Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Correlation of defect luminescence and recombination in multicrystalline silicon
Wyller, Guro Marie; Schindler, Florian; Kwapil, Wolfram; Schön, Jonas; Olsen, Espen; Haug, Halvard; Riepe, Stephan; Schubert, Martin C.
Journal Article
2019Defects in oxidized p-type Si wafers observed by surface photovoltage spectroscopy
Kolkovsky, Vladimir
Journal Article
2018Analysis of 28 nm SRAM cell stability under mechanical load applied by nanoindentation
Clausner, André; Schlipf, Simon; Kurz, G.; Otto, M.; Paul, J.; Giering, Kay-Uwe; Warmuth, Jens; Lange, André; Jancke, Roland; Aal, A.; Rosenkranz, Rüdiger; Gall, Martin; Zschech, Ehrenfried
Conference Paper
2018Bifacial p-type silicon shingle solar cells - the "pSPEER" concept
Baliozian, P.; Lohmüller, E.; Fellmeth, T.; Wöhrle, N.; Krieg, A.; Preu, R.
Journal Article
2018Design and characterization of a silicon photomultiplier in 0.35 μm CMOS
D'Ascenzo, Nicola; Brockherde, Werner; Dreiner, Stefan; Schwinger, Alexander; Schmidt, Andrei; Xie, Q.
Journal Article
2018A detailed full-cell model of a 2018 commercial PERC solar cell in Quokka3
Fell, Andreas; Altermatt, Pietro P.
Journal Article
2018Development of high performance multicrystalline silicon with controlled seeding
Hess, Adam; Krenckel, Patricia; Trötschler, Theresa; Fehrenbach, Tobias; Riepe, Stephan
Conference Paper
2018Direct growth of III–V/silicon triple-junction solar cells with 19.7% efficiency
Feifel, Markus; Ohlmann, Jens; Benick, Jan; Hermle, Martin; Belz, Jürgen; Beyer, Andreas; Volz, Kerstin; Hannappel, Thomas; Bett, Andreas W.; Lackner, David; Dimroth, Frank
Journal Article
2018Edge facet dynamics during the growth of heavily doped n-type silicon by the Czochralski-method
Stockmeier, Ludwig; Kranert, Christian; Raming, Georg; Miller, Alfred; Reimann, Christian; Rudolph, Peter; Friedrich, Jochen
Journal Article
2018Efficiency Gain Analysis of Silicon Passivated Emitter and Rear Solar Cells Solely Based on Measurements
Wasmer, S.; Horst, A. van der; Saint-Cast, P.; Greulich, J.M.
Conference Paper
2018Emitter Formation and Passivation Dependence on Crystal Grain Orientations after Atmospheric Pressure Dry Nanotexturing
Ridoy, A.I.; Kafle, B.; Saint-Cast, P.; Lohmüller, S.; Norouzi, M.H.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Conference Paper
2018High-Efficiency Diamond Wire-Sawn mc-Si-Based PERC Solar Cells Textured by Atmospheric Pressure Dry Etching
Kafle, B.; Ridoy, A.I.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Duncker, K.; Petter, K.; Peters, S.; Hofmann, M.
Conference Paper
2018Impact of Uncertainties of Fundamental Models on Simulated Silicon Solar Cell Efficiencies
Wasmer, S.; Fell, A.; Greulich, J.M.
Conference Paper
2018Inline Characterization of Diamond Wire Sawn Multicrystalline Silicon Wafers
Haunschild, J.; Bergmann, N.; Hammer, T.; Krieg, K.; Kaden, T.; Anspach, O.; Schremmer, H.; Rein, S.
Conference Paper
2018Large-area layer counting of 2D materials via visible reflection spectroscopy
Hutzler, Andreas; Matthus, C.D.; Dolle, C.; Rommel, M.; Jank, M.P.M.; Spiecker, E.; Frey, L.
Poster
2018An open source based repository for defects in silicon
Juhl, Mattias K.; Heinz, Friedemann D.; Coletti, Gianluca; Macdonald, Daniel; Rougieux, Fiacre E.; Schindler, Florian; Niewelt, Tim; Schubert, Martin C.
Conference Paper
2018Optimization of inline processes for the production of freestanding epitaxially grown thin films for solar cells
Ivanov, Alexey; Sorgenfrei, R.; Gust, Elke; Barth, Philipp; Nieuwenhuysen, Kris van; Kühnhold-Pospischil, Saskia; Riepe, Stephan; Janz, Stefan
Conference Paper
2018Photoluminescence Imaging at Uniform Excess Carrier Density Using Adaptive Nonuniform Excitation
Zhu, Y.; Heinz, F.D.; Juhl, M.; Schubert, M.C.; Trupke, T.; Hameiri, Z.
Journal Article
2018The principle of adaptive excitation for photoluminescence imaging of silicon: Theory
Heinz, Friedemann D.; Zhu, Yan; Hameri, Ziv; Juhl, Mattias; Trupke, Thorsten; Schubert, Martin C.
Journal Article
2018Shear melting of silicon and diamond and the disappearance of the polyamorphic transition under shear
Moras, G.; Klemenz, A.; Reichenbach, T.; Gola, A.; Uetsuka, H.; Moseler, M.; Pastewka, L.
Journal Article
2018Slurry Sawing of Multicrystalline Silicon with Low-Viscosity Carrier Liquid
Kaden, T.; Look, C.; Ischenko, V.; Gröschel, M.; Anspach, O.
Conference Paper
2017Angle-dependent reflectance of isotextured silicon
Alapont Sabater, A.; Greulich, J.; Tucher, N.; Bläsi, B.; Glunz, S.W.
Conference Paper
2017Approaching 22% efficiency with multicrystalline n-type silicon solar cells
Benick, J.; Müller, R.; Schindler, F.; Richter, A.; Hauser, H.; Feldmann, F.; Krenckel, P.; Riepe, S.; Schubert, M.C.; Hermle, M.; Glunz, S.W.
Conference Paper
2017Bulk lifetime characterization of corona charged silicon wafers with high resistivity by means of microwave detected photoconductivity
Engst, Christian R.; Rommel, Mathias; Bscheid, Christian; Eisele, Ignaz; Kutter, Christoph
Journal Article
2017Characterization of the diamond wire sawing process for monocrystalline silicon by raman spectroscopy and SIREX polarimetry
Würzner, S.; Herms, M.; Kaden, T.; Möller, H.J.; Wagner, M.
Journal Article
2017Impact of material and process variations on the distribution of multicrystalline silicon PERC cell efficiencies
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Demant, M.; Fertig, F.; Rein, S.
Journal Article
2017Increasing the efficiency of multicrystalline silicon PERC solar cells from currently 19% to 20%
Greulich, J.; Lohmüller, E.; Saint-Cast, P.; Werner, S.; Wasmer, S.; Horst, A.J. van der; Preu, R.
Conference Paper
2017The influence of material properties on the wire sawing process of multicrystalline silicon
Kaden, T.; Ershova, E.; Lottspeich, L.; Fuchs, M.
Conference Paper
2017Inline PECVD deposition of a-Si layers for heterojunction solar cells on an industrial scale
Temmler, J.; Moldovan, A.; Putra, D.; Bivour, M.; Rentsch, J.
Conference Paper
2017Kinetics of carrier-induced degradation at elevated temperature in multicrystalline silicon solar cells
Kwapil, W.; Niewelt, T.; Schubert, M.C.
Journal Article
2017Laser transfer and firing of NiV seed layer for the metallization of silicon heterojunction solar cells by Cu-plating
Rododfili, A.; Wolke, W.; Kroely, L.; Bivour, M.; Cimiotti, G.; Bartsch, J.; Glatthaar, M.; Nekarda, J.
Journal Article
2017Light-induced activation and deactivation of bulk defects in boron-doped float-zone silicon
Niewelt, T.; Selinger, M.; Grant, N.; Kwapil, W.M.; Murphy, J.D.; Schubert, M.C.
Journal Article
2017Long-term stability of aluminum oxide based surface passivation schemes under illumination at elevated temperatures
Niewelt, T.; Kwapil, W.M.; Selinger, M.; Richter, A.; Schubert, M.C.
Journal Article
2017Material limits of multicrystalline silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Journal Article, Conference Paper
2017Materials response to glancing incidence femtosecond laser ablation
Echlin, M.P.; Titus, M.S.; Straw, M.; Gumbsch, P.; Pollock, T.M.
Journal Article
2017Monolithic two-terminal III-V//Si triple-junction solar cells with 30.2% efficiency under 1-Sun AM1.5g
Cariou, R.; Benick, J.; Beutel, P.; Razek, N.; Flötgen, C.; Hermle, M.; Lackner, D.; Glunz, S.W.; Bett, A.W.; Wimplinger, M.; Dimroth, F.
Journal Article
2017A novel approach to determine the diamond occupancy of diamond wires for optimized cutting processes for crystalline silicon
Lottspeich, L.; Theophil, L.; Fuchs, M.; Kaden, T.
Conference Paper
2017On the nature of emitter diffusion and screen-printing contact formation on nanostructured silicon surfaces
Kafle, B.; Freund, T.; Schön, J.; Werner, S.; Lorenz, A.; Wolf, A.; Saint-Cast, P.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.
Journal Article
2017Platinum diffusion for advanced silicon power devices
Badr, Elie
: Pichler, Peter; Wellmann, Peter
Dissertation
2017Separation of the surface and bulk recombination in silicon by means of transient photoluminescence
Heinz, F.D.; Warta, W.; Schubert, M.C.
Journal Article
2017Si-C void structures for anodes in Li-S full cells - from coin cell to pouch cell level
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan
Presentation
2017Silicon carbon void structures as anode material for advanced lithium-ion and lithium-sulfur batteries
Baasner, Anne; Dörfler, Susanne; Althues, Holger; Kaskel, Stefan
Presentation
2017Silicon materials. Electrical and optical properties
Fell, A.
Book Article
2017Silicon self-interstitial properties deduced from platinum profiles after annealing with controlled cooling
Johnsson, Anna; Pichler, Peter; Schmidt, Gerhard
Journal Article
2017Stability of effective lifetime of float-zone silicon wafers with AlOx surface passivation schemes under illumination at elevated temperature
Niewelt, T.; Kwapil, W.; Selinger, M.; Richter, A.; Schubert, M.C.
Journal Article, Conference Paper
2017Transmission electron microscopy based interface analysis of the origin of the variation in surface recombination of silicon for different surface preparation methods and passivation materials
Ali, H.; Moldovan, A.; Mack, S.; Schoenfeld, W.V.; Davis, K.O.
Journal Article
2016Analysis of grain structure evolution based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S.
Journal Article
2016Analysis of grain structure evolution via image processing based on optical measurements of mc Si wafers
Strauch, T.; Demant, M.; Krenckel, P.; Riepe, S.; Rein, S.
Conference Paper
2016Benefits and Disadvantages of p- and n-type Doping for Multicrystalline Silicon
Schubert, M.
Presentation
2016Contact fault characterisation of complex silicon solar cells: A guideline based on current voltage characteristics and luminescence imaging
Padilla, M.; Reichel, C.; Hagedorn, N.; Fell, A.; Keding, R.; Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C.
Journal Article
2016Degradation of silicon wafers at high temperatures for epitaxial deposition
Rachow, T.; Reber, S.; Janz, S.; Knapp, M.; Milenkovic, N.
Journal Article
2016The efficiency of hydrogen-doping as a function of implantation temperature
Jelinek, Moriz; Laven, Johannes G.; Ganagona, Naveen Goud; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Conference Paper
2016Empirical cluster modeling revisited
Pichler, Peter
Conference Paper
2016Fast in-situ photoluminescence analysis for a recombination parameterization of the fast BO defect component in silicon
Niewelt, T.; Mägdefessel, S.; Schubert, M.C.
Journal Article
2016Gallium phosphide window layer for silicon solar cells
Feifel, M.; Rachow, T.; Benick, J.; Ohlmann, J.; Janz, S.; Hermle, M.; Dimroth, F.; Lackner, D.
Journal Article
2016Impact of the Firing Temperature Profile on Light Induced Degradation of Multicrystalline Silicon
Eberle, R.; Kwapil, W.; Schindler, F.; Schubert, M.C.; Glunz, S.W.
Journal Article
2016Material limits of silicon from state-of-the-art photoluminescence imaging techniques
Schindler, F.; Giesecke, J.; Michl, B.; Schön, J.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Conference Paper
2016Modeling the post-implantation annealing of platinum
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2016N-type multicrystalline silion for high efficiency solar cells
Riepe, S.; Krenckel, P.; Schindler, F.; Schubert, M.; Benick, J.
Journal Article
2016On the benefits of counting single photoluminescence photons for the investigation of low injection lifetime and traps in silicon
Heinz, F.D.; Warta, W.; Schubert, M.C.
Journal Article, Conference Paper
2016Optical Modeling of Honeycomb Textures for Multicrystalline Silicon Solar Cells
Peters, I.; Hauser, H.; Tucher, N.; Bläsi, B.
Journal Article
2016Physically sound parameterization of incomplete ionization in aluminum-doped silicon
Steinkemper, H.; Altermatt, P.P.; Hermle, M.
Journal Article
2016A possible explanation of the record electrical performance of silicon nanowire tunnel FETs with silicided source contact
Burenkov, Alex; Lorenz, Juergen
Conference Paper
2016Post-trench processing of silicon deep trench capacitors for power electronic applications
Banzhaf, Stefanie; Schwaiger, Stefan; Erlbacher, Tobias; Bauer, Anton J.; Frey, Lothar
Conference Paper
2016Simplified device simulation of silicon solar cells using a lumped parameter optical model
Fell, A.; McIntosh, K.R.; Fong, K.C.
Journal Article
2016Simplified fabrication of n-type Cz-Si HIP-MWT+ solar cells with 20% efficiency using laser structuring
Lohmüller, E.; Werner, S.; Maus, S.; Brand, A.; Jäger, U.; Nekarda, J.; Clement, F.
Journal Article, Conference Paper
2016Solar cells with 20% efficiency and lifetime evaluation of epitaxial wafers
Drießen, M.; Amiri, D.; Milenkovic, N.; Steinhauser, B.; Lindekugel, S.; Benick, J.; Reber, S.; Janz, S.
Journal Article, Conference Paper
2016Spatially resolved analysis of light induced degradation of multicrystalline PERC solar cells
Selinger, M.; Kwapil, W.; Schindler, F.; Krauß, K.; Fertig, F.; Michl, B.; Warta, W.; Schubert, M.C.
Journal Article, Conference Paper
2016Understanding process-related efficiency variations of mc-Si PERC cells
Wasmer, S.; Greulich, J.; Höffler, H.; Wöhrle, N.; Rein, S.
Journal Article
2016Untangling the mysteries of plated metal finger adhesion
Wang, X.; Hsiao, P.-C.; Zhang, W.; Johnston, B.; Stokes, A.; Wei, Q.; Fell, A.; Surve, S.; Shengzhao, Y.; Verlinden, P.; Lennon, A.
Journal Article
2015Adapted parameterization of incomplete ionization in aluminum-doped silicon and impact on numerical device simulation
Steinkemper, H.; Rauer, M.; Altermatt, P.; Heinz, F.D.; Schmiga, C.; Hermle, M.
Journal Article
2015Carrier-diffusion corrected J0-analysis of charge carrier lifetime measurements for increased consistency
Kimmerle, A.; Greulich, J.; Wolf, A.
Journal Article, Conference Paper
2015A combined transient and steady state approach for robust lifetime spectroscopy with micrometer resolution
Heinz, F.D.; Mundt, L.E.; Warta, W.; Schubert, M.C.
Journal Article
2015Development of integrated interconnected crystalline silicon thin film solar cells
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S.
Journal Article
2015Diffusion and segregation model for the annealing of silicon solar cells implanted with phosphorus
Wolf, F. Alexander; Martinez-Limia, Alberto; Grote, Daniela; Stichtenoth, Daniel; Pichler, Peter
Journal Article
2015A DLTS study of hydrogen doped czochralski-grown silicon
Jelinek, Moriz; Laven, Johannes G.; Kirnstoetter, Stefan; Schustereder, Werner; Schulze, Hans-Joachim; Rommel, Mathias; Frey, Lothar
Journal Article, Conference Paper
2015Electrical characterization of the slow boron oxygen defect component in Czochralski silicon
Niewelt, T.; Schön, J.; Broisch, J.; Warta, W.; Schubert, M.C.
Journal Article
2015Investigating the impact of parameter and process variations on multicrystalline PERC cell efficiency
Wasmer, S.; Greulich, J.; Höffler, H.; Haunschild, J.; Demant, M.; Rein, S.
Conference Paper
2015Iron related solar cell instability: Imaging analysis and impact on cell performance
Schubert, M.C.; Padilla, M.; Michl, B.; Mundt, L.; Giesecke, J.; Hohl-Ebinger, J.; Benick, J.; Warta, W.; Tajima, M.; Ogura, A.
Journal Article
2015The irresistible charm of a simple current flow pattern - approaching 25% with a solar cell featuring a full-area back contact
Glunz, S.W.; Feldmann, F.; Richter, A.; Bivour, M.; Reichel, C.; Steinkemper, H.; Benick, J.; Hermle, M.
Conference Paper
2015Local Series Resistance Imaging of Silicon Solar Cells with Complex Current Paths
Padilla, M.; Michl, B.; Hagedorn, N.; Reichel, C.; Kluska, S.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C.
Journal Article
2015Manufacturing 100-µm-thick silicon solar cells with efficiencies greater than 20% in a pilot production line
Terheiden, B.; Ballmann, T.; Horbelt, R.; Schiele, Y.; Seren, S.; Ebser, J.; Hahn, G.; Mertens, V.; Koentopp, M.B.; Scherff, M.; Müller, J.W.; Holman, Z.C.; Descoeudres, A.; Wolf, S. de; Nicolas, S.M. de; Geissbuehler, J.; Ballif, C.; Weber, B.; Saint-Cast, P.; Rauer, M.; Schmiga, C.; Glunz, S.W.; Morrison, D.J.; Devenport, S.; Antonelli, D.; Busto, C.; Grasso, F.; Ferrazza, F.; Tonelli, E.; Oswald, W.
Journal Article
2015Microscopic charge carrier lifetime in silicon from a transient approach
Heinz, F.D.; Kasemann, M.; Warta, W.; Schubert, M.C.
Journal Article
2015Modeling of gas flow and deposition profile in HWCVD processes
Pflug, A.; Höfer, M.; Harig, T.; Armgardt, M.; Britze, C.; Siemers, M.; Melzig, T.; Schäfer, L.
Journal Article, Conference Paper
2015Modeling of the electrochemical etch stop with high reverse bias across pn-junctions
Szwarc, Robert; Frey, Lothar; Weber, Hans; Moder, Iris; Erlbacher, Tobias; Rommel, Mathias; Bauer, Anton J.
Presentation
2015Nanostructuring of c-Si surface by F2-based atmospheric pressure dry texturing process
Kafle, B.; Seiffe, J.; Clochard, L.; Duffy, E.; Rentsch, J.; Hofmann, M.
Journal Article
2015Nanotextured multicrystalline Al-BSF solar cells reaching 18% conversion efficiency using industrially viable solar cell processes
Bishal, K.; Mannan, A.; Freund, T.; Clochard, L.; Duffy, E.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2015A new method for the determination of the dopant-related base resistivity despite the presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S.
Journal Article
2015Oberflächenmodifizierung mit Licht
Schmüser, Christian
Report
2015On the implication of spatial carrier density non-uniformity on lifetime determination in silicon
Heinz, F.D.; Giesecke, J.; Mundt, L.E.; Kasemann, M.; Warta, W.; Schubert, M.C.
Journal Article
2015Porous silicon reorganization: Influence on the structure, surface roughness and strain
Milenkovic, N.; Drießen, M.; Weiss, C.; Janz, S.
Journal Article
2015Potential gain in multicrystalline silicon solar cell efficiency by n-Type doping
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Journal Article
2015Record efficient upconverter solar cell devices with optimized bifacial silicon solar cells and monocrystalline BaY2F8:30% Er3+ upconverter
Fischer, S.; Favilla, E.; Tonelli, M.; Goldschmidt, J.C.
Journal Article
2015Relation between light trapping and surface topography of plasma textured crystalline silicon wafers
Souren, F.M.M.; Rentsch, J.; Sanden, M.C.M. van de
Journal Article
2015Resistivity, doping concentrations, and carrier mobilities in compensated N- and P-type Czochralski silicon: Comparison of measurements and simulations and consistent description of material parameters
Broisch, J.; Schindler, F.; Schubert, M.C.; Fertig, F.; Soiland, A.-K.; Rein, S.
Journal Article
2015Role of defects in the dopant diffusion in Si
Pichler, Peter
Book Article
2015Self-organized, effective medium Black Silicon for infrared antireflection
Steglich, Martin; Käsebier, Thomas; Schrempel, Frank; Kley, Ernst-Bernhard; Tünnermann, Andreas
Journal Article
2015Silicon crystallization technologies
Dold, P.
Book Article
2015THz emission from argon implanted silicon surfaces
Blumröder, Ulrike; Steglich, Martin; Schrempel, Frank; Hoyer, Patrick; Nolte, Stefan
Journal Article
2014A-SIO:H thin films with increased light induced degradation stability for thin film silicon solar cells
Holinski, S.; Borchert, D.; Hohage, S.; Meiners, B.-M.; Schäfer, P.; Westrich, T.
Conference Paper
2014Accurate potential drop sheet resistance measurements of laser-doped areas in semiconductors
Heinrich, M.; Kluska, S.; Binder, S.; Hameiri, Z.; Hoex, B.; Aberle, A.G.
Journal Article
2014Challenges for photovoltaic silicon materials
Coletti, G.; Gordon, I.; Schubert, M.C.; Warta, W.; Ovrelid, E.J.; Jouini, A.; Tucci, M.; Cesare, G. de
Journal Article
2014Characterisation of Ultra-Thin µc-Si Films for Silicon Heterojunction Solar Cells
Wernerus, H.; Bivour, M.; Kroely, L.; Hermle, M.; Wolke, W.
Conference Paper
2014Characterizing local contact resistances of interdigitated back contact silicon solar cells
Padilla, M.; Michl, B.; Reichel, C.; Hagedorn, N.; Kluska, S.; Haag, S.; Keding, R.; Fell, A.; Kasemann, M.; Warta, W.; Schubert, M.C.
Conference Paper
2014Comparison of patterning silicon and silicon carbide using focused ion beam
Veerapandian, S.K.P.; Beuer, Susanne; Rumler, Maximilian; Stumpf, Florian; Thomas, Keith; Pillatsch, L.; Michler, Johannes; Frey, Lothar; Rommel, Mathias
Poster
2014Deep energy levels of platinum-hydrogen complexes in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Conference Paper
2014Determination of the dopant-related base resistivity in presence of thermal donors
Broisch, J.; Haunschild, J.; Rein, S.
Conference Paper
2014Doped layer optimization for silicon heterojunctions by injection-level-dependent open-circuit voltage measurements
Bivour, M.; Reusch, M.; Schröer, S.; Feldmann, F.; Temmler, J.; Steinkemper, H.; Hermle, M.
Journal Article
2014Efficiency-limiting recombination in multicrystalline silicon solar cells
Schubert, M.C.; Schön, J.; Abdollahinia, A.; Michl, B.; Kwapil, W.; Schindler, F.; Heinz, F.; Padilla, M.; Giesecke, J.; Breitwieser, M.; Riepe, S.; Warta, W.
Conference Paper
2014Explanation of potential-induced degradation of the shunting type by Na decoration of stacking faults in Si solar cells
Naumann, V.; Lausch, D.; Hähnel, A.; Bauer, J.; Breitenstein, O.; Graff, A.; Werner, M.; Swatek, S.; Großer, S.; Bagdahn, J.; Hagendorf, C.
Journal Article
2014Front side antireflection concepts for silicon solar cells with diffractive rear side structures
Bett, A.; Eisenlohr, J.; Höhn, O.; Bläsi, B.; Benick, J.; Repo, P.; Savin, H.; Goldschmidt, J.C.; Hermle, M.
Conference Paper
2014Heavily doped Si:P emitters of crystalline Si solar cells: Recombination due to phosphorus precipitation
Min, B.; Wagner, H.; Dastgheib-Shirazi, A.; Kimmerle, A.; Kurz, H.; Altermatt, P.P.
Journal Article
2014Increased Reliability for J0-Analysis by QSSPC
Kimmerle, A.; Rothhardt, P.; Wolf, A.; Sinton, R.A.
Conference Paper
2014Influence of rear-side passivation on solar cell performance of bosco solar cells
Krauß, K.; Fertig, F.; Greulich, J.; Clement, F.; Biro, D.; Preu, R.; Rein, S.
Conference Paper
2014Interdigitated back contact silicon solar cells with tunnel oxide passivated contacts formed by ion implantation
Reichel, C.; Feldmann, F.; Müller, R.; Moldovan, A.; Hermle, M.; Glunz, S.W.
Conference Paper
2014Kroll-carbons based on silica and alumina templates as high-rate electrode materials in electrochemical double-layer capacitors
Oschatz, Martin; Boukhalfa, S.; Nickel, Winfried; Lee, J.T.; Klosz, Stefan; Borchardt, L.; Eychmüller, Alexander; Yushin, G.; Kaskel, Stefan
Journal Article
2014Micro characterization of laser structured solar cells with plated Ni-Ag contacts
Kluska, S.; Fleischmann, C.; Büchler, A.; Hördt, W.; Geisler, C.; Hopman, S.; Glatthaar, M.
Journal Article
2014Microscopic origin of the aluminium assisted spiking effects in n-type silicon solar cells
Heinz, F.D.; Breitwieser, M.; Gundel, P.; König, M.; Hörteis, M.; Warta, W.; Schubert, M.C.
Journal Article, Conference Paper
2014Modeling platinum diffusion in silicon
Badr, Elie; Pichler, Peter; Schmidt, Gerhard
Journal Article
2014Modeling the annealing of dislocation loops in implanted c-Si solar cells
Wolf, F. Alexander; Martinez-Limia, Alberto; Stichtenoth, Daniel; Pichler, Peter
Journal Article
2014On an improved boron segregation calibration from a particularly sensitive power MOS process
Koffel, S.; Burenkov, A.; Sekowski, M.; Pichler, P.; Giubertoni, D.; Bersani, M.; Knaipp, M.; Wachmann, E.; Schrems, M.; Yamamoto, Y.; Bolze, D.
Journal Article, Conference Paper
2014The potential of multicrystalline n-type silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Kleiber, A.; Steinkemper, H.; Schön, J.; Kwapil, W.; Krenckel, P.; Riepe, S.; Warta, W.; Schubert, M.C.
Conference Paper
2014Process control and defect analysis for crystalline silicon thin films for photovoltaic applications by the means of electrical and spectroscopic microcharacterization tools
Breitwieser, M.; Heinz, F.; Rachow, T.; Kasemann, M.; Janz, S.; Warta, W.; Schubert, M.C.
Journal Article
2014Relaxation of vacancy depth profiles in silicon wafers: A low apparent diffusivity of vacancy species
Voronkov, Vladimir V.; Falster, Robert; Pichler, Peter
Journal Article
2014Reorganization of Porous Silicon. Effect on Epitaxial Layer Quality and Detachment
Milenkovic, N.; Drießen, M.; Gust, E.; Janz, S.; Reber, S.
Conference Paper, Journal Article
2014Short-circuit current density mapping for solar cells
Padilla, M.; Michl, B.; Thaidigsmann, B.; Warta, W.; Schubert, M.C.
Journal Article
2014Silicon heterojunction rear emitter solar cells: Less restrictions on the optoelectrical properties of front side TCOs
Bivour, M.; Schröer, S.; Hermle, M.; Glunz, S.W.
Journal Article
2014Simulation of AsH3 plasma immersion ion implantation into silicon
Burenkov, Alex; Lorenz, Jürgen; Spiegel, Yohann; Torregrosa, Frank
Conference Paper
2014Solar cell efficiency losses due to impurities from the crucible in multicrystalline silicon
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M.
Journal Article
2014Specific aspects of roughness and interface diffusion in non-periodic Mo/Si multilayers
Braun, Stefan; Gawlitza, Peter; Menzel, Maik; Friedrich, Wolfgang; Schmidt, Jürgen; Leson, Andreas
Conference Paper
2014Towards a unified low-field model for carrier mobilities in crystalline silicon
Schindler, F.; Forster, M.; Broisch, J.; Schön, J.; Giesecke, J.; Rein, S.; Warta, W.; Schubert, M.C.
Journal Article
2013Anomalous impurity segregation and local bonding fluctuation in l-Si
Fisicaro, G.; Huet, K.; Negru, R.; Hackenberg, M.; Pichler, P.; Taleb, N.; La Magna, A.
Journal Article
2013Characterization and modeling of screen-printed metal insulator semiconductor tunnel junctions for integrated bypass functionality in crystalline silicon solar cells
Thaidigsmann, Benjamin; Lohmüller, Elmar; Fertig, Fabian; Clement, Florian; Wolf, Andreas
Journal Article
2013Co-diffusion from solid sources for bifacial n-type solar cells
Rothhardt, P.; Keding, R.; Wolf, A.; Biro, D.
Journal Article
2013A comprehensive model for the diffusion of boron in silicon in presence of fluorine
Wolf, F. Alexander; Martinez-Limia, Alberto; Pichler, Peter
Journal Article
2013Determination of crystal grain orientations by optical microscopy at textured surfaces
Lausch, D.; Gläser, M.; Hagendorf, C.
Journal Article
2013Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
Fisicaro, G.; Pelaz, L.; Aboy, M.; Lopez, P.; Italia, M.; Huet, K.; Cristiano, F.; Essa, Z.; Yang, Q.; Bedel-Pereira, E.; Hackenberg, M.; Pichler, P.; Quillec, M.; Taleb, N.; La Magna, A.
Conference Paper
2013Effective passivation of black silicon surfaces by atomic layer deposition
Repo, P.; Haarahiltunen, A.; Sainiemi, L.; Yli-Koski, M.; Talvitie, H.; Schubert, M.C.; Savin, H.
Journal Article
2013Effects of high-temperature treatment on the hydrogen distribution in silicon oxynitride/silicon nitride stacks for crystalline silicon surface passivation
Schwab, C.; Hofmann, M.; Heller, R.; Seiffe, J.; Rentsch, J.; Preu, R.
Journal Article
2013Extended model for platinum diffusion in silicon
Badr, E.; Pichler, P.; Schmidt, G.
Conference Paper
2013Impact of impurities from crucible and coating on mc-silicon quality - the example of iron and cobalt
Schubert, M.C.; Schön, J.; Schindler, F.; Kwapil, W.; Abdollahinia, A.; Michl, B.; Riepe, S.; Schmid, C.; Schumann, M.; Meyer, S.; Warta, W.
Journal Article
2013Influence of argon flow rate on melt convection and incorporation of SiC in multicrystalline silicon
Schmid, C.; Schumann, M.; Haas, F.; Riepe, S.
Conference Paper
2013IntegRex - process development of a module interconnection concept for thin crystalline silicon films
Pavlovic, R.; Lindekugel, S.; Janz, S.; Reber, S.
Conference Paper
2013Interstitial chromium in silicon on the micron scale
Heinz, F.D.; Schindler, F.; Warta, W.; Schubert, M.C.
Journal Article, Conference Paper
2013Kerfless wafering for silicon wafers by using a reusable metal layer
Schoenfelder, S.; Breitenstein, O.; Rissland, S.; Donno, R. de; Bagdahn, J.
Journal Article, Conference Paper
2013Laser assisted honeycomb-texturing on multicrystalline silicon for industrial applications
Volk, A.-K.; Gutscher, S.; Brand, A.; Wolke, W.; Zimmer, M.; Reinecke, H.
Conference Paper
2013Light-induced degradation in copper-contaminated gallium-doped silicon
Lindroos, J.; Yli-Koski, M.; Haarahiltunen, A.; Schubert, M.C.; Savin, H.
Journal Article
2013Macroporous silicon and its application in sensing
Wehrspohn, R.B.; Schweizer, S.L.; Gesemann, B.; Pergande, D.; Geppert, T.M.; Moretton, S.; Lambrecht, A.
Journal Article
2013Material limitations due to crucible impurities in multicrystalline silicon for high efficiency solar cells
Schindler, F.; Michl, B.; Schön, J.; Kwapil, W.; Warta, W.; Schubert, M.C.
Conference Paper
2013Melt depth and time variations during pulsed laser thermal annealing with one and more pulses
Hackenberg, Moritz; Rommel, Mathias; Rumler, M; Lorenz, Jürgen; Pichler, Peter; Huet, Karim; Negru, Razvan; Fisicaro, Giuseppe; Magna, Antonino la; Taleb, Nadjib; Quillec
Conference Paper
2013Numerical analysis of electrical TCO / a-Si:H(p) contact properties for silicon heterojunction solar cells
Bivour, M.; Schröer, S.; Hermle, M.
Journal Article, Conference Paper
2013On the strain induced by arsenic into silicon
Koffel, Stéphane; Pichler, Peter; Lorenz, Jürgen; Bisognin, Gabriele; Napolitani, Enrico; Salvador, Davide de
Conference Paper
2013P-Type MWT solar cells: Current status and future expectations
Thaidigsmann, B.; Hendrichs, M.; Nold, S.; Lohmüller, E.; Wolf, A.; Clement, F.; Biro, D.; Preu, R.
Conference Paper
2013Passivation of black silicon boron emitters with atomic layer deposited aluminum oxide
Repo, P.; Benick, J.; Gastrow, G. von; Vähänissi, V.; Heinz, F.D.; Schön, J.; Schubert, M.C.; Savin, H.
Journal Article
2013PECVD Al2O3/a-Si:B as a dopant source and surface passivation
Seiffe, J.; Gahoi, A.; Hofmann, M.; Rentsch, J.; Preu, R.
Journal Article
2013Screened empirical bond-order potentials for Si-C
Pastewka, L.; Klemenz, A.; Gumbsch, P.; Moseler, M.
Journal Article
2013Wafer thickness optimization for silicon solar cells of heterogeneous material quality
Michl, B.; Kasemann, M.; Warta, W.; Schubert, M.C.
Journal Article
2012Angular distributions of sputtered silicon at grazing gallium ion beam incidence
Burenkov, Alex; Sekowski, Matthias; Belko, Viktor; Ryssel, Heiner
Journal Article, Conference Paper
2012Characterization of grain boundaries in multicrystalline silicon with high lateral resolution using conductive atomic force microscopy
Rumler, Maximilian; Rommel, Mathias; Erlekampf, Jürgen; Azizi, Maral; Geiger, Tobias; Bauer, Anton J.; Meißner, Elke; Frey, Lothar
Journal Article
2012Formation of gold nanoparticles in polymeric nanowires by low-temperature thermolysis of gold mesitylene
Erk, C.; Eric Yau, M.Y.; Lange, H.; Thomsen, C.; Miclea, P.; Wehrspohn, R.B.; Schlecht, S.; Steinhart, M.
Journal Article
2012Implantation-induced structural defects in highly activated USJs: Boron precipitation and trapping in pre-amorphised silicon
Cristiano, F.; Essa, Z.; Qiu, Y.; Spiegel, Y.; Torregrosa, F.; Duchaine, J.; Boulenc, P.; Tavernier, C.; Cojocaru, O.; Blavette, D.; Mangelinck, D.; Fazzini, P.F.; Quillec, M.; Bazizi, M.; Hackenberg, M.; Boninelli, S.
Conference Paper
2012Improving module performance and reliability in power electronic applications by monolithic integration of RC-snubbers
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Berberich, Sven E.; Dorp, Joachim vom; Frey, Lothar
Conference Paper
2012Loss analysis and efficiency potential of p-type MWT-PERC solar cells
Thaidigsmann, Benjamin; Greulich, Johannes; Lohmüller, Elmar; Schmeißer, Simon; Clement, Florian; Wolf, Andreas; Biro, Daniel; Preu, Ralf
Journal Article, Conference Paper
2012Material characterization to model linear viscoelastic behavior of thin organic polymer films in microelectronics
Unterhofer, K.; Preu, H.; Walter, J.; Lorenz, G.; Mack, W.; Petzold, M.
Conference Paper
2012Micro structural root cause analysis of potential induced degradation in c-Si solar cells
Naumann, V.; Hagendorf, C.; Grosser, S.; Werner, M.; Bagdahn, J.
Journal Article, Conference Paper
2012Modeling boron profiles in silicon after pulsed excimer laser annealing
Hackenberg, M.; Huet, K.; Negru, R.; Venturini, J.; Fisicaro, G.; La Magna, A.; Pichler, P.
Conference Paper
2012The path to industrial production of highly efficient metal wrap through silicon solar cells
Thaidigsmann, Benjamin; Linse, Michael; Wolf, Andreas; Clement, Florian; Biro, Daniel; Preu, Ralf
Journal Article
2012Precipitation of antimony implanted into silicon
Koffel, S.; Pichler, P.; Reading, M.A.; Berg, J. van den; Kheyrandish, H.; Hamm, S.; Lerch, W.; Pakfar, A.; Tavernier, C.
Journal Article, Conference Paper
2012Reliability characterization of dielectrics in 200V trench capacitors
Erlbacher, Tobias; Schwarzmann, Holger; Bauer, Anton J.; Dorp, Joachim vom; Frey, Lothar
Poster
2012Simulation of BF3 plasma immersion ion implantation into silicon
Burenkov, A.; Hahn, A.; Spiegel, Y.; Etienne, H.; Torregrosa, F.
Conference Paper
2012Strength of thin silicon wafers with via holes
Schoenfelder, S.; Kaule, F.; Oswald, M.; Bagdahn, J.; Petzold, M.
Conference Paper
2012Terahertz thin film and refractive index sensing with a metamaterial near-field sensor
Schmitt, Klemens; Wollrab, Viktoria; Neu, Jens; Beigang, René; Rahm, Marco
Conference Paper
2011Challenges in TCAD simulations of tunneling field effect transistors
Kampen, Christian; Burenkov, Alex; Lorenz, Jürgen
Conference Paper
2011Comparison of optical and tactile layer thickness measurements of polymers and metals on silicon or SiO2
Brand, U.; Beckert, E.; Beutler, A.; Dai, G.; Stelzer, C.; Hertwig, A.; Klapetek, P.; Koglin, J.; Thelen, R.; Tutsch, R.
Journal Article
2011Monolithic RC-snubber for power electronic applications
Dorp, Joachim vom; Berberich, Sven E.; Erlbacher, Tobias; Bauer, Anton J.; Ryssel, Heiner; Frey, Lothar
Conference Paper
2011Periodic silicon nanostructures for spectroscopic microsensors
Wehrspohn, R.; Gesemann, B.; Pergande, D.; Geppert, T.; Schweizer, S.; Moretton, S.; Lambrecht, A.
Conference Paper
2011Plasmonic reflection grating back contacts for microcrystalline silicon solar cells
Paetzold, U.W.; Moulin, E.; Michaelis, D.; Böttler, W.; Wächter, C.; Hagemann, V.; Meier, M.; Carius, R.; Rau, U.
Journal Article
2011Quantitative comparison of simulated and experimental silver crystal formation at the interface of silver thick film contacts on n-type silicon
Kontermann, S.; Ruf, A.; Preu, R.
Conference Paper, Journal Article
2011Resonance effects in photoemission from TiO2-capped Mo/Si multilayer mirrors for extreme ultraviolet applications
Faradzhev, N.S.; Yakshinskiy, B.V.; Starodub, E.; Madey, T.E.; Hill, S.B.; Grantham, S.; Lucatorto, T.B.; Yulin, S.; Vescovo, E.; Keister, J.W.
Journal Article
2011Trace element analysis in solar silicon
Meyer, S.; Richter, S.; Balski, M.; Hagendorf, C.
Journal Article
2010CCD-camera-based electro-optical detection of nanosecond THz pulses from an optical parametric oscillator
Meng, F.Z.; Thomson, M.D.; Molter, D.; Löffler, T.; Jonuscheit, J.; Beigang, R.; Bartschke, J.; Bauer, T.; Nittmann, M.; Roskos, H.G.
Conference Paper
2010DLC/Si multilayer mirrors for EUV radiation
Gawlitza, P.; Braun, S.; Leson, A.; Soer, W.; Jak, M.; Banine, V.
Conference Paper
2010Fast transient temperature operating micromachined emitter for mid-infrared optical gas sensing systems. Design, fabrication, characterization and optimization
Hildenbrand, J.; Peter, C.; Lamprecht, F.; Kürzinger, A.; Naumann, F.; Ebert, M.; Wehrspohn, R.; Korvink, J.G.; Wöllenstein, J.
Conference Paper, Journal Article
2010Imaging of metal impurities in silicon by luminescence spectroscopy and synchrotron techniques
Schubert, M.C.; Schön, J.; Gundel, P.; Habenicht, H.; Kwapil, W.; Warta, W.
Journal Article, Conference Paper
2010Micro-segregations in liquid phase sintered silicon carbide ceramics
Herrmann, M.; Neher, R.; Brandt, K.; Hoehn, S.
Journal Article
2010Review of stress effects on dopant solubility in silicon and silicon-germanium layers
Bennett, N.S.; Ahn, C.; Cowern, N.E.B.; Pichler, P.
Conference Paper
2009Modular bimorph mirrors for adaptive optics
Rodrigues, G.; Bastaits, R.; Roose, S.; Stockman, Y.; Gebhardt, S.; Schönecker, A.; Villon, P.; Preumont, A.
Journal Article
2009Surface amorphization, sputter rate, and intrinsic stresses of silicon during low energy Ga+ focused-ion beam milling
Pastewka, L.; Salzer, R.; Graff, A.; Altmann, F.; Moseler, M.
Conference Paper, Journal Article
2008Detailed arsenic concentration profiles at Si/SiO2 interfaces
Pei, L.; Duscher, G.; Steen, C.; Pichler, P.; Ryssel, H.; Napolitani, E.; Salvador, D. de; Piro, A.M.; Terrasi, A.; Severac, F.; Cristiano, F.; Ravichandran, K.; Gupta, N.; Windl, W.
Journal Article
2008Distribution and segregation of arsenic at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Paul, S.; Lerch, W.; Pei, L.; Duscher, G.; Severac, F.; Cristiano, F.; Windl, W.
Journal Article
2008Influence of nanoparticles surface composition on the properties of epoxide based adhesives
Hartwig, A.; Trautmann, J.; Sebald, M.
Conference Paper
2008Mechanical strength of mono- and multicrystalline wafers
Schönfelder, S.; Bohne, A.; Bagdahn, J.
Conference Paper
2008Modeling and simulation of advanced annealing processes
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W.
Book Article
2008Modeling of the diffusion and activation of arsenic in silicon including clustering and precipitation
Martinez-Limia, A.; Pichler, P.; Steen, C.; Paul, S.; Lerch, W.
Conference Paper
2008On a computationally efficient approach to boron-interstitial clustering
Schermer, J.; Martinez-Limia, A.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S.
Journal Article, Conference Paper
2008Powered by nanowires
Wehrspohn, R.B.
Journal Article
2008Process models for advanced annealing schemes and their use in device simulation
Pichler, P.; Martinez-Limia, A.; Kampen, C.; Burenkov, A.; Schermer, J.; Paul, S.; Lerch, W.; Gelpey, J.; McCoy, S.; Kheyrandish, H.; Pakfar, A.; Tavernier, C.; Bolze, D.
Conference Paper
2008Thermal emission properties of 2D and 3D silicon photonic crystals
Gesemann, B.; Schweizer, S.L.; Wehrspohn, R.B.
Conference Paper
2007Advanced activation and deactivation of arsenic-implanted ultra-shallow junctions using flash and spike + flash annealing
Lerch, W.; Paul, S.; Niess, J.; McCoy, S.; Gelpey, J.; Bolze, D.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Martinez, A.; Pichler, P.
Conference Paper
2007Characterization of the impurity profile at the SiO2/Si interface using a combination of total reflection x-ray fluorescence spectrometry and successive etching of silicon
Steen, C.; Nutsch, A.; Pichler, P.; Ryssel, H.
Journal Article
2007Characterization of the pile-up of As at the SiO2/Si interface
Steen, C.; Martinez-Limia, A.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Windl, W.
Conference Paper
2007Characterization of the Segregation of Arsenic at the Interface SiO2/Si
Steen, C.; Pichler, P.; Ryssel, H.; Pei, L.; Duscher, G.; Werner, M.; Berg, J.A. van den; Windl, W.
Conference Paper
2007Degradation of the minority carrier lifetime caused by Mn-correlated defects in Ga-implanted Si:P
Beljakowa, S.; Pensl, G.; Rommel, M.
Poster
2007Diffusion and deactivation of As in Si: Combining atomistic and continuum simulation approaches
Martinez-Limia, A.; Steen, C.; Pichler, P.; Gupta, N.; Windl, W.; Paul, S.; Lerch, W.
Conference Paper
2007Experimental and theoretical results of dopant activation by a combination of spike and flash annealing
Lerch, W.; Paul, S.; Niess, J.; Chan, J.; McCoy, S.; Gelpey, J.; Cristiano, F.; Severac, F.; Fazzini, P.F.; Bolze, D.; Pichler, P.; Martinez, A.; Mineji, A.; Shishiguchi, S.
Conference Paper
2007High voltage 3D-capacitor
Berberich, S.E.; Bauer, A.J.; Ryssel, H.
Conference Paper
2007Modelling (100) hydrogen-induced platelets in silicon with a multi-scale molecular dynamics approach
Moras, G.; Ciacchi, L.C.; Csanyi, G.; Vita, A. de
Conference Paper, Journal Article
2007Modifizierung einheimischer Hölzer durch Imprägnierung mit überkritischem Kohlendioxid als Lösungsmittel
Danzig, J.; Jelen, E.; Deerberg, G.; Kareth, S.; Weidner, E.; Mai, C.; Ghosh, S.C.; Militz, H.
Conference Paper
2007On a computationally efficient approach to Boron-interstitial clustering
Schermer, J.; Pichler, P.; Zechner, C.; Lerch, W.; Paul, S.
Conference Paper
2006Abschlussbericht zum Vorhaben "Modifizierung von einheimischen Hölzern durch Imprägnierung mit überkritischem Kohlendioxid"
Deerberg, G.; Danzig, J.; Jelen, E.
Report
2006Development of functional ceramic films for nano and microsystems technology
Schönecker, A.; Gebhardt, S.; Schlenkrich, F.; Endler, I.; Mayer-Uhma, T.; Uhlig, S.
Conference Paper
2006Diffusion and activation of dopants in silicon and advanced silicon-based materials
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Uppal, S.; Karunaratne, M.S.A.; Bonar, J.M.; Willoughby, A.F.W.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S.
Journal Article
2006Efficient generation of Cherenkov-type terahertz radiation from a lithium niobate crystal with a silicon prism output coupler
Theuer, M.; Torosyan, G.; Rau, C.; Beigang, R.; Maki, K.; Otani, C.; Kawase, K.
Journal Article
2006Laser helical drilling of silicon wafers with ns to fs pulses
Kaspar, J.; Luft, A.; Nolte, S.; Will, M.; Beyer, E.
Journal Article
2006Nanomaterials produced by laser ablation techniques. Part I: Synthesis and passivation of nanoparticles
Murray, P.; Köhler, B.; Lipfert, S.; Kaspar, J.; Schreiber, J.
Conference Paper
2006Neuartige Methoden zur Imprägnierung von Werkstoffen und Bauteilen
Jelen, E.; Brandin, H.G.; Danzig, J.; Deerberg, G.; Kareth, S.; Kilzer, A.; Weidner, E.; Petermann, M.
Abstract
2006Numerical identification of geometric parameters from dynamic measurement of grinded membranes on wafer level
Ebert, M.; Gerbach, R.; Bagdahn, J.; Michael, S.; Hering, S.
Conference Paper
2006PZT thick films for microsystems applications
Gebhardt, S.; Seffner, L.; Schlenkrich, F.; Schönecker, A.
Conference Paper
2006A test structure for characterization of the interface energy of anodically bonded silicon-glass wafers
Knechtel, R.; Knaup, M.; Bagdahn, J.
Conference Paper, Journal Article
2005Ab initio identification of the nitrogen diffusion mechanism in silicon
Stoddard, N.; Pichler, P.; Duscher, G.; Windl, W.
Journal Article
2005Mechanical reliability of directly bonded silicon MEMS components
Bagdahn, J.; Wiemer, M.; Petzold, M.
Conference Paper
2005Preparation and characterization of multilayers for EUV applications
Foltyn, T.; Braun, S.; Friedrich, W.; Leson, A.; Menzel, M.
Conference Paper
2004Automatische Optimierung von Festphasenbildungsprozessen bei der Abscheidung von Reinstsilizium
Kümmel, R.; Blömer, J.; Hediger, F.; Laqua, R.; Bäck, T.; Emmerich, M.
Conference Paper
2004Debonding of wafer-bonded interfaces for handling and transfer applications
Bagdahn, J.; Petzold, M.
Book Article
2004Effect of oxygen on the diffusion of nitrogen implanted in silicon
Mannino, G.; Privitera, V.; Scalese, S.; Libertino, S.; Napolitani, E.; Pichler, P.; Cowern, N.E.B.
Journal Article
2004Electrical deactivation and diffusion of boron in preamorphized ultrashallow junctions: Interstitial transport and F co-implant control
Colombeau, B.; Smith, A.J.; Cowern, N.E.B.; Lerch, W.; Paul, S.; Pawlak, B.J.; Cristiano, F.; Hebras, X.; Bolze, D.; Ortiz, C.; Pichler, P.
Conference Paper
2004Intrinsic point defects, impurities, and their diffusion in silicon
Pichler, P.
Book
2004Modeling of extrinsic extended defect evolution in ion-implanted silicon upon thermal annealing
Ortiza, C.J.; Cristiano, F.; Colombeau, B.; Claverie, A.; Cowern, N.E.B.
Conference Paper
2004On the modeling of transient diffusion and activation of boron during post-implantation annealing
Pichler, P.; Ortiz, C.J.; Colombeau, B.; Cowern, N.E.B.; Lampin, E.; Claverie, A.; Cristiano, F.; Lerch, W.; Paul, S.
Conference Paper
2004Preface to the special issue on the EMRS 2004 Symposium B on "Material Science Issues in Advanced CMOS Source-drain Engineering"
Mannino, G.; Feudel, T.; Pichler, P.; Servidori, M.
Conference Paper
2003L'Anisotropia de propagazione della frattura in silicio: Simulazione teorica mediante une nuova technica di embedding
Vita, A. de; Albaret, T.; Gumbsch, P.; Meriani, S.
Conference Paper
2003Transient-diffusion effects
Stiebel, D.; Pichler, P.
Journal Article
20022K PL topography of silicon doped VGf-GaAs wafers
Baeumler, M.; Maier, M.; Herres, N.; Bünger, T.; Stenzenberger, J.; Jantz, W.
Journal Article
2002Anomalous refraction and diffraction in discrete optical systems
Pertsch, T.; Zentgraf, T.; Peschel, U.; Bräuer, A.; Lederer, F.
Journal Article
2002Imaging and measurement of local mechanical material properties by atomic force acoustic microscopy
Rabe, U.; Amelio, S.; Kopycinska, M.; Hirsekorn, S.; Kempf, M.; Göken, M.; Arnold, W.
Journal Article
2002Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region
Thielsch, R.; Gatto, A.; Kaiser, N.
Journal Article
2001Locally selective bonding of silicon and glass with laser
Wild, M.J.; Gillner, A.; Poprawe, R.
Journal Article
2001Mo/Si multilayers with different barrier layers for applications as EUV mirrors
Braun, S.; Mai, H.; Moss, M.; Scholz, R.
Conference Paper
2001New materials in future memories: High temperature behaviour of Sr, Bi and Ir on silicon surfaces monitored by TXRF and ELYMAT
Kilian, G.; Kolbesen, B.O.; Rommel, M.; Pamler, W.; Unger, E.; Höpfner, A.
Conference Paper
2001Upscaling of texture-etched zinc oxide substrates for silicon thin film solar cells
Müller, J.; Schöpe, G.; Kluth, O.; Bech, R.; Ruske, M.; Trube, J.; Szyszka, B.; Jiang, X.; Bräuer, G.
Conference Paper, Journal Article
2000Lifetime investigations of directly wafer-bonded samples under static and cyclic loading
Bagdahn, J.; Petzold, M.; Sommer, E.
Conference Paper
2000Strength analysis of a micromechanical acceleration sensor by fracture mechanical approaches
Bagdahn, J.; Petzold, M.; Seidel, H.
Conference Paper
1999Basic investigations on a system for measuring intraocular pressure
Schnakenberg, U.; Walter, P.; VomBögel, G.; Krüger, C.; Lüdtke Handjery, H.C.; Richter, H.A.; Specht, W.; Ruokonen, P.; Mokwa, W.
Conference Paper
1999Characterization of oxide etching and wafer cleaning using vapor phase anhydrous hydrofluoric acid and ozone
Bauer, A.J.; Froeschle, B.; Beichele, M.; Ryssel, H.
Conference Paper
1999Implantable microdevices
Mokwa, W.; Schnakenberg, U.
Conference Paper
1999Monolithic integration of III-V microcavity LEDs on silicon drivers using conformal epitaxy
Gerard, B.; Marcadet, X.; Etienne, P.; Pribat, D.; Friedrich, D.; Eichholz, J.; Bernt, H.; Carlin, J.-F.; Ilegems, M.
Conference Paper
1999Reliability of ultra-thin gate oxides grown in low-pressure N20 ambient or on nitrogen-implanted silicon
Bauer, A.J.; Beichele; Herden, M.; Ryssel, H.
Conference Paper
1999Simulation of the production of functional layers for vibration sensors for tool state monitoring and finite element analysis of mechanical characteristics
Thomas, J.; Kuhnhold, R.; Schnupp, R.; Temmel, G.; Ryssel, H.
Conference Paper
1999Theoretische und experimentelle Untersuchungen für eine Bemessung und serienreife Entwicklung von Ein- und Auslassventilen aus Siliziumnitrid
Sonsino, C.M.; Brandt, U.; Stoerzel, K.
Conference Paper
1998CMOS sensor systems
Hosticka, B.J.
Conference Paper
1998Gas Flow Simulation in a Rapid Thermal Processing System
Poscher, S.
Book Article
1998Selective infill metalorganic molecular beam epitaxy of InP:Si n+/n- layers for buried collector double heterostructure bipolar transistors
Schelhase, S.; Bottcher, J.; Gibis, R.; Harde, P.; Paraskevopoulos, A.; Kunzel, H.
Journal Article
1998A self-priming and bubble-tolerant piezoelectric silicon micropump for liquids and gases
Linnemann, R.; Woias, P.; Senfft, C.-D.; Ditterich, J.A.
Conference Paper
1998Variation of the wettability of DLC-coatings by network modification using silicon and oxygen
Grischke, M.; Hieke, A.; Morgenweck, F.; Dimigen, H.
Journal Article, Conference Paper
1997Characterization of vapor phase deposited organic molecules on silicon surfaces
Dieckhoff, S.; Höper, R.; Schlett, V.; Gesang, T.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V.
Journal Article
1997Electron microscopic investigation of structural changes in single crystalline silicon induced by short pulse laser drilling
Kaspar, J.; Luft, A.
Conference Paper
1997Low energy implantation and transient enhanced diffusion
Cowern, N.E.B.; Collart, E.J.H.; Politiek, J.; Bancken, P.H.L.; Berkum, J.G.M. van; Kyllesbech Larsen, K.; Stolk, P.A.; Huizing, H.G.A.; Pichler, P.; Burenkov, A.; Gravensteijn, D.J.
Conference Paper
1997MBE growth of high-quality InP for GaInAs/InP heterostructures using incongruent evaporation of GaP
Kuenzel, H.; Boettcher, J.; Harde, P.; Maessen, R.
Conference Paper, Journal Article
1997Microchannels for applications in liquid dosing and flow-rate measurement
Richter, M.; Woias, P.; Weiss, D.
Conference Paper
1997New developments of the ELYMAT technique
Eichinger, P.; Rommel, M.
Conference Paper
1996Adhesion and film structure of cyanurates on solids
Possart, W.; Dieckhoff, S.; Gesang, T.; Schlett, V.; Hennemann, O.-D.
Conference Paper
1996The analysis of surface-adsorbed organic molecules by alkali-assisted MIES combined with UPS(Hel)
Günster, J.; Ochs, D.; Dieckhoff, S.; Schlett, V.
Journal Article
1996Characterization of triazine derivatives on silicon wafers studied by photoelectron spectroscopy (XPS, UPS) and metastable impact electron spectroscopy (MIES)
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.; Günster, J.; Kempter, V.
Journal Article
1996Dry etching and micromachining of precision Silicon components
Kreutz, E.W.; Pfleging, W.; Jandeleit, J.; Urbasch, G.
Conference Paper
1996MOMBE selective infill growth of InP:Si and InGaAs:Si and large area MOMBE regrowth
Schelhase, S.; Boettcher, J.; Gibis, R.; Kuenzel, H.; Paraskevopoulos, A.
Conference Paper, Journal Article
1995Active silicon CMOS addressing matrices for light-valve projection displays
Molzow, W.-D.; Brinker, W.; Wirges, W.; Gerhard-Multhaupt, R.; Melcher, R.; Budde, W.; Fiedler, H.
Journal Article
1995Comparative film thickness determination by atomic force microscopy and ellipsometry for ultrathin prepolymer films
Gesang, T.; Fanter, D.; Höper, R.; Possart, W.; Hennemann, O.-D.
Journal Article
1995Determination of vacancy concentration in float zone and Czochralski silicon
Jacob, M.; Pichler, P.; Ryssel, H.; Gambaro, D.; Falster, R.
Conference Paper
1995Elektronenspektroskopische Charakterisierung der Adhäsion von Triazinderivaten und Cyansäureestern auf Siliziumoberflächen
Dieckhoff, S.
Dissertation
1995Nitrogen implanted etch-stop layers in silicon
Paneva, R.; Temmel, G.; Ryssel, H.; Burte, E.P.
Conference Paper
1995Novel potentiometric silicon sensor for medical devices
Schnakenberg, U.; Lisec, T.; Hintsche, R.; Kuna, I.; Uhlig, A.; Wagner, B.
Conference Paper
1995Platinum diffusion at low temperatures
Jacob, M.; Pichler, P.; Ryssel, H.; Falster, R.
Conference Paper
1995Prepolymer film growth by adsorption out of solution on silicon and aluminium. An atomic force microscope study
Gesang, T.; Höper, R.; Dieckhoff, S.; Hartwig, A.; Possart, W.; Hennemann, O.-D.
Journal Article
1995A Raman spectroscopic study of the Si, Be, and C incorporation in InxGa1-xAs relaxed layers
Alvarez, A.-L.; Calle, F.; Sacedon, A.; Calleja, E.; Munoz, E.; Wagner, J.; Maier, M.; Mazuelas, A.; Ploog, K.H.
Journal Article
1995Silicon incorporation in GaAs. From delta-doping to monolayer insertion
Wagner, J.; Newman, R.C.; Roberts, C.
Journal Article
1995Studies of heteroepitaxial nucleation and growth of diamond on silicon
Jiang, X.; Paul, M.; Klages, C.-P.; Jia, C.L.
Conference Paper
1995Ultrasonic transducer with silicon membrane for liquid nebulization
Paneva, R.; Temmel, G.
Conference Paper
1995Ultrasonic transducer with silicon. A well known material with new applications
Paneva, R.; Temmel, G.; Ryssel, H.
Conference Paper
1995X-ray curve characterization of homo-epitaxial layers on silicon deposited after DC hydrogen cleaning
Dommann, A.; Herres, N.; Deller, H.R.; Nissen, H.U.; Krüger, D.; Pixley, R.E.; Ramm, J.
Journal Article
1995XPS studies of thin polycyanurate films on silicon wafers
Dieckhoff, S.; Schlett, V.; Possart, W.; Hennemann, O.-D.
Journal Article
1994Adsorption behaviour of a prepolymer on aluminium and silicon.
Hartwig, A.; Zha, Z.; Possart, W.; Hennemann, O.-D.
Conference Paper
1994Analytical description of high energy implantation profiles of bordon and phosphorus into crystalline silicon
Gong, L.; Bogen, S.; Frey, L.; Jung, W.; Ryssel, H.
Journal Article
1994CO and CO2 thin-film SnO2 gas sensors on Si-substrates
Hoefer, U.; Kühner, G.; Schweizer, W.; Sulz, G.; Steiner, K.
Journal Article
1994Electrical and structural characteristics of thin buried oxides
Meda, L.; Bertoni, S.; Cerofolini, G.F.; Gassel, H.
Journal Article
1994Investigation of the effect of altered defect structure produced by photon assisted the diffusion of As in silicon during thermal anneallagation
Biro, L.P.; Gyulai, J.; Bogen, S.; Frey, L.; Ryssel, H.
Journal Article
1994Observation of local SIMOX layers by microprobe RBS
Kinomura, A.; Horino, Y.; Mokuno, Y.; Chayahara, A.; Kiuchi, M.; Fujii, K.; Takai, M.; Lohner, T.; Ryssel, H.; Schork, R.
Journal Article
1994On modeling of ion implantation at high temperatures
Pichler, P.; Schork, R.
Journal Article
1994Proceedings of the FORWIHR Symposium on High Performance Scientific Computing
Griebel, M.; Zenger, C.
Conference Proceedings
1994Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Journal Article
1994Silizium - Werkstoff der Mikrosystemtechnik
Dudaicevs, H.; Mokwa, W.
Conference Paper
1994Single crystal growth of Si-Ge alloy by ion implantation and sequential rapid thermal
Kal, S.; Kasko, I.; Ryssel, H.
Journal Article
1994Single-shell carbon nanotubes imaged by atomic force microscopy.
Höper, R.; Workman, R.K.; Chen, D.; Sarid, D.; Yadav, T.; Withers, J.C.; Loutfy, R.O.
Journal Article
1994SOI-Herstellung und Anwendung am Fraunhofer-Institut IMS Duisburg.
Gassel, H.
Conference Paper
1993A controllable mechanism of forming extremely low-resistance nonalloyed ohmic contacts to group III-V compound semiconductors
Stareev, G.; Kunzel, H.; Dortmann, G.
Journal Article
1993Deposition and characterization of diamond epitaxial thin films on silicon substrates
Jiang, X.; Klages, C.-P.; Rösler, M.; Zachai, R.; Hartweg, M.; Füßer, H.-J.
Conference Paper
1993Effect of ion-beam mixing temperature on cobalt silicide formation
Kasko, I.; Dehm, C.; Frey, L.; Ryssel, H.
Journal Article
1993The effect of substrate bias voltage on nucleation of diamond crystals in a microwave plasma assisted CVD process
Jiang, X.; Six, R.; Zachai, R.; Hartweg, M.; Füßer, H.-J.; Klages, C.-P.
Journal Article, Conference Paper
1993Evaluation of residual stresses in a strongly textured saw blade for the production of silicon-wafers
Hauk, V.; Derycke, Pascal; Theiner, Werner Alfred
Conference Paper
1993High energy implantation of high10 B and high11 B into -100- silicon in channel and in random
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Journal Article
1993Influence of impurities on ion beam induced TiSi2 formation
Dehm, C.; Raum, B.; Kasko, I.; Ryssel, H.
Journal Article
1993An integrated sensor for invasive blood velocity measurement
Eichholz, J.; Langerbein, A.; Manoli, Y.; Mokwa, W.; Kersjes, R.A.
Conference Paper
1993A new microstructured silicon substrate for ultrathin gas-sensitive films
Schütze, A.; Weber, U.; Zacheja, J.; Kohl, D.; Mokwa, W.; Rospert, M.; Werno, J.
Conference Paper
1993A novel delineation technique for 2D-profiling of dopants in crystalline silicon
Gong, L.; Frey, L.; Bogen, S.; Ryssel, H.
Journal Article
1993Photon assisted implantation -PAI-
Biro, L.P.; Gyulai, J.; Ryssel, H.; Frey, L.; Kormany, T.; Tuan, N.M.
Journal Article
1993Reduction of heat loss of silicon membranes by the use of trench etching techniques
Werno, J.; Mokwa, W.; Vogt, H.; Kersjes, R.A.
Conference Paper
1993Residual stress during local SIMOX process - Raman measurement and simulation
Seidl, A.; Takai, M.; Sayama, H.; Haramura, K.; Ryssel, H.; Schork, R.; Kato, K.
Journal Article
1993Silicon microsystems
Heuberger, A.
Conference Paper
1993Test monolithischer Sensorsysteme
Dudaicevs, H.; Gottfried-Gottfried, R.
Journal Article
1992Excited defect energy states from temperature dependent ESR.
Kisielowski, C.; Maier, K.; Schneider, J.; Oding, V.
Journal Article
1992Gassensoren auf Siliziumbasis
Kohl, D.; Mokwa, W.
Journal Article
1992Gold and platinum diffusion. The key to the understanding of intrinsic point defect behaviour in silicon
Zimmermann, H.; Ryssel, H.
Journal Article
1992An investigation of vacancy concentrations in bulk silicon
Zimmermann, H.; Ryssel, H.
Conference Paper
1992Shallow p-n junctions produced by laser doping with boron silicate glass
Bollmann, D.; Buchner, R.; Haberger, K.; Neumayer, G.
Conference Paper
1992Silicon technologies for sensor fabrication
Mokwa, W.
Book Article
1991Controlled nucleation - a new approach to improve the crystallinity of RAFT-foils
Reis, I.; Hurrle, A.; Helmreich, D.; Beck, A.; Räuber, A.
Conference Paper
1991In-situ measurement of planarization of wafer topography
Bollmann, D.; Haberger, K.
Conference Paper
1991MBE growth and electrical behavior of single and double Si delta-doped InGaAs-layers
Passenberg, W.; Bach, H.G.; Bottcher, J.
Conference Paper
1991MBE overgrowth of implanted regions in InP:Fe substrates
Kunzel, H.; Gibis, R.; Schlaak, W.; Su, L.M.; Grote, N.
Conference Paper, Journal Article
1991Metallization of integrated circuits by laser evaporation of metal sandwich layers
Bollmann, D.; Haberger, K.; Pielmeier, R.
Conference Paper
1991Molecular beam epitaxy grown Al(Ga)InAs: Schottky contacts and deep levels
Schramm, C.; Bach, H.G.; Kunzel, H.; Praseuth, J.P.
Journal Article
1991Shallow p-n junctions produced by laser doping with Boron and Phosphorus Silicate glass
Bollmann, D.; Stock, G.; Neumayer, G.; Haberger, K.
Conference Paper
1991Thickness inhomogeneity during silicon X-ray mask membrane fabrication: generation and prevention
Löchel, B.; Macioßek, A.; Huber, H.-L.; König, M.
Conference Paper
1991Überblick und Haupttrends im Bereich Halbleitermaterialien und -technologien
Kersten, G.
Book
1990Laser evaporation of metal sandwich layers for improved IC metallization
Bollmann, D.; Haberger, K.; Pielmeier, R.
Journal Article
1990Silicon micromachining for microsensors and microactuators
Benecke, W.
Conference Paper
1990Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K.
Conference Paper
1990Ultra flat P-N junctions formed by solid source laser doping
Stock, G.; Bollmann, D.; Buchner, R.; Neumayer, G.; Haberger, K.
Conference Paper
1989Phase diversity transmission experiments employing novel optical and electronic components
Langenhorst, R.; Wenke, G.; Fluge, M.; Pieper, W.; Weber, H.G.
Conference Paper
1989State of the art of pattern placement accuracy of silicon X-ray master masks
Pongratz, S.; Mescheder, U.; Ehrlich, C.; Huber, H.-L.; Kohlmann, K.; Windbracke, W.
Conference Paper
1989Wideband bipolar multiplier IC with high dynamic range for use in coherent optical receivers
Fluge, M.; Frederiksen, P.T.; Enning, B.; Walf, G.; Weber, H.G.; Rein, H.M.
Journal Article
1988Wafer slicing by internal diameter sawing
Steffens, K.; König, W.; Struth, W.
Conference Paper