Wagner, M.
Conference Paper
2010Sensor protection against laser dazzling
Ritt, G.; Eberle, B.
Conference Paper
2009Advances in SLM development for microlithography
Dauderstädt, U.; Askebjer, P.; Björnängen, P.; Dürr, P.; Friedrichs, M.; List, M.; Rudloff, D.; Schmidt, J.-U.; Müller, M.; Wagner, M.
Conference Paper
2009Fabrication of large-scale mono-crystalline silicon micro-mirror arrays using adhesive wafer transfer bonding
Zimmer, F.; Niklaus, F.; Lapisa, M.; Ludewig, T.; Bring, M.; Friedrichs, M.; Bakke, T.; Schenk, H.; Wijngaart, W. van der
Conference Paper
2007Charging effects in spatial light modulators based on micromirrors
Dauderstädt, U.; Bakke, T.; Dürr, P.; Sinning, S.; Wullinger, I.; Wagner, M.; Lakner, H.
Conference Paper
2007Contrast properties of spatial light modulators for microlithography
Heber, J.; Kunze, D.; Dürr, P.; Rudloff, D.; Wagner, M.; Björnängen, P.; Luberek, J.; Berzinsh, U.; Sandström, T.; Karlin, T.
Conference Paper
2006Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding
Bakke, T.; Völker, B.; Friedrichs, M.; Rudloff, D.; Schenk, H.; Lakner, H.
Conference Paper
2005Mechanical stability of spatial light modulators in microlithography
Dauderstädt, U.; Dürr, P.; Ljungblad, U.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2005Micro-opto-electro-mechanical systems technology and its impact on photonic applications
Schenk, H.; Wolter, A.; Dauderstädt, U.; Gehner, A.; Lakner, H.
Journal Article
2005Research and development of VUV optical coatings for micro mirrors applications
Yang, M.; Gatto, A.; Kaiser, N.
Journal Article
2005Spatial light modulators with monocrystalline silicon micromirrors made by wafer bonding
Bakke, T.; Friedrichs, M.; Völker, B.; Reiche, M.; Leonardsson, L.; Schenk, H.; Lakner, H.
Conference Paper
2005VUV optical coatings for the next-generation micro-mechanical mirrors
Yang, M.; Gatto, A.; Kaiser, N.; Schmidt, J.U.; Sandner, T.; Heber, J.; Schenk, H.; Lakner, H.
Conference Paper
2004Application of spatial light modulators for microlithography
Dauderstädt, U.; Dürr, P.; Karlin, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Characterization of spatial light modulators for microlithography
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Bakke, T.; Schenk, H.; Lakner, H.
Conference Paper
2003Improved vision by eye abberation correction using an active-matrix addressed micromirror array
Gehner, A.; Wildenhain, M.; Doleschal, W.; Elgner, A.; Schenk, H.; Lakner, H.
Conference Paper
2003Numerical wave optical analysis of microlens array telescopes and comparison with experimental results
Duparre, J.; Göring, R.
Journal Article
2003Operation of spatial light modulators in DUV light
Dauderstädt, U.; Dürr, P.; Krellmann, M.; Karlin, T.; Berzinsh, U.; Leonardsson, L.; Wendrock, H.
Conference Paper
2002Reliability test and failure analysis of optical MEMS
Dürr, P.; Dauderstädt, U.; Kunze, D.; Auvert, M.; Lakner, H.
Conference Paper
2001Active-matrix addressed micromirror array for wavefront correction in adaptive optics
Gehner, A.; Doleschal, W.; Elgner, A.; Kauert, R.; Kunze, D.; Wildenhain, M.
Conference Paper
2001A test system for micromirror arrays
Tanneberger, T.
Conference Paper
2000The moving liquid mirror (MLM) spatial light modulator
Wolter, A.; Lakner, H.; Doleschal, W.; Zimmer, G.
Conference Paper
1995New system for fast submicron laser direct writing
Kück, Heinz; Bollerott, Michael; Doleschal, Wolfgang; Gehner, Andreas; Kunze, Detlef; Grundke, Wolfram; Melcher, Rolf; Paufler, Jörg; Seltmann, Rolf; Zimmer, Günter
Conference Paper
1989Solid-state light valves with viscoelastic control layers for projection displays. I. Operating principle and theoretical analysis
Tepe, R.; Emich, L.
Conference Paper