Fraunhofer-Gesellschaft

Publica

Hier finden Sie wissenschaftliche Publikationen aus den Fraunhofer-Instituten.
2005Modeling of the plasma impedance in reactive magnetron sputtering for various target materials
Pflug, A.; Siemers, M.; Szyszka, B.; Kappertz, O.; Nyberg, T.; Berg, S.
Conference Paper
2005Structure and secondary electron emission properties of MGO films deposited by pulsed mid-frequency magnetron sputtering
Peters, C.; Krause, U.; Kupfer, H.; Kleinhempel, R.; Richter, F.
Conference Paper