Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2018Roll-to-roll deposition of silicon oxynitride layers on polymer films using a rotatable dual magnetron system
Himmler, Anika; Fahland, Matthias; Linß, Volker
Journal Article
2009Reactive pulse magnetron sputtered SiOxNy coatings on polymers
Lau, K.; Weber, J.; Bartzsch, H.; Frach, D.P.
Journal Article
2008Reactive pulse magnetron sputtered SiOxNy coatings on polymers
Lau, K.; Weber, J.; Bartzsch, H.; Frach, P.
Conference Paper