Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
1999Equipment and wafer modeling of batch furnaces by neural networks
Benesch, N.; Schneider, C.; Lehnert, W.; Pfitzner, L.; Ryssel, H.
Conference Paper
1999Modeling of edge roughness in ion projection lithography
Henke, W.; Torkler, M.
Journal Article, Conference Paper
1998Experimental verification of three-dimensional simulations of LTO layer deposition on structures prepared by anisotropic wet etching of silicon
Bär, E.; Lorenz, J.; Ryssel, H.
Conference Paper
1996One-level gray-tone design. Mask data preparation and pattern transfer
Reimer, K.; Henke, W.; Quenzer, H.J.; Pilz, W.; Wagner, B.
Conference Paper
1995The STORM technology CAD system
Lorenz, J.; Hill, C.; Jaouen, H.; Lombardi, C.; Lyden, C.; Meyer, K. de; Pelka, J.; Poncet, A.; Rudan, M.; Solmi, S.
Journal Article