Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2019Spatially resolved cross-linking characterization by imaging low-coherence interferometry
Taudt, Christopher; Nelsen, Bryan; Rossegger, Elisabeth; Schlögl, Sandra; Koch, Edmund; Hartmann, Peter
Journal Article
2018Fast cross-linking-characterization of waveguide-polymers on wafers by imaging low-coherence interferometry
Taudt, Christopher; Nelsen, Bryan; Schlögl, Sandra; Koch, Edmund; Hartmann, Peter
Journal Article, Conference Paper
2016Production scheduling in complex job shops from an industrie 4.0 perspective: A review and challenges in the semiconductor industry
Waschneck, Bernd; Altenmüller, Thomas; Bauernhansl, Thomas; Kyek, Andreas
Conference Paper
2014Examples and case studies
Asbach, Christoph; Aguerre, Olivier; Bressot, Christophe; Brouwer, Derk H.; Gommel, Udo; Gorbunov, Boris; Bihan, Olivier le; Jensen, Keld Alstrup; Kaminski, Heinz; Keller, Markus; Koponen, Ismo Kalevi; Kuhlbusch, Thomas A.J.; Lecloux, Andre; Morgeneyer, Martin; Muir, Ian; Shandilya, Neeraj; Stahlmecke, Burkhard; Todea, Ana María
Book Article
2006Modellbasiertes Verfahren zur Online-Leistungsbewertung von automatisierten Transportsystemen in der Halbleiterfertigung
Sturm, R.
Dissertation
2005Grid system for solving computing bottlenecks in semiconductor industries at the example of an AMHS
Knoll, G.; Wesemann, M.; Sturm, R.
Conference Paper
2003Framework for the performance assessment of shop-floor control systems
Mönch, L.; Rose, O.; Sturm, R.
Conference Paper
2003A simulation framework for the performance assessment of shop-floor control systems
Mönch, L.; Rose, O.; Sturm, R.
Journal Article
2003Transition and developments of 300mm-AMHS simulation models
Reddig, K.; Sturm, R.
Conference Paper
2002EuSIC: An information network for innovation and standardization in APC and factory integration
Schneider, C.
Journal Article
2002Framework for the performance assessment of shop-floor control systems
Mönch, L.; Rose, O.; Sturm, R.
Conference Paper
2002Simulation von transienten Szenarien an einem automatisierten Wafertransportsystem
Sturm, R.; Reddig, K.
Conference Paper
2001ASMC 2001. CD-ROM
: Kaufmann, T.
Conference Proceedings
2000Order management for semiconductor manufacturing
Schmidt, T.; Wiendahl, H.-H.; Westkämper, E.
Conference Paper
2000Order Management for Semiconductor Manufacturing - a new Approach Realized with Artificial Neural Networks
Pirron, J.; Schmidt, T.; Wiendahl, H.-H.
Conference Paper
2000Simulation Based Decision Support for Future 300mm Automated Material Handling
Schulz, M.; Stanley, T.D.; Renelt, B.; Sturm, R.; Schwertschlager, O.
Conference Paper
1999Das Informationstechnik-Konzept der Flexiblen Fab
Mönch, G.; Schmalfuß, V.; Frauenhoffer, F.; Sturm, R.; Aron, J.
Conference Paper
1999Die Organisation der Flexiblen Fab
Frauenhoffer, F.; Mönch, G.; Schmalfuß, V.; Silvi, T.; Sturm, R.; Podewils, M. von
Conference Paper
1999Transferring Established Technologies for a Clean Production
Schüle, A.; Kaufmann, T.
Conference Paper
1998Oxide layer thickness measurement
Schneider, C.
Journal Article
1998The Paradigm Shift for Manufacturing Execution Systems in European Projects and SEMI Activities
Kaufmann, T.
Journal Article
1998Productronica 97. Proceedings HLF. Semiconductor equipment and materials contamination control and defect reduction
Ryssel, H.; Pfitzner, L.; Trunk, R.
Book
1998SEMI CIM Framework Status, SEMI Task Force CIM Framework
Hodges, B.; Kaufmann, T.
Conference Paper
1997Modular metrology tools for productivity enhancement in wafer fabs
Schneider, C.; Pfitzner, L.; Ryssel, H.
Conference Paper
1993Simulationsgestützte Planungsmethodik zur Integration von Materialdistributionssystemen
Bader, U.
Conference Paper
1992Information processing in semiconductor manufacturing
 
Conference Proceedings
1991Partikelkontamination und Medienversorgung
Dorner, J.
Conference Paper
1991Partikelmessungen in Gasen
Dorner, J.; Müller, B.
Conference Paper
1990Meßtechnik und Analytik für Halbleiterfertigungsgeräte
Eichinger, P.; Pfitzner, L.; Ryssel, H.; Schneider, C.
Conference Paper
1989Internal process control and automation for semiconductor manufacturing equipment
Pfitzner, L.; Ryssel, H.; Schneider, C.
Conference Paper